GB1192816A - Scanning Type Electron Microscope - Google Patents

Scanning Type Electron Microscope

Info

Publication number
GB1192816A
GB1192816A GB46241/67A GB4624167A GB1192816A GB 1192816 A GB1192816 A GB 1192816A GB 46241/67 A GB46241/67 A GB 46241/67A GB 4624167 A GB4624167 A GB 4624167A GB 1192816 A GB1192816 A GB 1192816A
Authority
GB
United Kingdom
Prior art keywords
specimen
electron microscope
oct
type electron
scanning type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB46241/67A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB1192816A publication Critical patent/GB1192816A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Abstract

1,192,816. Electron microscopes. HITACHI Ltd. 10 Oct., 1967 [17 Oct., 1966], No. 46241/67. Heading H1D. [Also in Division G1] In a scanning electron microscope, the intensity of the electron beam 16 incident upon the specimen 6 is periodically varied-as shown, by a pulse generator 20-whereby an A.C. component may be filtered off from the output signal generated by the specimen, demodulated, and employed to produce a synchronously scanned image of the specimen on the oscilloscope 11. The use of an A.C. output reduces noise, and permits various measurements to be performed on semi-conducting specimens incorporating biased P-N junctions (see Division G1).
GB46241/67A 1966-10-17 1967-10-10 Scanning Type Electron Microscope Expired GB1192816A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6789266 1966-10-17

Publications (1)

Publication Number Publication Date
GB1192816A true GB1192816A (en) 1970-05-20

Family

ID=13357981

Family Applications (1)

Application Number Title Priority Date Filing Date
GB46241/67A Expired GB1192816A (en) 1966-10-17 1967-10-10 Scanning Type Electron Microscope

Country Status (3)

Country Link
US (1) US3535516A (en)
DE (1) DE1589906B2 (en)
GB (1) GB1192816A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2312031A2 (en) * 1975-05-23 1976-12-17 Commissariat Energie Atomique Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1403946A (en) * 1973-05-23 1975-08-28 Mullard Ltd Spectroscopy
DE2011193C3 (en) * 1970-03-10 1974-03-28 Siemens Ag, 1000 Berlin U. 8000 Muenchen Device for scanning electron microscopy and electron beam microanalysis
GB1394055A (en) * 1971-07-09 1975-05-14 Nat Res Dev Electron emitters
US3813545A (en) * 1973-04-12 1974-05-28 Edax Int Inc X-ray scan area mapping system
US3924113A (en) * 1973-06-08 1975-12-02 Ibm Electron beam registration system
DE2546053A1 (en) * 1975-01-02 1976-07-08 Commissariat Energie Atomique METHOD AND DEVICE FOR ANALYSIS BY SPECTRAL ANALYSIS OF THE ENERGY OF SECONDARY ELECTRONS
US4011449A (en) * 1975-11-05 1977-03-08 Ibm Corporation Apparatus for measuring the beam current of charged particle beam
US4052614A (en) * 1976-04-09 1977-10-04 Nasa Photoelectron spectrometer with means for stabilizing sample surface potential
US4063091A (en) * 1976-10-18 1977-12-13 American Optical Corporation High speed switching circuit
JPS5571024A (en) * 1978-11-24 1980-05-28 Hitachi Ltd Mark sensing method
DE3036708A1 (en) * 1980-09-29 1982-05-13 Siemens AG, 1000 Berlin und 8000 München ELECTRON BEAM MEASURING DEVICE FOR STROBOSCOPIC MEASUREMENT OF HIGH FREQUENCY PERIODIC PROCESSES
DE3375438D1 (en) * 1982-03-01 1988-02-25 Toshiba Kk Stroboscopic scanning electron microscope
US4845362A (en) * 1988-02-02 1989-07-04 North American Philips Corporation In situ differential imaging and method utilizing a scanning electron microscope
DE4103410C1 (en) * 1991-02-05 1992-08-06 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
US5210487A (en) * 1991-06-04 1993-05-11 Schlumberger Technologies Inc. Double-gated integrating scheme for electron beam tester
JP2985826B2 (en) * 1997-04-09 1999-12-06 日本電気株式会社 Position detecting apparatus and method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2348030A (en) * 1941-04-30 1944-05-02 Rca Corp Scanning type of electron microscope
US2330930A (en) * 1941-04-30 1943-10-05 Rca Corp Scanning type of electron microscope
US3315157A (en) * 1963-07-22 1967-04-18 Hitachi Ltd Apparatus for impedance measurement through the use of electron beam probes
US3403332A (en) * 1964-09-25 1968-09-24 Hitachi Ltd Apparatus for measuring impedance of a specimen employing two opposite polarity charged particle beam probes
US3319071A (en) * 1964-11-27 1967-05-09 Gen Motors Corp Infrared gas analysis absorption chamber having a highly reflective specular internal surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2312031A2 (en) * 1975-05-23 1976-12-17 Commissariat Energie Atomique Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam

Also Published As

Publication number Publication date
DE1589906B2 (en) 1972-10-05
DE1589906A1 (en) 1972-02-17
US3535516A (en) 1970-10-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees