CN102169790B - First collecting mirror of electron microscope - Google Patents

First collecting mirror of electron microscope Download PDF

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Publication number
CN102169790B
CN102169790B CN201110077399XA CN201110077399A CN102169790B CN 102169790 B CN102169790 B CN 102169790B CN 201110077399X A CN201110077399X A CN 201110077399XA CN 201110077399 A CN201110077399 A CN 201110077399A CN 102169790 B CN102169790 B CN 102169790B
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cover plate
upper cover
ring
water jacket
annular
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CN201110077399XA
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CN102169790A (en
Inventor
董全林
姚骏恩
张春熹
张秀艳
孟凡念
崔永俊
迟悦
杨彦杰
于成交
袁水平
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Suzhou Bozhong Instrument Technology Co., Ltd
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Beihang University
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Abstract

The invention discloses a first collecting mirror of an electron microscope, belonging to the field of electron microscopes. The first collecting mirror comprises a shell, an upper cover plate, a sealing space ring, a magnetic ring, a lead plate, a fixed diaphragm assembly, a pole shoe assembly, a magnetic circuit coil and a water jacket space ring assembly, wherein the shell is a cylindrical annular cavity with openings at two ends; the upper cover plate, the sealing space ring and the magnetic ring are connected and then arranged in the shell, the upper cover plate covers the opening at the upper end of the shell, the lead plate is arranged on the upper cover plate; middle parts of the upper cover plate, the sealing space ring and the magnetic ring are provided with mutually communicated through holes; the communicated through holes in the upper cover plate, the sealing space ring and the magnetic ring are internally sequentially provided with the fixed diaphragm assembly and the pole shot assembly, middle parts of the fixed diaphragm assembly and the pole shot assembly are provided with mutually communicated through holes which are used as electron beam channels of a first collecting mirror; and the magnetic path coil is arranged around the outside of the sealing space ring and the magnetic ring at the joint of the pole shoe assembly, the water jacket space ring assembly is arranged on the magnetic path coil, and the upper cover plate is arranged on the water jacket space ring assembly. The first collecting mirror has the advantages of simple structure, less parts, convenience for operation, assembly and maintenance, can be used for largely reducing electron beam spots on cross points of the electron gun, thereby improving properties of the electron microscope.

Description

First condenser of electron microscope
Technical field
The present invention relates to the Electron Microscopy field, relate in particular to a kind of first condenser of electron microscope.
Background technology
Electron microscope is a kind of important instrument that can observe small material, can observe the material below the 0.25nm.Electron microscope as lighting source, with magnetic lens or the electrostatic lens device as the deflection electronics, realizes that optics amplifies with electron beam.Electron microscope has very application prospects in the army and the people fields such as physics, chemistry, material, scientific research, life science, geology, mine locating, mechanical industry, electronics industries.
Electron microscope is radiated on the sample through electron beam, realizes the observation to sample, and electron gun and condenser are the illuminators of electron microscope.Electron microscope requires condenser that the electron beam of high-high brightness can be provided, and the electron beam aperture that is radiated on the sample must be able to be regulated within the specific limits, and the big I of illuminated spot is selected on demand.Condenser is that the crosspoint with electron gun is imaged onto on the sample as imaging object, it is generally acknowledged that crossover of electron gun, is of a size of tens microns.In order to keep certain height and to be limited in beam spot minimum to the influence that sample heats; The bundle spot that requires the sample place is several microns; To this, condenser must dwindle beam spot, and first condenser in the early stage electron microscope; Dwindling of beam spot to crossover of electron gun, is not very spirit words, influenced the performance of electron microscope.
Summary of the invention
The purpose of embodiment of the present invention provides a kind of first condenser of electron microscope, is used in the electron microscope, can the beam spot of crossover of electron gun, be dwindled significantly, improves the performance of electron microscope.
The objective of the invention is to realize through following technical scheme:
Embodiment of the present invention provides a kind of first condenser of electron microscope, comprising:
Shell, upper cover plate, sealing spacer ring, magnet ring, stereotype, fixed aperture assembly, pole shoe member, magnetic circuit coil and water jacket spacer assemblies;
Said shell is the cylinder toroidal cavity of both ends open;
Said upper cover plate, sealing spacer ring and be arranged in the said shell after magnet ring is connected successively; Upper cover plate covers the open upper end of said shell; Stereotype is set on upper cover plate, and the middle part of said upper cover plate, sealing spacer ring and magnet ring is equipped with through hole, and three's through hole is interconnected;
Set gradually fixed aperture assembly and pole shoe member from top to bottom in the through hole after the connection of said upper cover plate, sealing spacer ring and magnet ring; Said fixed aperture assembly and pole shoe member middle part are equipped with through hole, and each through hole is communicated with the electron beam path as this first condenser; Sealing spacer ring and magnet ring outer surrounding in said pole shoe member junction are provided with said magnetic circuit coil, are provided with the water jacket spacer assemblies above the magnetic circuit coil, and the top of water jacket spacer assemblies is said upper cover plate, is fixedly connected with said upper cover plate.
Technical scheme by the invention described above execution mode provides can be found out; Organic cooperation through shell, upper cover plate, sealing spacer ring, magnet ring, stereotype, fixed aperture assembly, pole shoe member, magnetic circuit coil and water jacket spacer assemblies in the embodiment of the present invention has formed first condenser; Be looped around magnetic circuit coil shell, upper cover plate and magnet ring on every side, can compile the magnetic line of force, after coil flows through exciting curent; Owing to making magnetic field, magnetic induction strengthens, thus the effect grow of electron lens.This first condenser has simple in structure, installation, easy to operate, and parts are less, and volume is little, is convenient to the advantage of assembling and keeping in repair.Being used for electron microscope can dwindle the beam spot of crossover of electron gun, significantly, effectively improves the performance of electron microscope.
Description of drawings
In order to be illustrated more clearly in the technical scheme of the embodiment of the invention; The accompanying drawing of required use is done to introduce simply in will describing embodiment below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skill in the art; Under the prerequisite of not paying creative work, can also obtain other accompanying drawings according to these accompanying drawings.
The structural representation of first condenser that Fig. 1 provides for the embodiment of the invention;
The structural representation of another angle of first condenser that Fig. 2 provides for the embodiment of the invention;
First condenser that Fig. 3 provides for the embodiment of the invention face structural representation;
Fig. 4 is that the A-A of Fig. 3 is to cross-sectional view;
The structural representation of the shell of first condenser that Fig. 5 provides for the embodiment of the invention;
The structural representation that the upper cover plate of first condenser that Fig. 6 provides for the embodiment of the invention, sealing spacer ring are connected with magnet ring;
The upper cover plate of first condenser that Fig. 7 provides for the embodiment of the invention, sealing spacer ring are connected with magnet ring faces structural representation;
Fig. 8 is that the B-B of Fig. 7 is to cross-sectional view;
The structural representation of the last pole shoe of the pole shoe member of first condenser that Fig. 9 provides for the embodiment of the invention;
Figure 10 is that the C-C of Fig. 9 is to cross-sectional view;
The structural representation of the spacer ring of the pole shoe member of first condenser that Figure 11 provides for the embodiment of the invention;
The structural representation of the following pole shoe of the pole shoe member of first condenser that Figure 12 provides for the embodiment of the invention;
Figure 13 is that the D-D of Figure 12 is to cross-sectional view;
The explosive decomposition structural representation of the pole shoe member of first condenser that Figure 14 provides for the embodiment of the invention;
The structural representation of the fixed aperture assembly of first condenser that Figure 15 provides for the embodiment of the invention;
The cross-sectional view of the fixed aperture assembly of first condenser that Figure 16 provides for the embodiment of the invention;
The coil former structural representation of the magnetic circuit coil of first condenser that Figure 17 provides for the embodiment of the invention;
The structural representation of the water jacket spacer assemblies of first condenser that Figure 18 provides for the embodiment of the invention;
Figure 19 is that the E-E of Figure 18 is to cross-sectional view;
Each label is among the figure: the 1-shell; The 2-upper cover plate; 21-seals spacer ring; The 211-sealing ring; The 22-magnet ring; The 3-stereotype; 4-fixed aperture assembly; 41-fixed aperture seat; The 42-clamping nut; 43-fixed aperture sheet; The through hole of 44-fixed aperture assembly; The 45-packing ring; The last pole shoe of 5-; The through hole of the last pole shoe of 51-; The 6-spacer ring; Through hole on the 61-spacer ring wall; Pole shoe under the 7-; The through hole of pole shoe under the 71-; The 8-magnetic circuit coil; The 811-overhead gage; The 812-lower baffle plate; 813-annular column; The annular groove of 814-coil former; 9-water jacket spacer assemblies; 91-water jacket body; 92-water jacket spacer ring; The through hole of 93-water jacket spacer assemblies.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills belong to protection scope of the present invention not making the every other embodiment that is obtained under the creative work prerequisite.
To combine accompanying drawing that the embodiment of the invention is done to describe in detail further below.
Present embodiment provides a kind of first condenser of electron microscope; Can be used in the electron microscope; Be arranged on above second condenser; Shown in Fig. 1~5, this first condenser comprises: shell 1, upper cover plate 2, sealing spacer ring 21, magnet ring 22, stereotype 3, fixed aperture assembly 4, pole shoe member, magnetic circuit coil 8 and water jacket spacer assemblies 9;
