JPS57143251A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
JPS57143251A
JPS57143251A JP2810881A JP2810881A JPS57143251A JP S57143251 A JPS57143251 A JP S57143251A JP 2810881 A JP2810881 A JP 2810881A JP 2810881 A JP2810881 A JP 2810881A JP S57143251 A JPS57143251 A JP S57143251A
Authority
JP
Japan
Prior art keywords
specimen
detector
contrast
maintain
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2810881A
Other languages
Japanese (ja)
Other versions
JPS6257064B2 (en
Inventor
Takashi Shimatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP2810881A priority Critical patent/JPS57143251A/en
Publication of JPS57143251A publication Critical patent/JPS57143251A/en
Publication of JPS6257064B2 publication Critical patent/JPS6257064B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To allow a specimen to be displayed to maintain the predetermined luminance and contrast by a method wherein, based on the difference of a detection signal to a reference signal, the quantity of electron beams radiated on the specimen is controlled. CONSTITUTION:A particle generated by a specimen 5 through scanning, for instance, a secondary electron is detected by a detector 8, and its output is applied to a luminance modulation grid G of a cathode-ray tube 10 via an amplifier 9. A control circuit 15 for controlling the excitation level of a condenser lens controls the quantity of electron beams radiated on the specimen 5 by controlling the excitation level of the condenser lens 3, so that the quantity of secondary electons detected by the detector 8 is made constant. The output signal value given by a first switching circuit 14 is compared with a reference signal value and the excitation current value given by the lens 3 is regulated by the corresponding difference. In so doing, the specimen image is allowed to maintain the predetermined luminance or contrast.
JP2810881A 1981-02-27 1981-02-27 Electron beam apparatus Granted JPS57143251A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2810881A JPS57143251A (en) 1981-02-27 1981-02-27 Electron beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2810881A JPS57143251A (en) 1981-02-27 1981-02-27 Electron beam apparatus

Publications (2)

Publication Number Publication Date
JPS57143251A true JPS57143251A (en) 1982-09-04
JPS6257064B2 JPS6257064B2 (en) 1987-11-28

Family

ID=12239609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2810881A Granted JPS57143251A (en) 1981-02-27 1981-02-27 Electron beam apparatus

Country Status (1)

Country Link
JP (1) JPS57143251A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182645A (en) * 1984-09-29 1986-04-26 Jeol Ltd X-ray microanalyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182645A (en) * 1984-09-29 1986-04-26 Jeol Ltd X-ray microanalyzer

Also Published As

Publication number Publication date
JPS6257064B2 (en) 1987-11-28

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