FR2312031A2 - Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam - Google Patents

Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam

Info

Publication number
FR2312031A2
FR2312031A2 FR7516206A FR7516206A FR2312031A2 FR 2312031 A2 FR2312031 A2 FR 2312031A2 FR 7516206 A FR7516206 A FR 7516206A FR 7516206 A FR7516206 A FR 7516206A FR 2312031 A2 FR2312031 A2 FR 2312031A2
Authority
FR
France
Prior art keywords
primary
intensity
energy
monokinetic
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7516206A
Other languages
French (fr)
Other versions
FR2312031B2 (en
Inventor
Claude Le Gressus
Daniel Massignon
Rene Sopizet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7516206A priority Critical patent/FR2312031A2/en
Priority to GB42084/75A priority patent/GB1530277A/en
Priority to DE19752546053 priority patent/DE2546053A1/en
Priority to US05/641,240 priority patent/US4034220A/en
Priority to CA242,530A priority patent/CA1048163A/en
Priority to CH1677775A priority patent/CH592306A5/xx
Priority to IL48721A priority patent/IL48721A/en
Priority to SE7514717A priority patent/SE413556B/en
Priority to JP15966475A priority patent/JPS557179B2/ja
Priority to NL7515242A priority patent/NL7515242A/en
Priority to ES444049A priority patent/ES444049A1/en
Publication of FR2312031A2 publication Critical patent/FR2312031A2/en
Application granted granted Critical
Publication of FR2312031B2 publication Critical patent/FR2312031B2/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Abstract

In the elementary and chemical analysis of a sample by spectral analysis of the energies of secondary electrons emitted by the sample when subjected to the action of a monokinetic beam of primary electrons concentrated on its surface, (a) the intensity of the beam of primary monokinetic electrons emitted by an electron gun is modulated in accordance with a sinusoidal law of frequency (b) the beam of secondary electrons of energy is collected and its intensity is detected (c) an electrical detection signal is generated proportional to the intensity of the beam of energy and the intensity of the component of frequency in this signal is measured, thus giving the number of secondary electrons corresp. to that energy and (d) the value of the collection energy is modified to scan a spectrum of energies between two limits and so that the spectrum of the intensity of secondary electronic emission from the sample is obtd. as a function of the energy. Method enables samples to be analysed with minimum degradation.
FR7516206A 1975-01-02 1975-05-23 Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam Granted FR2312031A2 (en)

Priority Applications (11)

Application Number Priority Date Filing Date Title
FR7516206A FR2312031A2 (en) 1975-05-23 1975-05-23 Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam
GB42084/75A GB1530277A (en) 1975-01-02 1975-10-14 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons
DE19752546053 DE2546053A1 (en) 1975-01-02 1975-10-14 METHOD AND DEVICE FOR ANALYSIS BY SPECTRAL ANALYSIS OF THE ENERGY OF SECONDARY ELECTRONS
US05/641,240 US4034220A (en) 1975-01-02 1975-12-16 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons
CA242,530A CA1048163A (en) 1975-01-02 1975-12-22 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons
IL48721A IL48721A (en) 1975-01-02 1975-12-24 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of thesecondary electrons
CH1677775A CH592306A5 (en) 1975-01-02 1975-12-24
SE7514717A SE413556B (en) 1975-01-02 1975-12-29 KIT FOR ANALYZE OF AN ELECTRON RADIATED SAMPLE MEDIUM SENDED SECONDARY ELECTRONS AND DEVICE FOR IMPLEMENTATION OF THE KIT
JP15966475A JPS557179B2 (en) 1975-01-02 1975-12-29
NL7515242A NL7515242A (en) 1975-01-02 1975-12-31 METHOD AND DEVICE FOR SPECTRAL ANALYSIS.
ES444049A ES444049A1 (en) 1975-01-02 1976-01-02 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7516206A FR2312031A2 (en) 1975-05-23 1975-05-23 Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam

Publications (2)

Publication Number Publication Date
FR2312031A2 true FR2312031A2 (en) 1976-12-17
FR2312031B2 FR2312031B2 (en) 1978-02-03

Family

ID=9155624

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7516206A Granted FR2312031A2 (en) 1975-01-02 1975-05-23 Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam

Country Status (1)

Country Link
FR (1) FR2312031A2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1192816A (en) * 1966-10-17 1970-05-20 Hitachi Ltd Scanning Type Electron Microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1192816A (en) * 1966-10-17 1970-05-20 Hitachi Ltd Scanning Type Electron Microscope

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ARTICLE DE C. LE GRESSERS ET AL: "OPTIQUE ELECTRONIQUE-NOUVELLE METHODE D'ANALYSE DU SPECTRE DES ELECTRONS SECONDAIRES" *
REVUE FR "COMPTES RENDUS DE L'ACADEMIE DES SCIENCES", PARIS, SERIE B, TOME 280 NUMERO 14, 14 AVRIL 1975, PAGES 439 A 442 *

Also Published As

Publication number Publication date
FR2312031B2 (en) 1978-02-03

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