Wherein, the said shell 1 cylinder toroidal cavity that is both ends open; Upper cover plate 2, sealing spacer ring 21 and be arranged in the said shell 1 after magnet ring 22 is connected successively; Upper cover plate 2 covers the open upper end of said shell 1; Stereotype 3 is set on upper cover plate 2, and the middle part of said upper cover plate 2, sealing spacer ring 21 and magnet ring 22 is equipped with through hole, and three's through hole is interconnected;
Set gradually fixed aperture assembly 4 and pole shoe member from top to bottom in the through hole after the connection of said upper cover plate 2, sealing spacer ring 21 and magnet ring 22; Said fixed aperture assembly 4 is equipped with through hole with the pole shoe member middle part, and each through hole is communicated with the electron beam path as this first condenser; Sealing spacer ring 21 in said pole shoe member junction is provided with said magnetic circuit coil 8 with magnet ring 22 outer surrounding, is provided with water jacket spacer assemblies 9 above the magnetic circuit coil 8, and the top of water jacket spacer assemblies 9 is said upper cover plate 2, is fixedly connected with said upper cover plate 2.
Magnetic circuit coil 8 shell 1, upper cover plate 2 and the magnet ring 22 on every side that be looped around in above-mentioned first condenser all adopts soft magnetic material to process; Has the characteristic of compiling the magnetic line of force; After coil flows through exciting curent,, thereby make the effect grow of electron lens owing to magnetic induction makes the magnetic field enhancing.
Shown in Fig. 6~8; Upper cover plate 2 in above-mentioned first condenser is circular; Its centre is provided with the annular hollow cylinder, and the length of annular hollow cylinder is greater than the thickness of said upper cover plate, and the upper end of annular hollow cylinder is higher than upper cover plate 2 upper surfaces and forms circular projection; The lower end of annular hollow cylinder protrudes in the bottom surface of upper cover plate 2, and end, annular hollow cylinder lower end is provided with annular boss;
Sealing spacer ring 21 in above-mentioned first condenser is an annular, and the end, two ends of sealing spacer ring 21 is equipped with annular concave platform, and the annular concave platform place is equipped with closure gasket groove, is equipped with sealing ring 211 in the closure gasket groove;
Magnet ring 22 in above-mentioned first condenser is circular; Its centre is provided with annular hollow cylinder; The upper end of annular hollow cylinder is higher than magnet ring 22 upper surfaces, and the end, upper end of annular hollow cylinder is provided with annular boss, and the lower end of annular hollow cylinder protrudes in the bottom surface of magnet ring 22;
Upper cover plate 2 is connected with magnet ring 22 through sealing spacer ring 21; The annular boss of the annular hollow cylinder lower end of upper cover plate 2 is arranged in the annular concave platform of sealing spacer ring 21 upper ends; The annular boss of the annular hollow cylinder upper end of magnet ring 22 is arranged in the annular concave platform of sealing spacer ring lower end, and the cross section that has cannelure in the middle of forming after upper cover plate 2, sealing spacer ring 21 are connected with magnet ring 22 is " doing " font structure.
This structure that above-mentioned upper cover plate 2, sealing spacer ring 21 and magnet ring 22 form not only is convenient to be provided with each parts such as fixed aperture assembly, pole shoe member and magnetic circuit coil; And be beneficial to and converge the magnetic line of force; Strengthen the effect of electron lens, promote the performance of first condenser.
The pole shoe member of above-mentioned first condenser is connected in sequence by last pole shoe 5, spacer ring 6 and following pole shoe 7; Wherein, like Fig. 9, shown in 10, last pole shoe 5 is a pyramidal structure, and its inside is provided with conical cavity, and the middle part of conical cavity bottom is provided with through hole 51.
