JPS521869B2 - - Google Patents

Info

Publication number
JPS521869B2
JPS521869B2 JP6936072A JP6936072A JPS521869B2 JP S521869 B2 JPS521869 B2 JP S521869B2 JP 6936072 A JP6936072 A JP 6936072A JP 6936072 A JP6936072 A JP 6936072A JP S521869 B2 JPS521869 B2 JP S521869B2
Authority
JP
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6936072A
Other versions
JPS4928267A (en )
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/21Means for adjusting the focus
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
JP6936072A 1972-07-11 1972-07-11 Expired JPS521869B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6936072A JPS521869B2 (en) 1972-07-11 1972-07-11

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP6936072A JPS521869B2 (en) 1972-07-11 1972-07-11
GB3122073A GB1442177A (en) 1972-07-11 1973-06-29 Scanning electron microscope apparatus
US3833811A US3833811A (en) 1972-07-11 1973-07-09 Scanning electron microscope with improved means for focusing
FR7325225A FR2192374B1 (en) 1972-07-11 1973-07-10
DE19732335304 DE2335304B2 (en) 1972-07-11 1973-07-11

Publications (2)

Publication Number Publication Date
JPS4928267A true JPS4928267A (en) 1974-03-13
JPS521869B2 true JPS521869B2 (en) 1977-01-18

Family

ID=13400299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6936072A Expired JPS521869B2 (en) 1972-07-11 1972-07-11

Country Status (5)

Country Link
US (1) US3833811A (en)
JP (1) JPS521869B2 (en)
DE (1) DE2335304B2 (en)
FR (1) FR2192374B1 (en)
GB (1) GB1442177A (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3917946A (en) * 1972-04-12 1975-11-04 Philips Corp Electron-optical device for the recording of selected diffraction patterns
JPS49118493A (en) * 1973-03-12 1974-11-12
DE2542356C2 (en) * 1975-09-19 1977-10-20
NL7804039A (en) * 1978-04-17 1979-10-19 Philips Nv An electron microscope with a stigmator.
JPS5613649A (en) * 1979-07-12 1981-02-10 Akashi Seisakusho Co Ltd Correcting method and device for astigmatism in scanning type electron microscope and the like
NL7906632A (en) * 1979-09-05 1981-03-09 Philips Nv Automatic bundelcorrektie in voting.
NL8304217A (en) * 1983-12-07 1985-07-01 Philips Nv Automatically adjustable electron microscope.
JPS61168852A (en) * 1985-01-23 1986-07-30 Hitachi Ltd Focusing device of transmission type electron microscope
DE3690120T1 (en) * 1985-03-12 1987-04-23
JPH0421301B2 (en) * 1985-04-10 1992-04-09 Hitachi Ltd
JPH073774B2 (en) * 1986-10-08 1995-01-18 株式会社日立製作所 electronic microscope
DE3720560C1 (en) * 1987-06-22 1988-09-15 Bekum Maschf Gmbh coextrusion
US4975578A (en) * 1989-04-17 1990-12-04 The Research Foundation Of State University Of Ny Method and apparatus for determining distribution of mass density
JPH05343019A (en) * 1992-06-03 1993-12-24 Hitachi Ltd Charged particle beam device and observation thereof
US5650621A (en) * 1993-06-21 1997-07-22 Hitachi, Ltd. Electron microscope
JP4896626B2 (en) * 2006-08-22 2012-03-14 株式会社日立ハイテクノロジーズ Scanning electron microscope
JP4920370B2 (en) * 2006-10-30 2012-04-18 株式会社日立製作所 Transmission electron microscope TEM information transfer limit measurement and the measurement method is applied
CN102169790B (en) * 2011-03-29 2012-07-04 北京航空航天大学 First collecting mirror of electron microscope
CN102184828B (en) * 2011-03-29 2013-02-06 北京航空航天大学 Second condenser lens for electron microscope
EP3163597A1 (en) * 2015-11-02 2017-05-03 FEI Company Charged particle microscope with vibration detection/correction

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2627589A (en) * 1950-10-30 1953-02-03 Rca Corp Focusing of electron optical apparatus
GB990239A (en) * 1961-08-17 1965-04-28 Christopher William Baisley Gr Improvements in measuring systems for electron diffraction patterns
US3225192A (en) * 1962-12-28 1965-12-21 Hitachi Ltd Apparatus for producing electron microscope and diffraction images separately and simultaneously on the image plane
GB1058037A (en) * 1964-11-03 1967-02-08 Jeol Ltd Electron beam apparatus
US3502870A (en) * 1967-07-05 1970-03-24 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
US3576438A (en) * 1969-04-28 1971-04-27 Bell Telephone Labor Inc Focus monitor for electron microscope including an auxiliary electron gun and focusing lens
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope

Also Published As

Publication number Publication date Type
US3833811A (en) 1974-09-03 grant
GB1442177A (en) 1976-07-07 application
DE2335304A1 (en) 1974-01-31 application
DE2335304B2 (en) 1975-07-10 application
FR2192374B1 (en) 1977-05-13 grant
FR2192374A1 (en) 1974-02-08 application
JPS4928267A (en) 1974-03-13 application

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