JPS5582072A - Measuring method for emitted electron flow angle distribution for electron gun - Google Patents

Measuring method for emitted electron flow angle distribution for electron gun

Info

Publication number
JPS5582072A
JPS5582072A JP15610878A JP15610878A JPS5582072A JP S5582072 A JPS5582072 A JP S5582072A JP 15610878 A JP15610878 A JP 15610878A JP 15610878 A JP15610878 A JP 15610878A JP S5582072 A JPS5582072 A JP S5582072A
Authority
JP
Japan
Prior art keywords
electron
electron flow
electron gun
fed
gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15610878A
Other languages
Japanese (ja)
Other versions
JPS5842934B2 (en
Inventor
Seiichi Nakagawa
Yoichi Shibuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15610878A priority Critical patent/JPS5842934B2/en
Publication of JPS5582072A publication Critical patent/JPS5582072A/en
Publication of JPS5842934B2 publication Critical patent/JPS5842934B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To enable to measure the angular distribution of electron flow easily, by measuring the beam current through the sequential emission of the electron flow having different emission angle emitted from the electron gun with the two stages of the polarization systems placed between the electron gun and the collective lens to the collective lens.
CONSTITUTION: The electron gun 1 consists of the filament 2, Wehnelt electrode 3 and anode 4. The electron flow from the electron gun 1 is collected with the first and second collection lenses 5, 6, control is made at the power supplies 7, 8, and the excitation of the lens 6 can be interrupted with the switch 9. The electron flow can be detected with the Farady cup 11 on the stage 10, and the signal is fed to the terminal Y of the X-Y recorder 13 via the amplifier 12. The deflection signals S1, S2 are fed to the two stages of the polarization systems 14, 15 from the deflection power supply 18, and a part of the signal S1 is fed to the X terminal of the recorder 13. After image forming the cross over image on the cup 11, the signals S1, S2 are suitably swept to obtain the distribution curve of emission electron flow.
COPYRIGHT: (C)1980,JPO&Japio
JP15610878A 1978-12-15 1978-12-15 Method for measuring the angular distribution of emitted electron flow in an electron gun Expired JPS5842934B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15610878A JPS5842934B2 (en) 1978-12-15 1978-12-15 Method for measuring the angular distribution of emitted electron flow in an electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15610878A JPS5842934B2 (en) 1978-12-15 1978-12-15 Method for measuring the angular distribution of emitted electron flow in an electron gun

Publications (2)

Publication Number Publication Date
JPS5582072A true JPS5582072A (en) 1980-06-20
JPS5842934B2 JPS5842934B2 (en) 1983-09-22

Family

ID=15620476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15610878A Expired JPS5842934B2 (en) 1978-12-15 1978-12-15 Method for measuring the angular distribution of emitted electron flow in an electron gun

Country Status (1)

Country Link
JP (1) JPS5842934B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109444947A (en) * 2019-01-08 2019-03-08 中国工程物理研究院激光聚变研究中心 A kind of X-ray radiation stream diagnostic system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6091619A (en) * 1983-10-25 1985-05-23 松下電器産業株式会社 Electrolytic condenser
JPS6398624U (en) * 1986-12-18 1988-06-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109444947A (en) * 2019-01-08 2019-03-08 中国工程物理研究院激光聚变研究中心 A kind of X-ray radiation stream diagnostic system
CN109444947B (en) * 2019-01-08 2023-08-18 中国工程物理研究院激光聚变研究中心 X-ray radiation flow diagnosis system

Also Published As

Publication number Publication date
JPS5842934B2 (en) 1983-09-22

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