JPS5736762A - Color discriminating scan type electron microscope - Google Patents

Color discriminating scan type electron microscope

Info

Publication number
JPS5736762A
JPS5736762A JP11215580A JP11215580A JPS5736762A JP S5736762 A JPS5736762 A JP S5736762A JP 11215580 A JP11215580 A JP 11215580A JP 11215580 A JP11215580 A JP 11215580A JP S5736762 A JPS5736762 A JP S5736762A
Authority
JP
Japan
Prior art keywords
signal
color
characteristic
ray
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11215580A
Other languages
Japanese (ja)
Inventor
Hideki Yakida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11215580A priority Critical patent/JPS5736762A/en
Publication of JPS5736762A publication Critical patent/JPS5736762A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To enable the display of fine composition, structure, etc. of a specimen with the color reproduction picture image by employing the signal characteristic of the material or the composition of the characteristic X-ray produced simultaneously with the emission of the secondary electron as the color tone signal. CONSTITUTION:The signal characteristic of the material or the composition of the characteristic X-ray, Auge electron, etc. produced simultaneously with the emission of the secondary electron due to the irradiation of the electron beam is used as the color tone signal. For example, the secondary electron produced from a specimen 4 is detected by a scintillation counter 5 then amplified by an amplifier 6. While the characteristic X-ray produced from the surface of the specimen 4 is detected by a X-ray detector 7 and said signal is converted to a digital signal proportonal to the X-ray energy by a pulse analyzer 8, while furthermore converted to three primary colors of red, green and blue by a color composition circuit 9. Thereafter the brightness signal amplified by the amplifier 6 is modulated by the modulating circuits 10-12 of red, green and blue thus to display the color picture image on a color Braun tube 19.
JP11215580A 1980-08-13 1980-08-13 Color discriminating scan type electron microscope Pending JPS5736762A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11215580A JPS5736762A (en) 1980-08-13 1980-08-13 Color discriminating scan type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11215580A JPS5736762A (en) 1980-08-13 1980-08-13 Color discriminating scan type electron microscope

Publications (1)

Publication Number Publication Date
JPS5736762A true JPS5736762A (en) 1982-02-27

Family

ID=14579602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11215580A Pending JPS5736762A (en) 1980-08-13 1980-08-13 Color discriminating scan type electron microscope

Country Status (1)

Country Link
JP (1) JPS5736762A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265490A (en) * 1992-05-01 1994-09-22 Link Analytical Ltd Apparatus and method for display of visual image of x-ray response of test object
JP2009544026A (en) * 2006-07-20 2009-12-10 ジーエスアイ ヘルムホルツツェントゥルム フュア シュヴェリオーネンフォルシュング ゲーエムベーハー Method for determining the material composition of a material specimen

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913100A (en) * 1972-05-17 1974-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913100A (en) * 1972-05-17 1974-02-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265490A (en) * 1992-05-01 1994-09-22 Link Analytical Ltd Apparatus and method for display of visual image of x-ray response of test object
JP2009544026A (en) * 2006-07-20 2009-12-10 ジーエスアイ ヘルムホルツツェントゥルム フュア シュヴェリオーネンフォルシュング ゲーエムベーハー Method for determining the material composition of a material specimen

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