JPS5736763A - Scan electron microscope - Google Patents

Scan electron microscope

Info

Publication number
JPS5736763A
JPS5736763A JP11254380A JP11254380A JPS5736763A JP S5736763 A JPS5736763 A JP S5736763A JP 11254380 A JP11254380 A JP 11254380A JP 11254380 A JP11254380 A JP 11254380A JP S5736763 A JPS5736763 A JP S5736763A
Authority
JP
Japan
Prior art keywords
specimen
signal
electron
detected
deflection coils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11254380A
Other languages
Japanese (ja)
Other versions
JPS6040137B2 (en
Inventor
Yasushi Kokubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP11254380A priority Critical patent/JPS6040137B2/en
Publication of JPS5736763A publication Critical patent/JPS5736763A/en
Publication of JPS6040137B2 publication Critical patent/JPS6040137B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To enable the take-out of a transmission scanning image purely based on the inner composition of the specimen, by employing the detection signal of a transmission electron beam subtracted of the detected signal of the secondary electron produced from the upper and lower faces of the specimen as the brightness signal. CONSTITUTION:The electron beam 2 from an electron gun 1 is two dimension scanned on a specimen 4 through deflection coils 6X, 6Y, while the secondary electron produced from the upper and lower faces of the specimen 4 is detected by secondary electron detectors 7, 8 and the electron beam passed through the specimen 4 is detected by a pass electron detector 9. The output signals V2, V3 from the detectors 7, 8 are added by an adder 11, then provided to a subtractor 10 together with the output signal V1 from the detector 9 to produce the output signal V1-V2- V3. This signal is provided to the grid of a cathode ray tube 12 as the brightness signal, then scanned synchronously by deflection coils 13X, 13Y having common scan circuit 5 with the deflection coils 6X, 6Y. Consequently a contrast image corresponding with the inner composition can be obtained irrespective of the front and rear surface condition of the specimen.
JP11254380A 1980-08-15 1980-08-15 scanning electron microscope Expired JPS6040137B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11254380A JPS6040137B2 (en) 1980-08-15 1980-08-15 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11254380A JPS6040137B2 (en) 1980-08-15 1980-08-15 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS5736763A true JPS5736763A (en) 1982-02-27
JPS6040137B2 JPS6040137B2 (en) 1985-09-09

Family

ID=14589272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11254380A Expired JPS6040137B2 (en) 1980-08-15 1980-08-15 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS6040137B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0327604A (en) * 1989-06-23 1991-02-06 Fujitsu Ltd Transmitting mixer
US6531697B1 (en) 1998-03-02 2003-03-11 Hitachi, Ltd. Method and apparatus for scanning transmission electron microscopy
US6789520B2 (en) 2001-09-17 2004-09-14 Denso Corporation System for cranking internal combustion engine
US6852983B2 (en) 2001-11-20 2005-02-08 Jeol Ltd. Charged-particle beam apparatus equipped with aberration corrector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0327604A (en) * 1989-06-23 1991-02-06 Fujitsu Ltd Transmitting mixer
US6531697B1 (en) 1998-03-02 2003-03-11 Hitachi, Ltd. Method and apparatus for scanning transmission electron microscopy
US6822233B2 (en) 1998-03-02 2004-11-23 Hitachi, Ltd. Method and apparatus for scanning transmission electron microscopy
US6789520B2 (en) 2001-09-17 2004-09-14 Denso Corporation System for cranking internal combustion engine
US6852983B2 (en) 2001-11-20 2005-02-08 Jeol Ltd. Charged-particle beam apparatus equipped with aberration corrector

Also Published As

Publication number Publication date
JPS6040137B2 (en) 1985-09-09

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