GB1058037A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
GB1058037A
GB1058037A GB4483464A GB4483464A GB1058037A GB 1058037 A GB1058037 A GB 1058037A GB 4483464 A GB4483464 A GB 4483464A GB 4483464 A GB4483464 A GB 4483464A GB 1058037 A GB1058037 A GB 1058037A
Authority
GB
United Kingdom
Prior art keywords
specimen
electrons
electron beam
detector
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4483464A
Inventor
Hiroshi Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to GB4483464A priority Critical patent/GB1058037A/en
Publication of GB1058037A publication Critical patent/GB1058037A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,058,037. Electron beam apparatus. NIHON DENSHI KABUSHIKI KAISHA. Nov. 3, 1964, No. 44834/64. Heading H1D. The chemical properties and geometric configuration of a solid specimen is investigated by using one or more semi-conductor, elements each having a P-N junction for analysing the electrons emitted by the specimen under electron beam bombardment. The electron irradiation of the elements produces a photo-voltaic effect, the strength of the signal produced being dependent on the intensity of the incident electrons. The electrons detected may be backscattered electrons or transmitted electrons that have passed through the specimen. The electron beam may be scanned over the surface of the specimen, and an oscilloscope display formed by a synchronized scan modulated in brightness according to the signal produced by the detecting element. The detector may be mounted on the electron-optical elements controlling the beam, the detector having a central opening for passage of the beam. The detector may be adjustably positioned near the specimen, and two or more detectors may be provided.
GB4483464A 1964-11-03 1964-11-03 Electron beam apparatus Expired GB1058037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB4483464A GB1058037A (en) 1964-11-03 1964-11-03 Electron beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4483464A GB1058037A (en) 1964-11-03 1964-11-03 Electron beam apparatus

Publications (1)

Publication Number Publication Date
GB1058037A true GB1058037A (en) 1967-02-08

Family

ID=10434921

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4483464A Expired GB1058037A (en) 1964-11-03 1964-11-03 Electron beam apparatus

Country Status (1)

Country Link
GB (1) GB1058037A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3714425A (en) * 1970-02-07 1973-01-30 T Someya Reflecting mirror type electron microscope
FR2192374A1 (en) * 1972-07-11 1974-02-08 Jeol Ltd

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3714425A (en) * 1970-02-07 1973-01-30 T Someya Reflecting mirror type electron microscope
FR2192374A1 (en) * 1972-07-11 1974-02-08 Jeol Ltd

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