JPS5732557A - Scan electron microscope - Google Patents

Scan electron microscope

Info

Publication number
JPS5732557A
JPS5732557A JP10502280A JP10502280A JPS5732557A JP S5732557 A JPS5732557 A JP S5732557A JP 10502280 A JP10502280 A JP 10502280A JP 10502280 A JP10502280 A JP 10502280A JP S5732557 A JPS5732557 A JP S5732557A
Authority
JP
Japan
Prior art keywords
diaphragm
board
electron
electron beam
ray tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10502280A
Other languages
Japanese (ja)
Other versions
JPS6248344B2 (en
Inventor
Minoru Saito
Naotake Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10502280A priority Critical patent/JPS5732557A/en
Publication of JPS5732557A publication Critical patent/JPS5732557A/en
Publication of JPS6248344B2 publication Critical patent/JPS6248344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To enable the viewing of a filament image, by providing a diaphragm projected with an electron beam pattern while detecting the beam passed through said diaphragm in accordance with the scanning of a deflection coil and employing as the brightness modulation signal for a cathode ray tube. CONSTITUTION:The electron beam 2 pattern from an electron gun 1 is projected on a diaphragm board 4 made with a small diaphragm hole, while a deflection coil 3 is provided in the proximity of the electron gun 1 to scan the electron beam 2 on said board 4 based on the output signal from a saw tooth wave generating circuit 8. Then the beam passed through said board 4 is irradiated onto a specimen 5 and the secondary electron 9 is detected by a detector 6 to be applied on the grid of a cathode ray tube 7 as the brightness modulation signal. Consequently the diaphragm hole in the diaphragm board 4. Consequently the pattern of the electron beam 2 passing through the hole in the diaphragm board 4 can be displayed directly on the cathode ray tube 7, thereby the filament image in the scan electron microscope can be viewed easily.
JP10502280A 1980-08-01 1980-08-01 Scan electron microscope Granted JPS5732557A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10502280A JPS5732557A (en) 1980-08-01 1980-08-01 Scan electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10502280A JPS5732557A (en) 1980-08-01 1980-08-01 Scan electron microscope

Publications (2)

Publication Number Publication Date
JPS5732557A true JPS5732557A (en) 1982-02-22
JPS6248344B2 JPS6248344B2 (en) 1987-10-13

Family

ID=14396422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10502280A Granted JPS5732557A (en) 1980-08-01 1980-08-01 Scan electron microscope

Country Status (1)

Country Link
JP (1) JPS5732557A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5420016A (en) * 1992-03-24 1995-05-30 Serim Research Corporation Test device and kit for detecting helicobacter pylori

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437431U (en) * 1990-07-26 1992-03-30

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979454A (en) * 1972-12-06 1974-07-31
JPS5025169A (en) * 1973-07-05 1975-03-17
JPS5220819A (en) * 1976-08-16 1977-02-17 Matsushita Electric Ind Co Ltd Attaching method of parts
JPS5581455A (en) * 1978-12-15 1980-06-19 Jeol Ltd Observing method for crossover image of electron gun

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4979454A (en) * 1972-12-06 1974-07-31
JPS5025169A (en) * 1973-07-05 1975-03-17
JPS5220819A (en) * 1976-08-16 1977-02-17 Matsushita Electric Ind Co Ltd Attaching method of parts
JPS5581455A (en) * 1978-12-15 1980-06-19 Jeol Ltd Observing method for crossover image of electron gun

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5420016A (en) * 1992-03-24 1995-05-30 Serim Research Corporation Test device and kit for detecting helicobacter pylori

Also Published As

Publication number Publication date
JPS6248344B2 (en) 1987-10-13

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