JPS527670A - Automatic focus control method for electron beams - Google Patents

Automatic focus control method for electron beams

Info

Publication number
JPS527670A
JPS527670A JP8310075A JP8310075A JPS527670A JP S527670 A JPS527670 A JP S527670A JP 8310075 A JP8310075 A JP 8310075A JP 8310075 A JP8310075 A JP 8310075A JP S527670 A JPS527670 A JP S527670A
Authority
JP
Japan
Prior art keywords
control method
focus control
electron beams
automatic focus
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8310075A
Other languages
Japanese (ja)
Inventor
Muneharu Kayanuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP8310075A priority Critical patent/JPS527670A/en
Publication of JPS527670A publication Critical patent/JPS527670A/en
Pending legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: A focus control method with an excellent operationability and capable of automatic control with a sufficient tracking performance for the great focal changes.
COPYRIGHT: (C)1977,JPO&Japio
JP8310075A 1975-07-08 1975-07-08 Automatic focus control method for electron beams Pending JPS527670A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8310075A JPS527670A (en) 1975-07-08 1975-07-08 Automatic focus control method for electron beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8310075A JPS527670A (en) 1975-07-08 1975-07-08 Automatic focus control method for electron beams

Publications (1)

Publication Number Publication Date
JPS527670A true JPS527670A (en) 1977-01-20

Family

ID=13792761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8310075A Pending JPS527670A (en) 1975-07-08 1975-07-08 Automatic focus control method for electron beams

Country Status (1)

Country Link
JP (1) JPS527670A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56134734A (en) * 1980-03-25 1981-10-21 Chiyou Lsi Gijutsu Kenkyu Kumiai Electronic beam exposing apparatus
US4605860A (en) * 1983-09-28 1986-08-12 Hitachi, Ltd. Apparatus for focusing a charged particle beam onto a specimen
JPH05283325A (en) * 1992-03-31 1993-10-29 Nec Kansai Ltd Automatically focussing mechanism for exposure device to electron beam
RU2495737C1 (en) * 2012-02-21 2013-10-20 Федеральное государственное унитарное предприятие "Российский федеральный ядерный центр - Всероссийский научно-исследовательский институт технической физики имени академика Е.И. Забабахина" Method of electron beam welding control
CN105904078A (en) * 2016-06-24 2016-08-31 桂林狮达机电技术工程有限公司 Zoom welding method and system of electron beam

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56134734A (en) * 1980-03-25 1981-10-21 Chiyou Lsi Gijutsu Kenkyu Kumiai Electronic beam exposing apparatus
US4605860A (en) * 1983-09-28 1986-08-12 Hitachi, Ltd. Apparatus for focusing a charged particle beam onto a specimen
JPH05283325A (en) * 1992-03-31 1993-10-29 Nec Kansai Ltd Automatically focussing mechanism for exposure device to electron beam
RU2495737C1 (en) * 2012-02-21 2013-10-20 Федеральное государственное унитарное предприятие "Российский федеральный ядерный центр - Всероссийский научно-исследовательский институт технической физики имени академика Е.И. Забабахина" Method of electron beam welding control
CN105904078A (en) * 2016-06-24 2016-08-31 桂林狮达机电技术工程有限公司 Zoom welding method and system of electron beam
CN105904078B (en) * 2016-06-24 2017-11-17 桂林狮达机电技术工程有限公司 Electron beam zoom soldering method and system

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