GB1442177A - Scanning electron microscope apparatus - Google Patents

Scanning electron microscope apparatus

Info

Publication number
GB1442177A
GB1442177A GB3122073A GB3122073A GB1442177A GB 1442177 A GB1442177 A GB 1442177A GB 3122073 A GB3122073 A GB 3122073A GB 3122073 A GB3122073 A GB 3122073A GB 1442177 A GB1442177 A GB 1442177A
Authority
GB
United Kingdom
Prior art keywords
stigmator
focusing
display
detectors
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3122073A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1442177A publication Critical patent/GB1442177A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1442177 Electron microscopes NIHON DENSHI KK 29 June 1973 [11 July 1972] 31220/73 Heading H1D [Also in Division H4] Scanning electron microscope apparatus having a focusing adjustment aid includes detecting means (e.g. detectors 12, 13) detecting electrons transmitted in different directions through specimen 1, and display means (e.g. c.r.t.s. 14, 15) for displaying scanning images corresponding to the detected signals and allowing image comparison. The apparatus facilitates condenser lens 6, 7 and stigmator 9 adjustments for focusing and corrections of lens astigmatism respectively. Incorrect focusing produces positional difference D (Fig. 2, not shown). Fig. 4 (not shown) utilizes one c.r.t. with switching circuit (23) for display. Fig. 6 (not shown) includes mechanical vibrator (24) with double aperture plate (25) and one c.r.t. display. Fig. 7 (not shown) has one wide window detector (28) and vibrating single apertured plate (27), while Fig. 8 (not shown) instead ineludes deflecting coil (30). For stigmator adjustment, Fig. 9 (not shown) includes six detectors and apertures, distances D 1 , D 2 , D 3 (Fig. 10, not shown) being equal for an adjusted stigmator, and zero if the condenser is also correctly adjusted.
GB3122073A 1972-07-11 1973-06-29 Scanning electron microscope apparatus Expired GB1442177A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47069360A JPS521869B2 (en) 1972-07-11 1972-07-11

Publications (1)

Publication Number Publication Date
GB1442177A true GB1442177A (en) 1976-07-07

Family

ID=13400299

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3122073A Expired GB1442177A (en) 1972-07-11 1973-06-29 Scanning electron microscope apparatus

Country Status (5)

Country Link
US (1) US3833811A (en)
JP (1) JPS521869B2 (en)
DE (1) DE2335304B2 (en)
FR (1) FR2192374B1 (en)
GB (1) GB1442177A (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3917946A (en) * 1972-04-12 1975-11-04 Philips Corp Electron-optical device for the recording of selected diffraction patterns
JPS49118493A (en) * 1973-03-12 1974-11-12
DE2542356C2 (en) * 1975-09-19 1977-10-20 Siemens AG, 1000 Berlin und 8000 München Method for focusing the objective lens of a corpuscular transmission scanning microscope and device for automatic implementation of the method, as well as application
NL7804039A (en) * 1978-04-17 1979-10-19 Philips Nv ELECTRON MICROSKOP WITH STIGMATOR.
JPS5613649A (en) * 1979-07-12 1981-02-10 Akashi Seisakusho Co Ltd Correcting method and device for astigmatism in scanning type electron microscope and the like
NL7906632A (en) * 1979-09-05 1981-03-09 Philips Nv AUTOMATIC BUNDLE CORRECTION IN VOICE.
NL8304217A (en) * 1983-12-07 1985-07-01 Philips Nv AUTOMATICALLY ADJUSTABLE ELECTRON MICROSCOPE.
JPS61168852A (en) * 1985-01-23 1986-07-30 Hitachi Ltd Focusing device of transmission type electron microscope
SE446954B (en) * 1985-03-12 1986-10-20 Uponor Ab SET FOR EXTRUDING A DOUBLE WALL PLASTROR AND EXTRACTING TOOL FOR EXTENDING THE SET
JPS61233950A (en) * 1985-04-10 1986-10-18 Hitachi Ltd Electron microscope
JPH073774B2 (en) * 1986-10-08 1995-01-18 株式会社日立製作所 electronic microscope
DE3720560C1 (en) * 1987-06-22 1988-09-15 Bekum Maschf Gmbh Coextrusion head
US4975578A (en) * 1989-04-17 1990-12-04 The Research Foundation Of State University Of Ny Method and apparatus for determining distribution of mass density
JPH05343019A (en) * 1992-06-03 1993-12-24 Hitachi Ltd Charged particle beam device and observation thereof
US5650621A (en) * 1993-06-21 1997-07-22 Hitachi, Ltd. Electron microscope
JP4896626B2 (en) * 2006-08-22 2012-03-14 株式会社日立ハイテクノロジーズ Scanning electron microscope
JP4920370B2 (en) * 2006-10-30 2012-04-18 株式会社日立製作所 Information transmission limit measurement method of transmission electron microscope and transmission electron microscope to which this measurement method is applied
CN102184828B (en) * 2011-03-29 2013-02-06 北京航空航天大学 Second condenser lens for electron microscope
CN102169790B (en) * 2011-03-29 2012-07-04 北京航空航天大学 First collecting mirror of electron microscope
EP3163597A1 (en) * 2015-11-02 2017-05-03 FEI Company Charged particle microscope with vibration detection/correction

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2627589A (en) * 1950-10-30 1953-02-03 Rca Corp Focusing of electron optical apparatus
GB990239A (en) * 1961-08-17 1965-04-28 Christopher William Baisley Gr Improvements in measuring systems for electron diffraction patterns
US3225192A (en) * 1962-12-28 1965-12-21 Hitachi Ltd Apparatus for producing electron microscope and diffraction images separately and simultaneously on the image plane
GB1058037A (en) * 1964-11-03 1967-02-08 Jeol Ltd Electron beam apparatus
US3502870A (en) * 1967-07-05 1970-03-24 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
US3576438A (en) * 1969-04-28 1971-04-27 Bell Telephone Labor Inc Focus monitor for electron microscope including an auxiliary electron gun and focusing lens
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope

Also Published As

Publication number Publication date
JPS4928267A (en) 1974-03-13
JPS521869B2 (en) 1977-01-18
US3833811A (en) 1974-09-03
DE2335304B2 (en) 1975-07-10
FR2192374A1 (en) 1974-02-08
DE2335304A1 (en) 1974-01-31
FR2192374B1 (en) 1977-05-13

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee