JPS54131992A - Scanning type electron microscope - Google Patents

Scanning type electron microscope

Info

Publication number
JPS54131992A
JPS54131992A JP3919678A JP3919678A JPS54131992A JP S54131992 A JPS54131992 A JP S54131992A JP 3919678 A JP3919678 A JP 3919678A JP 3919678 A JP3919678 A JP 3919678A JP S54131992 A JPS54131992 A JP S54131992A
Authority
JP
Japan
Prior art keywords
specimen
electron beam
scanning
electron microscope
ray tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3919678A
Other languages
Japanese (ja)
Inventor
Shigeto Sunakozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3919678A priority Critical patent/JPS54131992A/en
Publication of JPS54131992A publication Critical patent/JPS54131992A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To compensate the fluctuations of relative positions of specimen and electron beam, by intermittently stopping the scanning of the specimen by electron beam, radiating the intended part of the specimen, and displaying the part, together with the scanning image, according to the information of radiation in a cathode ray tube. CONSTITUTION:A specimen 3 is two-dimensionally scanned with electron beam 2 through a two-dimensional polarizer 4. According to this scanning information, the scanning image of the specimen 3 is designed to be displayed in a cathode ray tube 9. In thus constituted scanning type electron microscope, the scanning of the specimen 3 by electron beam 2 is stopped intermittently, and the intended part of the specimen 3 is radiated by the electron beam 2 in order to obtain the analytical data of the part. At the same time, according to the information obtained from the intended part of the specimen 3 radiated by the electron beam 2, this part is displayed also in the cathode ray tube 9. Therefore, designing a simple constitution, it is possible to obtain a scanning type electron microscope which is suited to compensate the fluctuations of relative positions of the specimen and electron beam occurring in the process of analysis of the specimen.
JP3919678A 1978-04-05 1978-04-05 Scanning type electron microscope Pending JPS54131992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3919678A JPS54131992A (en) 1978-04-05 1978-04-05 Scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3919678A JPS54131992A (en) 1978-04-05 1978-04-05 Scanning type electron microscope

Publications (1)

Publication Number Publication Date
JPS54131992A true JPS54131992A (en) 1979-10-13

Family

ID=12546358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3919678A Pending JPS54131992A (en) 1978-04-05 1978-04-05 Scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS54131992A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616252U (en) * 1984-06-19 1986-01-14 日本電子株式会社 electron beam equipment
JP2001307672A (en) * 2000-04-21 2001-11-02 Hitachi Ltd Element analyzing apparatus and scanning transmission electron microscope and element analyzing method
US6933501B2 (en) 2001-11-02 2005-08-23 Hitachi, Ltd. Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616252U (en) * 1984-06-19 1986-01-14 日本電子株式会社 electron beam equipment
JPH0238368Y2 (en) * 1984-06-19 1990-10-16
JP2001307672A (en) * 2000-04-21 2001-11-02 Hitachi Ltd Element analyzing apparatus and scanning transmission electron microscope and element analyzing method
US6933501B2 (en) 2001-11-02 2005-08-23 Hitachi, Ltd. Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method

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