Spacer ring 6 structures are shown in figure 11, are the annular hollow post, and the external diameter of the upper end of annular hollow post and upper cover plate inwall contact portion plays the effect of location greater than its lower end external diameter, four through holes 61 of distributed and arranged around the middle part of annular hollow post.
The structure of following pole shoe 7 is inverted cone-shaped structure like Figure 12, shown in 13, and its inside is provided with conical cavity, and the middle part at conical cavity top is provided with through hole 71.
The last pole shoe 5 of the pole shoe member of above-mentioned first condenser is shown in figure 14 with the state that following pole shoe 7 is connected through spacer ring 6.
Shown in Figure 15~16, the fixed aperture assembly 4 in above-mentioned first condenser comprises: fixed aperture seat 41, clamping nut 42, packing ring 45 and fixed aperture sheet 43;
Wherein, Fixed aperture sheet 43 is arranged on the bottom of fixed aperture seat 41 through clamping nut 42 and packing ring 45; The middle part of fixed aperture sheet 41, clamping nut 42, packing ring 45 and fixed aperture seat 41 is equipped with through hole, and four through hole is communicated with the through hole that formation supplies electron beam to pass through.
Magnetic circuit coil 8 in above-mentioned first condenser is the annulus cylindricality; Be to be wrapped in the coil that coiling forms on the coil former by enamelled wire; Wherein, The structure of coil former is shown in figure 17, is the structure that has annular groove 814 that is made up of upper and lower baffle plate 811,812 and annular column 813, and said enamelled wire is wound in the upper and lower baffle plate 811, the annular groove between 812 814 of coil former.
Shown in Figure 18~19, the water jacket spacer assemblies 9 in above-mentioned first condenser comprises: water jacket body 91, water jacket partition and water jacket spacer ring 92;
Wherein, Water jacket body 91 is a ring channel structures, is respectively equipped with inlet opening and apopore on the cannelure sidewall of water jacket body 91, is provided with the water jacket partition (not shown) in the cannelure of water jacket body; Water jacket partition is arranged between inlet opening and the apopore; Can inlet opening and apopore be separated, avoid water-in and water-out to influence each other, the water jacket spacer ring 92 through annular above the cannelure of water jacket body 91 covers sealing.
The magnetic circuit coil of first condenser that the embodiment of the invention provides is the annulus cylindricality; The shell, upper cover plate and the magnet ring that are formed by soft magnetic material around it play the magnetic line of force effect that compiles, when coil has electric current to pass through; Owing to magnetic induction makes the magnetic field enhancing, thereby make the effect grow of electron lens; The last pole shoe of pole shoe member, following pole shoe are positioned at the centre of upper cover plate, sealing spacer ring and magnet ring; Also be to process by soft magnetic material; Because pole shoe extends near the axle; Therefore can form the lens magnetic field that magnetic field is stronger, magnetic field range is more concentrated, make that the magnetic field in this first condenser upper and lower pole shoe capable of using gap focuses on electron gun electrons emitted Shu Jinhang; The fixed aperture of first condenser is adorned the aperture top of pole shoe above that, plays the effect of restriction electron beam aperture; The water jacket spacer assemblies of between the magnetic circuit coil of first condenser and upper cover plate, installing, the heat that produces in the time of can coming the cooling magnetic circuit coil working through water.
This first condenser has simple in structure, installation, easy to operate, and parts are less, and volume is little, is convenient to the advantage of assembling and keeping in repair.Being used for electron microscope can dwindle the beam spot of crossover of electron gun, significantly, effectively improves the performance of electron microscope.
The above; Be merely the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, any technical staff who is familiar with the present technique field is in the technical scope that the present invention discloses; The variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection range of claims.

Claims (10)

1. first condenser of an electron microscope is characterized in that, comprising:
Shell, upper cover plate, sealing spacer ring, magnet ring, stereotype, fixed aperture assembly, pole shoe member, magnetic circuit coil and water jacket spacer assemblies;
Said shell is the cylinder toroidal cavity of both ends open;
Said upper cover plate, sealing spacer ring and be arranged in the said shell after magnet ring is connected successively; Upper cover plate covers the open upper end of said shell; Stereotype is set on upper cover plate, and the middle part of said upper cover plate, sealing spacer ring and magnet ring is equipped with through hole, and three's through hole is interconnected;
Set gradually fixed aperture assembly and pole shoe member from top to bottom in the through hole after the connection of said upper cover plate, sealing spacer ring and magnet ring; Said fixed aperture assembly and pole shoe member middle part are equipped with through hole, and each through hole is communicated with the electron beam path as this first condenser; Sealing spacer ring and magnet ring outer surrounding in said pole shoe member junction are provided with said magnetic circuit coil, are provided with the water jacket spacer assemblies above the magnetic circuit coil, and the top of water jacket spacer assemblies is said upper cover plate, is fixedly connected with said upper cover plate.
2. first condenser of electron microscope according to claim 1; It is characterized in that said upper cover plate is circular, its centre is provided with the annular hollow cylinder; The length of annular hollow cylinder is greater than the thickness of said upper cover plate; The upper end of annular hollow cylinder is higher than the upper cover plate upper surface and forms circular projection, and the lower end of annular hollow cylinder protrudes in the bottom surface of upper cover plate, and the end of annular hollow cylinder lower end is provided with annular boss;
Said sealing spacer ring is an annular, and the end, two ends of sealing spacer ring is provided with annular concave platform, and the annular concave platform place is equipped with closure gasket groove, is equipped with sealing ring in the closure gasket groove;
Said magnet ring is circular, and its centre is provided with annular hollow cylinder, and the upper end of annular hollow cylinder is higher than the magnet ring upper surface, and the end, upper end of annular hollow cylinder is provided with annular boss, and the lower end of annular hollow cylinder protrudes in the bottom surface of magnet ring;
Said upper cover plate, sealing spacer ring are connected to magnet ring successively: upper cover plate is connected with magnet ring through the sealing spacer ring; The annular boss of the annular hollow cylinder lower end of upper cover plate is arranged in the annular concave platform of sealing spacer ring upper end; The annular boss of the annular hollow cylinder upper end of magnet ring is arranged in the annular concave platform of sealing spacer ring lower end, and the cross section that has cannelure in the middle of upper cover plate, sealing spacer ring and magnet ring are connected to form is " doing " font structure.
3. first condenser of electron microscope according to claim 1 is characterized in that, said shell, upper cover plate and magnet ring all adopt soft magnetic material to process.
4. first condenser of electron microscope according to claim 1 is characterized in that, said fixed aperture assembly comprises:
Fixed aperture seat, clamping nut, packing ring and fixed aperture sheet;
The fixed aperture sheet is arranged on the bottom of fixed aperture seat through packing ring and clamping nut, and the middle part of fixed aperture sheet, clamping nut, packing ring and fixed aperture seat is equipped with through hole, and four through hole is communicated with and forms the through hole that supplies electron beam to pass through.
5. first condenser of electron microscope according to claim 1 is characterized in that, said pole shoe member is connected in sequence by last pole shoe, spacer ring and following pole shoe, and wherein upper and lower pole shoe is to adopt soft magnetic material to process.
6. first condenser of electron microscope according to claim 5 is characterized in that, said upward pole shoe is a pyramidal structure, and its inside is provided with conical cavity, and the middle part of conical cavity bottom is provided with through hole.
7. first condenser of electron microscope according to claim 5; It is characterized in that; Said spacer ring is the annular hollow post, and the external diameter of the upper end of annular hollow post and upper cover plate inwall contact portion is greater than its lower end external diameter, four through holes of distributed and arranged around the middle part of annular hollow post.
8. first condenser of electron microscope according to claim 5 is characterized in that, said pole shoe down is an inverted cone-shaped structure, and its inside is provided with conical cavity, and the middle part at conical cavity top is provided with through hole.
9. first condenser of electron microscope according to claim 1 is characterized in that, said magnetic circuit coil is the annulus cylindricality, is to be wrapped in the coil that coiling forms on the coil former by enamelled wire; Wherein, the structure that have annular groove of said coil former for being made up of upper and lower baffle plate and annular column, said enamelled wire are wrapped in the annular groove between the upper and lower baffle plate of coil former.
10. first condenser of electron microscope according to claim 1 is characterized in that, said water jacket spacer assemblies comprises:
Water jacket body, water jacket partition and water jacket spacer ring;
Said water jacket body is a ring channel structures; Be respectively equipped with inlet opening and apopore on the cannelure sidewall of water jacket body; Be provided with water jacket partition in the cannelure of water jacket body; Water jacket partition is arranged between inlet opening, the apopore, can inlet opening and apopore be separated, and the water jacket spacer ring through annular above the cannelure of water jacket body covers sealing.
CN201110077399XA 2011-03-29 2011-03-29 First collecting mirror of electron microscope Active CN102169790B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102376515B (en) * 2011-11-08 2014-02-12 北京航空航天大学 Objective pole shoe of transmission electron microscope

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3833811A (en) * 1972-07-11 1974-09-03 Jeol Ltd Scanning electron microscope with improved means for focusing
EP0205185A2 (en) * 1985-06-14 1986-12-17 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Objective with spectrometer in the electron beam measuring technique
CN201226335Y (en) * 2008-06-20 2009-04-22 高伟烘 Electronic microscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3833811A (en) * 1972-07-11 1974-09-03 Jeol Ltd Scanning electron microscope with improved means for focusing
EP0205185A2 (en) * 1985-06-14 1986-12-17 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Objective with spectrometer in the electron beam measuring technique
CN201226335Y (en) * 2008-06-20 2009-04-22 高伟烘 Electronic microscope

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Effective date of registration: 20210222

Address after: 215200 No. 666 Hu Xin Road, Wujiang economic and Technological Development Zone, Suzhou, Jiangsu

Patentee after: Suzhou Bozhong Instrument Technology Co., Ltd

Address before: 100083 No. 37, Haidian District, Beijing, Xueyuan Road

Patentee before: BEIHANG University