GB2019691A - Scanning electron microscope with non-differential phase image formation - Google Patents

Scanning electron microscope with non-differential phase image formation

Info

Publication number
GB2019691A
GB2019691A GB7912904A GB7912904A GB2019691A GB 2019691 A GB2019691 A GB 2019691A GB 7912904 A GB7912904 A GB 7912904A GB 7912904 A GB7912904 A GB 7912904A GB 2019691 A GB2019691 A GB 2019691A
Authority
GB
United Kingdom
Prior art keywords
scanning
electron microscope
phase image
scanning electron
image formation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB7912904A
Other versions
GB2019691B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of GB2019691A publication Critical patent/GB2019691A/en
Application granted granted Critical
Publication of GB2019691B publication Critical patent/GB2019691B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image Processing (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A scanning electron microscope is arranged to provide a non-differentiated phase image by scanning an electron diffraction image of an object (11) over an electron detector (18) by means of a beam scanning system (10). The detector electrode (Fig. 2) is divided into independent quadrants and the output signals are combined as the difference between the sums of two pairs of adjacent quadrants about respective orthogonal divisions, and added to corresponding horizontal and vertical deflection signals when scanning a monitor display 27. The detector electrode can be further divided radially (Fig. 3); and the difference of sum signals from different groupings of the segments can be passed through filters having different pass-bands and then combined to provide the corresponding deflection signals. <IMAGE>
GB7912904A 1978-04-17 1979-04-12 Scanning electron microscope with non-differentiated phaseimage formation Expired GB2019691B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7804037A NL7804037A (en) 1978-04-17 1978-04-17 ELECTRONIC MICROSKOP WITH UNDIFFERENTIATED PHASE IMAGE.

Publications (2)

Publication Number Publication Date
GB2019691A true GB2019691A (en) 1979-10-31
GB2019691B GB2019691B (en) 1982-08-04

Family

ID=19830664

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7912904A Expired GB2019691B (en) 1978-04-17 1979-04-12 Scanning electron microscope with non-differentiated phaseimage formation

Country Status (5)

Country Link
JP (1) JPS54140455A (en)
DE (1) DE2915204A1 (en)
FR (1) FR2423860A1 (en)
GB (1) GB2019691B (en)
NL (1) NL7804037A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0040855A1 (en) * 1980-05-26 1981-12-02 Hitachi, Ltd. A method of displaying an image of phase contrast in a scanning transmission electron microscope
EP0168983A1 (en) * 1984-06-20 1986-01-22 Ibt-Dubilier Limited Scanning microscope
EP0171109A1 (en) * 1984-07-25 1986-02-12 Koninklijke Philips Electronics N.V. Microscope for non-differentiated phase image formation
DE3610165A1 (en) * 1985-03-27 1986-10-02 Olympus Optical Co., Ltd., Tokio/Tokyo OPTICAL SCAN MICROSCOPE
GB2173666A (en) * 1985-04-12 1986-10-15 Plessey Co Plc Scanning optical microscopes
EP0488067A2 (en) * 1990-11-30 1992-06-03 Shimadzu Corporation Ion-scattering spectrometer
EP2194565A1 (en) * 2008-12-03 2010-06-09 FEI Company Dark field detector for use in a charged-particle optical apparatus
EP2866245A1 (en) * 2014-02-24 2015-04-29 Fei Company Method of examining a sample in a charged-particle microscope

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10331137B4 (en) * 2003-07-09 2008-04-30 Carl Zeiss Nts Gmbh Detector system for a scanning electron microscope and scanning electron microscope with a corresponding detector system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
FR2220871B1 (en) * 1973-07-27 1978-01-20 Jeol Ltd
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
FR2300414A2 (en) * 1975-02-07 1976-09-03 Cgr Mev DEVICE FOR MONITORING THE P

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0040855A1 (en) * 1980-05-26 1981-12-02 Hitachi, Ltd. A method of displaying an image of phase contrast in a scanning transmission electron microscope
EP0168983A1 (en) * 1984-06-20 1986-01-22 Ibt-Dubilier Limited Scanning microscope
EP0171109A1 (en) * 1984-07-25 1986-02-12 Koninklijke Philips Electronics N.V. Microscope for non-differentiated phase image formation
US4691103A (en) * 1984-07-25 1987-09-01 U.S. Philips Corporation Microscope for non-differentiated phase image formation
DE3610165A1 (en) * 1985-03-27 1986-10-02 Olympus Optical Co., Ltd., Tokio/Tokyo OPTICAL SCAN MICROSCOPE
GB2173666A (en) * 1985-04-12 1986-10-15 Plessey Co Plc Scanning optical microscopes
EP0488067A2 (en) * 1990-11-30 1992-06-03 Shimadzu Corporation Ion-scattering spectrometer
EP0488067A3 (en) * 1990-11-30 1992-10-07 Shimadzu Corporation Ion-scattering spectrometer
EP2194565A1 (en) * 2008-12-03 2010-06-09 FEI Company Dark field detector for use in a charged-particle optical apparatus
US8288724B2 (en) 2008-12-03 2012-10-16 Fei Company Dark field detector for use in an electron microscope
EP2866245A1 (en) * 2014-02-24 2015-04-29 Fei Company Method of examining a sample in a charged-particle microscope
EP2911180A1 (en) * 2014-02-24 2015-08-26 FEI Company Method of examining a sample in a charged-particle microscope
US9312098B2 (en) 2014-02-24 2016-04-12 Fei Company Method of examining a sample in a charged-particle microscope

Also Published As

Publication number Publication date
NL7804037A (en) 1979-10-19
FR2423860B1 (en) 1985-01-18
JPS54140455A (en) 1979-10-31
GB2019691B (en) 1982-08-04
DE2915204A1 (en) 1979-10-25
FR2423860A1 (en) 1979-11-16

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee