FR2296847A1 - Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam - Google Patents
Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beamInfo
- Publication number
- FR2296847A1 FR2296847A1 FR7500050A FR7500050A FR2296847A1 FR 2296847 A1 FR2296847 A1 FR 2296847A1 FR 7500050 A FR7500050 A FR 7500050A FR 7500050 A FR7500050 A FR 7500050A FR 2296847 A1 FR2296847 A1 FR 2296847A1
- Authority
- FR
- France
- Prior art keywords
- primary
- intensity
- energy
- monokinetic
- electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
Abstract
In the elementary and chemical analysis of a sample by spectral analysis of the energies of secondary electrons emitted by the sample when subjected to the action of a monokinetic beam of primary electrons concentrated on its surface, (a) the intensity of the beam of primary monokinetic electrons emitted by an electron gun is modulated in accordance with a sinusoidal law of frequency (b) the beam of secondary electrons of energy is collected and its intensity is detected (c) an electrical detection signal is generated proportional to the intensity of the beam of energy and the intensity of the component of frequency in this signal is measured, thus giving the number of secondary electrons corresp. to that energy and (d) the value of the collection energy is modified to scan a spectrum of energies between two limits and so that the spectrum of the intensity of secondary electronic emission from the sample is obtd. as a function of the energy. Method enables samples to be analysed with minimum degradation.
Priority Applications (13)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7500050A FR2296847A1 (en) | 1975-01-02 | 1975-01-02 | Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam |
GB42084/75A GB1530277A (en) | 1975-01-02 | 1975-10-14 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
DE19752546053 DE2546053A1 (en) | 1975-01-02 | 1975-10-14 | METHOD AND DEVICE FOR ANALYSIS BY SPECTRAL ANALYSIS OF THE ENERGY OF SECONDARY ELECTRONS |
US05/641,240 US4034220A (en) | 1975-01-02 | 1975-12-16 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
CA242,530A CA1048163A (en) | 1975-01-02 | 1975-12-22 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
IL48721A IL48721A (en) | 1975-01-02 | 1975-12-24 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of thesecondary electrons |
CH1677775A CH592306A5 (en) | 1975-01-02 | 1975-12-24 | |
SE7514717A SE413556B (en) | 1975-01-02 | 1975-12-29 | KIT FOR ANALYZE OF AN ELECTRON RADIATED SAMPLE MEDIUM SENDED SECONDARY ELECTRONS AND DEVICE FOR IMPLEMENTATION OF THE KIT |
ZA00758018A ZA758018B (en) | 1975-01-02 | 1975-12-29 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
JP15966475A JPS557179B2 (en) | 1975-01-02 | 1975-12-29 | |
NL7515242A NL7515242A (en) | 1975-01-02 | 1975-12-31 | METHOD AND DEVICE FOR SPECTRAL ANALYSIS. |
ES444049A ES444049A1 (en) | 1975-01-02 | 1976-01-02 | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons |
BE163292A BE837288A (en) | 1975-01-02 | 1976-01-02 | METHOD AND DEVICE FOR THE ELEMENTARY AND CHEMICAL ANALYSIS OF A SAMPLE BY SPECTRAL ANALYSIS OF THE ENERGIES OF SECONDARY ELECTRONS |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7500050A FR2296847A1 (en) | 1975-01-02 | 1975-01-02 | Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2296847A1 true FR2296847A1 (en) | 1976-07-30 |
FR2296847B1 FR2296847B1 (en) | 1977-11-18 |
Family
ID=9149370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7500050A Granted FR2296847A1 (en) | 1975-01-02 | 1975-01-02 | Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam |
Country Status (3)
Country | Link |
---|---|
BE (1) | BE837288A (en) |
FR (1) | FR2296847A1 (en) |
ZA (1) | ZA758018B (en) |
-
1975
- 1975-01-02 FR FR7500050A patent/FR2296847A1/en active Granted
- 1975-12-29 ZA ZA00758018A patent/ZA758018B/en unknown
-
1976
- 1976-01-02 BE BE163292A patent/BE837288A/en not_active IP Right Cessation
Non-Patent Citations (1)
Title |
---|
NEANT * |
Also Published As
Publication number | Publication date |
---|---|
FR2296847B1 (en) | 1977-11-18 |
ZA758018B (en) | 1976-12-29 |
BE837288A (en) | 1976-05-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |