JPS62110249A - Scanning electron reflection difraction microscopic device - Google Patents

Abstract

PURPOSE:To always enable the identification of the analysed portion having reflection diffraction pattern, in the diffraction microscopic pattern, by combining a rotatable semitransparent mirror and an optical lens. CONSTITUTION:The reflection diffraction pattern on the fluorescent screen 9 is focused on the focal plane A by means of the optical lens 15. Where, a part of the light from the reflection diffraction pattern is reflected by the semitransparent mirror 17 provided between the focal plane A and the optical lens 15 so as to be focused on the focal plane B too. A specified diffraction spot or a part of the diffraction spot is selected roughly by moving the aperture 11 on the focal plane and precisely by rotating the semitransparent mirror 17 as indicated by the arrow. This light is transmitted to the photoelectric transducer element 12 through the optical fiber 16 to obtain the diffraction microscopic pattern. Thereby the reflection diffraction pattern can be observed always on the focal plane A.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to an improvement in a scanning-type backscattered electron diffraction microscope used for analyzing the crystallinity of a sample surface.

[Background of the invention]

The basic configuration of a conventional scanning backscattered electron diffraction microscope device is shown in FIG. 1. The device in FIG.
is focused by the converging lens 3 onto the surface of the sample 7 in the vacuum container 6. Scan 1'l! g14 operates the primary electron beam deflection coil group 5 to generate the primary electron beam l, 4.
is scanned over the surface of sample 7. The absorbed current signal or secondary electron signal of sample 7 obtained at that time is transmitted to the cathode ray tube (
A scanning electron microscope image of the sample 7 is obtained on the CRT] 3 instead of the brightness modulation signal of the CRT 13 (hereinafter abbreviated as CRTL).

The location of sample 7 to be analyzed is selected from this image.

A reflected diffraction line 8 obtained by fixedly irradiating the primary electron beam tz 4 at this analysis point is observed through a peephole 10 as a reflected diffraction image on a fluorescent screen 9. By analyzing this diffraction image, we can determine the crystalline state at any location on the surface of sample 7 (the arrangement state of the elements constituting the surface part of sample 7).
It becomes possible to analyze. Furthermore, optical lens 15.
A specific diffraction spot in the reflected diffraction image is selected using an aperture 11, guided to a photoelectric conversion element (for example, a photomultiplier) 12 through an optical fiber 16, and converted into an electrical signal. By changing the brightness modulation of CRTL3 to No. 1 in synchronization with scanning, a diffraction microscopic image can be obtained on CR'I"13. From this diffraction microscopic image, the crystal distribution on the surface of sample 7 can be understood. Becomes an influential child actor in crystal analysis.

As described above, the scanning backscattered electron diffraction microscope is a powerful device for microscopically examining the crystalline state of the surface of a sample, but conventional devices have the following problems. That is, a part of the reflected diffraction image on the fluorescent screen 9 is reflected by the optical lens 15. The detailed *? %, it was necessary to move the detector so as not to block the reflection diffraction image, and in that case there was a problem that a diffraction microscopic image could not be obtained. Geopanese Journal
of applied physics
J ow＋＋＋＊l of Applied Phys
ics), Vol. 23 (1984), pp. 913-920.

[Purpose of the invention]

An object of the present invention is to solve the above-mentioned problems in the prior art and to provide a scanning-type backscattered electron diffraction microscope device that can simultaneously observe a reflection diffraction image and acquire a diffraction microscopic image without mutual interference. be.

[Summary of the invention]

The feature of the present invention is that, in order to achieve the above object,
A part of the emitted light from the reflection diffraction image of H is reflected by a semi-transparent reflector, and a specific diffraction spot of this reflected emitted light is
Alternatively, the light emitted from a part of the diffraction spot may be passed through an aperture by a combination of the rotation of a semi-transparent reflecting mirror and an optical lens to form a thick structure in the photoelectric conversion element.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIG. Second
In the figure, numeral 17 is a semi-transparent reflecting mirror that passes part of the irradiated light and reflects part of it, and the rest is the same as the conventional example shown in Figure 1. The diffraction image reflected on the fluorescent screen 9 is formed on the imaging plane A by the optical lens 15. At this time, by installing a semi-transparent reflecting mirror 17 between the imaging plane A and the optical lens 15, a part of the emitted light of the reflected diffraction image is reflected, and the reflected diffraction image is also formed as an M image on the imaging plane B. A specific diffraction spot 1 or a part of the diffraction spot in the reflected diffraction image is first roughly moved by moving the aperture 11 across the imaging plane, and more precisely by moving the semi-transparent reflecting mirror 17 as shown by the arrow. Selected by rotating. This light emission is transmitted through the optical fiber 16 into light? F! By guiding it to the conversion element 12, a diffraction microscopic image is obtained. At this time, the reflection diffraction image can be observed on the imaging plane A at all times.

FIG. 3 is a block diagram showing another embodiment of the present invention, in which a semi-transparent reflecting mirror is installed behind the imaging plane A of the reflected diffraction image. At this time, an optical lens [5] or more is required to form a reflected diffraction image on the imaging plane F3.

FIG. 4 is a block diagram of still another embodiment of the present invention, in which a part of the light emitted from the reflected diffraction image on the fluorescent screen 9 is reflected by a semi-transparent reflecting mirror 17.
After being reflected by the optical lens 15, the image forming plane B
A reflection diffraction image is formed on top.

〔Effect of the invention〕

As described above, the apparatus according to the present invention uses a combination of a rotatable semi-transparent reflector and an optical lens to acquire a diffraction microscopic image and observe a reflected diffraction image without interfering with each other. This method has the extremely excellent advantage of being able to constantly confirm the obtained analysis area in a diffraction microscopic image, making it easier to determine the crystalline state of minute areas on the surface.

[Brief explanation of drawings]

FIG. 1 is a schematic vertical sectional view showing the configuration of a conventional device. FIG. 2, FIG. 3, and FIG. 1 are R schematic vertical cross-sectional views showing the configuration of an embodiment of the present invention, respectively. DESCRIPTION OF SYMBOLS 1... Accelerating power supply, 2... Electron gun, 3... Converging lens, 4... -order electron beam 11.5... -order electron beam deflection coil group, 6... Vacuum 4 hesitation, 7...sample,
8... Reflected diffraction line, 9... Fluorescent screen, ]O... Peephole, 11... Aperture, 12... Photoelectric conversion element, 13... Cathode ray tube (CRT) 14... Scanning source,
15...Optical lens, 16...Optical lens 1 Flash 2nd χ 3 (2)

Claims (1)

[Claims] A primary electron beam is irradiated onto a predetermined area on the sample surface at a predetermined angle through a converging lens and a deflection system, and a diffraction image is formed on a fluorescent screen by reflected electron diffraction rays reflected from the sample surface.
In a scanning electron diffraction microscope device that converts light emitted from a specific diffraction spot in the reflection diffraction image on the fluorescent screen into an electrical signal using a photoelectric conversion element to obtain a scanning electron microscopic image,
Part of the emitted light of the reflection diffraction image of the fluorescence is reflected by a semi-transparent reflecting mirror, and part of the emitted light from a specific diffraction spot in the reflected light is guided to the photoelectric conversion element to form a scanning electron microscope image. A scanning backscattered electron diffraction microscope apparatus characterized in that it obtains the following: