JPS57210548A - Method for scanning charged corpuscular beam - Google Patents

Method for scanning charged corpuscular beam

Info

Publication number
JPS57210548A
JPS57210548A JP9640081A JP9640081A JPS57210548A JP S57210548 A JPS57210548 A JP S57210548A JP 9640081 A JP9640081 A JP 9640081A JP 9640081 A JP9640081 A JP 9640081A JP S57210548 A JPS57210548 A JP S57210548A
Authority
JP
Japan
Prior art keywords
sample
corpuscular
distance
deflection system
corpuscular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9640081A
Other languages
Japanese (ja)
Inventor
Hirotoshi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP9640081A priority Critical patent/JPS57210548A/en
Publication of JPS57210548A publication Critical patent/JPS57210548A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To make the highest performance in a convergence system exhibitable in scanning a beam relatively on a sample face, by keeping the beam stationary but moving the sample alone, in regard to the scanning procedure of an electron beam, an ionic beam and suchlike to that sample. CONSTITUTION:A corpuscular beam B converged with a converging system 2 upon coming from a corpuscular source 1 is always left in a state of standing still while a sample 4 is arranged at a point where the corpuscular beam B connects an image and this sample gets moved. Doing so, the conventional deflection system need not be required any longer and thereby various optical problems caused by the deflection system itself do not happen at all, through which there is no binding requirements as to space and distance as the need to accommodate the deflection system so that no active distance l may be set at a most suitable distance for the converging system 2 and the corpuscular beam is efficiently converged to secure the highest performance, thus enabling it to obtain a super-minimal spot diameter by far smaller than ever before on the sample surface in high density.
JP9640081A 1981-06-22 1981-06-22 Method for scanning charged corpuscular beam Pending JPS57210548A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9640081A JPS57210548A (en) 1981-06-22 1981-06-22 Method for scanning charged corpuscular beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9640081A JPS57210548A (en) 1981-06-22 1981-06-22 Method for scanning charged corpuscular beam

Publications (1)

Publication Number Publication Date
JPS57210548A true JPS57210548A (en) 1982-12-24

Family

ID=14163906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9640081A Pending JPS57210548A (en) 1981-06-22 1981-06-22 Method for scanning charged corpuscular beam

Country Status (1)

Country Link
JP (1) JPS57210548A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60254545A (en) * 1984-05-31 1985-12-16 Rigaku Denki Kogyo Kk Scanning analyzer
JPH01114783A (en) * 1987-10-29 1989-05-08 Hitachi Ltd Measuring instrument for primary ion beam diameter of ion microanalyzer
JPH0198471U (en) * 1987-12-22 1989-06-30

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521159A (en) * 1975-06-20 1977-01-06 Shinko Wire Co Ltd Plasticccovered wire rope with stopper and its manufacture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521159A (en) * 1975-06-20 1977-01-06 Shinko Wire Co Ltd Plasticccovered wire rope with stopper and its manufacture

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60254545A (en) * 1984-05-31 1985-12-16 Rigaku Denki Kogyo Kk Scanning analyzer
JPH01114783A (en) * 1987-10-29 1989-05-08 Hitachi Ltd Measuring instrument for primary ion beam diameter of ion microanalyzer
JPH0198471U (en) * 1987-12-22 1989-06-30

Similar Documents

Publication Publication Date Title
JPS5430854A (en) Two-dimensional scanner
JPS5541678A (en) Electron gun for cathode ray tube
JPS57210548A (en) Method for scanning charged corpuscular beam
JPS5367099A (en) Electron beam shape accelerator
GB1249427A (en) Cathode ray tube
JPS53145562A (en) Electronic gun
JPS527670A (en) Automatic focus control method for electron beams
JPS5263062A (en) Electron gun for color picture tube
JPS5287024A (en) Recording means for chiaroscuro image
KR870000281B1 (en) Electron-gun for a c.r.t.
JPS55121254A (en) Focusing lens of electron gun for cathode-ray tube
GB941734A (en) Improvements in electron gun
JPS5234690A (en) Method to obatain x-ray body axis tomogramic image
JPS5688240A (en) Camera tube
JPS5318916A (en) Cathode-ray tube
JPS5414154A (en) Electron gun
JPS6486431A (en) Cathode-ray tube
JPS5582072A (en) Measuring method for emitted electron flow angle distribution for electron gun
JPS5412854A (en) Laser beam modulating system
JPS5538057A (en) Electron beam device
JPS5225563A (en) In-line type electron gun electrode structure
JPS54109756A (en) Electron gun for video tube
JPS53144658A (en) Cathode-ray tube
JPS54157076A (en) Electron gun
JPS5236463A (en) Electron gun cathode structure