JPS54149568A - Scanning electron microscope - Google Patents
Scanning electron microscopeInfo
- Publication number
- JPS54149568A JPS54149568A JP5848578A JP5848578A JPS54149568A JP S54149568 A JPS54149568 A JP S54149568A JP 5848578 A JP5848578 A JP 5848578A JP 5848578 A JP5848578 A JP 5848578A JP S54149568 A JPS54149568 A JP S54149568A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- sample
- scanning
- signal
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To make it possile to reduce the attrition of a filament and also to prolong the lifetime of the filament by controlling a variable method for the intensity of an electron beam by a contrast detection circuit in a scanning electron microscope.
CONSTITUTION: An electron beam from electron gun 1 is focused thinly and projected upon sample 8, where it scans on a fixed region in a two-dimensional mode. Reflected electrons and secondary electrons from sample 8 are detected by electron- beam detector 12, which outputs its detection signal to cathode-ray tube 14. Since deflecting coil 15 of the cathode-ray tube is supplied with a scanning signal from scanning power supply 11, the scanning picture of sample 8 is displayed on cathode- ray tube 14. Signals held by sample holding circuits 18 and 19 are supplied to subtracter circuit 20, where the difference is found. Next, comparator circuit 22 compares the difference signal with a reference voltage signal equivalent to a preset optimum contrast and the error signal of it is sent to electron-gun power supply 5. For the purpose, the bias voltage of Wehnelt cylinder 3 and the heating current of filament 2 are so controlled that the output of comparator circuit 22 will be zero.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5848578A JPS5834897B2 (en) | 1978-05-17 | 1978-05-17 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5848578A JPS5834897B2 (en) | 1978-05-17 | 1978-05-17 | scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54149568A true JPS54149568A (en) | 1979-11-22 |
| JPS5834897B2 JPS5834897B2 (en) | 1983-07-29 |
Family
ID=13085721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5848578A Expired JPS5834897B2 (en) | 1978-05-17 | 1978-05-17 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5834897B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0060337A2 (en) * | 1981-03-17 | 1982-09-22 | Siemens Aktiengesellschaft | Electron microscope with scanning beam |
| CN110161065A (en) * | 2018-02-11 | 2019-08-23 | 中国科学院电工研究所 | A kind of measurement of secondary electron yield and energy spectrum analysis device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6052499A (en) * | 1983-09-02 | 1985-03-25 | 日産自動車株式会社 | Industrial car |
| JPS62157196A (en) * | 1985-12-27 | 1987-07-13 | 小松フオ−クリフト株式会社 | Frame structure of battery forklift |
-
1978
- 1978-05-17 JP JP5848578A patent/JPS5834897B2/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0060337A2 (en) * | 1981-03-17 | 1982-09-22 | Siemens Aktiengesellschaft | Electron microscope with scanning beam |
| CN110161065A (en) * | 2018-02-11 | 2019-08-23 | 中国科学院电工研究所 | A kind of measurement of secondary electron yield and energy spectrum analysis device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5834897B2 (en) | 1983-07-29 |
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