JPS5516337A - Scanning type electron microscope - Google Patents

Scanning type electron microscope

Info

Publication number
JPS5516337A
JPS5516337A JP8865178A JP8865178A JPS5516337A JP S5516337 A JPS5516337 A JP S5516337A JP 8865178 A JP8865178 A JP 8865178A JP 8865178 A JP8865178 A JP 8865178A JP S5516337 A JPS5516337 A JP S5516337A
Authority
JP
Japan
Prior art keywords
signal
scanning
sample
corrective
ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8865178A
Other languages
Japanese (ja)
Inventor
Masahiro Tomita
Osamu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8865178A priority Critical patent/JPS5516337A/en
Publication of JPS5516337A publication Critical patent/JPS5516337A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain proper signal even when the thickness of sample is unegual and scanning region is large by generating an external corrective signal synchronous with scanning and then displaying it in the form of signal based the ratio of corrective signal to information signal.
CONSTITUTION: An external corrective signal from the external corrective signal generator 9 is generated synchronously with scanning signal from the scanning power source 5 and then put in the division circuit 8. At the division circuit 8, the ratio of corrective signal to information signal from the amplifier 7 is obtained, and then the ratio signal is applied through the video amplifier 10 to the grid of the cathode tube 11. On the other hand, scanning signal from the scanning power source 5 is applied to the deflecting coil of the cathode tube 11. Thus, because the screen of the cathode tube is scanned two-dimensionally synchronously with the scanning of sample, scanning image by the reflecting electron of the sample 3 can be displayed. Thus, proper or similar signal or approximate signal can be obtained very simply.
COPYRIGHT: (C)1980,JPO&Japio
JP8865178A 1978-07-19 1978-07-19 Scanning type electron microscope Pending JPS5516337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8865178A JPS5516337A (en) 1978-07-19 1978-07-19 Scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8865178A JPS5516337A (en) 1978-07-19 1978-07-19 Scanning type electron microscope

Publications (1)

Publication Number Publication Date
JPS5516337A true JPS5516337A (en) 1980-02-05

Family

ID=13948712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8865178A Pending JPS5516337A (en) 1978-07-19 1978-07-19 Scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS5516337A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5912460U (en) * 1982-07-12 1984-01-25 日本電子株式会社 Electron beam deflection control device for electron microscopes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5912460U (en) * 1982-07-12 1984-01-25 日本電子株式会社 Electron beam deflection control device for electron microscopes

Similar Documents

Publication Publication Date Title
JPS5851664B2 (en) Sample image display device
JPS5516337A (en) Scanning type electron microscope
ES477437A1 (en) Picture display device comprising a field deflection circuit and a field blanking circuit
JPS5665579A (en) Image sensor
JPS5842938B2 (en) scanning electron microscope
JPS5478075A (en) Sample image display device
JPS545374A (en) Electronic gun
HK105295A (en) Display apparatus with a cathode ray tube and a device for measuring the beam circuit
JPS54101257A (en) Image dispaly unit
JPS54138467A (en) Scanning type electron microscope or resembling apparatus
JPS5732557A (en) Scan electron microscope
JPS55126950A (en) Correction method of drift in electron microscope
JPS5245259A (en) Color picture tube device
JPS55151757A (en) Image display for scanning type transmission electron microscope
KR830002860Y1 (en) Scanning apparatus for scanning electron microscope and similar devices
JPS5395526A (en) Cathode ray tube display unit
JPS5688247A (en) Electron beam picture displaying method and its device
JPS5289459A (en) Stereo scan electron microscope
JPS5339852A (en) Color cathode ray tube device
JPS55126952A (en) Scanning method in scanning type electron microscope
JPS5467366A (en) Display unit for charging particle ray image
JPS5414667A (en) Color picture tube
JPS55130054A (en) Scanning electron microscope
JPS5581455A (en) Observing method for crossover image of electron gun
JPS5332666A (en) Electron ray deflector