JPS5760649A - Strobe electron microscope - Google Patents
Strobe electron microscopeInfo
- Publication number
- JPS5760649A JPS5760649A JP13388580A JP13388580A JPS5760649A JP S5760649 A JPS5760649 A JP S5760649A JP 13388580 A JP13388580 A JP 13388580A JP 13388580 A JP13388580 A JP 13388580A JP S5760649 A JPS5760649 A JP S5760649A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- specimen
- pulse
- signal
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 230000001360 synchronised effect Effects 0.000 abstract 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000010363 phase shift Effects 0.000 abstract 1
- 238000003079 width control Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
- H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To view the transmission of the apply voltage as a moving picture by performing the predetermined phase shift of a beam every time when (n) of vertical scanning signals are produced during the scanning of a specimen on which a synchronized pulse beam of an electron beam is applied. CONSTITUTION:The electron beam from an electron gun 2 provided in a mirror tube 1 is deflected by a pulse beam generating deflector 6 to be controlled by a pulse width control circuit 15 and a pulse beam is produced by an aperture board 7. Said beam will pass through a focus lens 3 then deflected 5X, 5Y by the signal from a scan signal generating circuit 14, to irradiate a specimen 4. The secondary electron emitted from the specimen 4 on which the synchronous voltage is applied from a signal generator 10 is detected 16. A pulse oscillator 8 is connected to a phase control circuit and said circuit 10. In such a device when three vertical scan signals are provided from the circuit 14, a counter 11 is set to provided single signal to the circuit 9 thus to display the specimen image having the phase phi, 2phi, 3phi as a moving picture on a cathode ray tube 12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13388580A JPS5760649A (en) | 1980-09-26 | 1980-09-26 | Strobe electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13388580A JPS5760649A (en) | 1980-09-26 | 1980-09-26 | Strobe electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5760649A true JPS5760649A (en) | 1982-04-12 |
Family
ID=15115358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13388580A Pending JPS5760649A (en) | 1980-09-26 | 1980-09-26 | Strobe electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5760649A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931549A (en) * | 1982-08-13 | 1984-02-20 | Hitachi Ltd | Image display system of stroboscopic scanning type electron microscope |
| JPS59147480A (en) * | 1983-02-09 | 1984-08-23 | パイオニア株式会社 | Printed board device |
-
1980
- 1980-09-26 JP JP13388580A patent/JPS5760649A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5931549A (en) * | 1982-08-13 | 1984-02-20 | Hitachi Ltd | Image display system of stroboscopic scanning type electron microscope |
| JPH05814B2 (en) * | 1982-08-13 | 1993-01-06 | Hitachi Ltd | |
| JPS59147480A (en) * | 1983-02-09 | 1984-08-23 | パイオニア株式会社 | Printed board device |
| JPH0447997B2 (en) * | 1983-02-09 | 1992-08-05 | Pioneer Electronic Corp |
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