JPS6056344A - Scanning type reflecting electron diffraction microscope apparatus - Google Patents

Abstract

PURPOSE:To obtain small size electron diffraction microscope apparatus with excellent operability and image processing capability by providing a deflection system and aperture between a sample and phosphorus plate or electron detector and converting an optical signal generated by electrons passing through the aperture into a brightness modulated signal of the cathode ray tube. CONSTITUTION:A part of reflected diffraction beam 8 obtained when the primary electron beam 4 is fixed to the surface of sample 7 passes a shielding plate 16 and further smaller part passes an aperture 11 to form a bright spot on a phosphorus plate 9. An optical signal depending on the bright spot is received by a photo conversion element 12 through an observation window 10 and is converted into an electrical signal and it is used as the brightness modulated signal of the cathode ray tube CRT 18 for reflected diffraction beam. In this case, a deflection coil group 17 is operated by the scanning power supply 19 for reflected diffraction beam, the reflected diffraction beam 8 passing a magnetic field shielding plate 16 is deflected and a brightness modulated image synchronized with such deflection is displayed on the CRT 18.

Description

Detailed Description of the Invention [Field of Application of the Invention] The present invention relates to an improvement in a scanning backscattered electron diffraction microscope for analyzing the crystallinity of a sample surface. (This relates to a mechanism that reduces the size of the device, improves its operability, and improves its image processing ability by making it possible to display images.)

[Background of the invention]

With a conventional scanning reflection electron diffraction microscope, a reflection diffraction image is formed on a fluorescent plate in order to determine the crystal structure of the analysis point on the surface of the sample. However, in order to obtain sufficient information from the reflection diffraction image, it is necessary to rely on mechanical operations to reduce the diffraction spots in the reflection diffraction image. When processing one reflection diffraction image gold painting, which is not easy to operate, special equipment is required to divide the two-dimensional image into pixels and store it. Conventional devices suffer from this drawback, and some kind of countermeasure has been desired.

[Purpose of the invention]

Therefore, an object of the present invention is to provide a compact, easy-to-operate, and high-image-processing reflector and f-type reflector by making it possible to obtain a reflection diffraction image on a cathode ray tube rather than on a fluorescent plate. We provide a full range of Xuji diffraction microscope equipment.

[Summary of the invention]

In order to achieve the above object, in the present invention, a deflection system and an aperture are provided between the sample and the fluorescent plate or the acid detector, and the reflected radiation within a certain angular range is deflected from the deflection system V. At that time, the light emitted by the electron beam that passes through the entire lunar eclipse is converted into a luminance modulation signal of the cathode ray tube (cathode ray tube) to obtain a reflected diffraction image of the total lunar eclipse. The scanning-type backscattered electron diffraction system (wX) is configured as follows:

[Embodiments of the invention]

Below, this book will be explained in detail using drawings.

FIG. 1 shows the basic configuration of a conventional scanning-type backscattered electron diffraction microscope. In the same figure, acceleration power supply 1?
A primary cage beam 4 emitted from an electronic lock 2 is focused onto the surface of a sample 7 in a vacuum container 6 by a focusing V lens 3. The scanning power supply 14 causes the primary electron beam deflection coil group 5? It is operated to scan the primary electron beam 4 over the surface of the sample 7. Then, instead of the brightness modulation signal of the cathode ray tube (hereinafter abbreviated as CRT) 13 of the sample 7 obtained, an absorbed current image of the sample 7 is displayed on the CRT 13? obtain.

All locations on the sample 7 to be analyzed are selected from this absorption current image. A peephole 1 is placed on the reflection diffraction line 8t and the fluorescent light 9 obtained by fixedly irradiating the primary electron image 4 on this analysis point.
0 and is observed as a reflection diffraction image. By analyzing this diffraction image, it becomes possible to analyze the crystalline state at any location on the surface of the sample 70 (the arrangement state of the elements forming the groove bottom of the surface portion of the sample 7). In addition, the aperture [
1 is used to select a specific diffraction spot 7, and in synchronization with the scanning of the primary electron beam 4, an electrical signal sound obtained from a photoelectric conversion element (for example, a photomultiplier) 12 is applied to the brightness modulation signal of the C-box T13. CRT1 by
A diffraction microscopic image is obtained on 3.

This diffraction microscopic image reveals the crystal distribution on the surface of sample 7.
This is an effective means of crystal analysis of the different surface of sample 7. As described above, the above-mentioned scanning reflection electron diffraction microscope is an effective device for microscopically examining the crystalline state of the surface. However, since there is a wide range of reflected diffraction lines to be observed on the fluorescent plate 9,
Fluorescence and &9 become thicker, resulting in larger equipment. When selecting a specific diffraction spot (z), it is necessary to mechanically move the photoelectric conversion element 12 and the aperture 11, making the operability difficult. The first disadvantage is that it may require special equipment, such as for storing .

In contrast, these drawbacks can be eliminated by a device according to the present invention, which will be described below. The basic configuration of the scanning backscattered electron diffraction microscope apparatus according to the present invention is shown in FIG. The most characteristic parts of the present invention include a fluorescent lamp 9 and a peephole 1.
0, an aperture 11, a photoelectric conversion element 12, a signal changeover switch 15, a magnetic field shielding & .

A part of the reflected diffraction line 8 obtained when the primary Hiroko beam 4 is fixed on the surface of the sample 7 passes through the magnetic field shielding plate 16, and an even smaller part passes through the anno(-cha) 11 and passes through the fluorescent plate 9.
A bright spot forms on the top. Further, an optical signal from this bright spot is received by a photoelectric conversion element 12 through a peephole 10, converted into an electric signal, and used as a brightness modulation signal for the CRT 18 for reflected diffraction lines. At this time, the deflection coil group 17 for the reflected diffraction line is fully operated from the scanning power supply 19 for the reflected diffraction line, the reflected diffraction line 8 that has passed through the magnetic field shielding plate 16 is deflected, and a brightness modulated image synchronized with this deflection is reflected and diffracted. CITT1 for wire
Display on 8. The magnetic field shielding plate 16 shields the magnetic field generated when all of the reflection diffraction line coils are operated, and prevents the -order electron beam 4σ) irradiation point. The role of keeping it constant is 1f.

The brightness modulation image on the reflected diffraction line C deviation P18 obtained in this manner becomes a completely equivalent 'fL image to the reflected diffraction image obtained on the fluorescent plate 9 with the conventional apparatus shown in FIG. In addition, to obtain a diffraction microscopic image using a specific diffraction spot as a signal, fix the cathode ray of the CRT at the position of the diffraction spot in the reflected diffraction image displayed on the CRT for reflected diffraction rays, and in this state, switch the signal changeover switch 15tC) tT13, the scanning power source 14 (a more constant electron beam 4 can be obtained on the CRT 13 by scanning it over the surface of the sample 7.

The embodiment shown in FIG. 2 allows all signal acquisition without the need for a large-diameter fluorescent plate when acquiring reflection diffraction images.
T! It is very easy to operate because it can be done automatically, and the optical crown deformation element 1 can be obtained in synchronization with the scanning of the scanning power supply 19.
Record the five energy signals from 2 in memory 1. By performing all the various processes, it is possible to easily perform image processing such as increasing the signal to S, /N'.
The effect of 'FT' can be obtained.

〔Effect of the invention〕

As described above, the scanning backscattered electron diffraction imprinter according to the present invention is compact and easy to operate by making it possible to obtain a reflection diffraction line image on a cathode ray tube rather than on a large diameter phosphor plate. It has the extremely excellent advantages of good performance and easy image processing.

[Brief explanation of the drawing]

FIG. 1 is a basic configuration diagram of a conventional scanning type reflection electron diffraction microscope, and FIG. 2 is a basic configuration diagram of a scanning type reflection electron diffraction microscope according to the present invention. . DESCRIPTION OF SYMBOLS 1... Accelerating power supply, 2...'er, child lock, 3... Convergence ring, 4... -order electron beam, 5... -order middle electron beam deflection coil group, 6... - Vacuum container, 7... Sample, 8... Reflected diffraction ray, 9... Fluorescent plate, 10... Peephole, 11... Aperture, 12... Photoelectric conversion element, 13... Cathode ray Anger (C) (T), 14... 疋食屯源, 15... Signal changeover switch, 16... Magnetic field interference, 17... Deflection coil group for reflected diffraction lines, 18...
・Reflection diffraction line image ("RT, 19... and 1st Figure 1 Figure Z/1

Claims (1)

[Claims] 1. A primary electron beam is taken out from a source, and the -order electron beam is irradiated onto a predetermined area on the sample surface at a predetermined angle using a converging lens and a deflection system, whereby the surface of the sample is A diffraction image is formed on a fluorescent plate by the reflected diffraction rays reflected by the fluorescent plate, and only the light emitted from a specific diffraction band in the diffraction image on the fluorescent plate is selectively extracted by an aperture, and converted into an electrical signal by a photoelectric conversion element. Convert to scanning electron microscopy image? In the scanning-type backscattered electron diffraction microscope apparatus, a deflection system and an aperture are provided between the sample and the phosphor plate, and the deflection system deflects the reflected diffraction rays within a certain angular width, and the electrons passing through the aperture are deflected by the deflection system. 1. A scanning-type reflection electron diffraction microscope apparatus, characterized in that a reflection diffraction 1# is obtained on the cathode ray tube by converting an electric signal obtained by the above into a brightness modulation signal of the cathode ray tube.