BE837288A - METHOD AND DEVICE FOR THE ELEMENTARY AND CHEMICAL ANALYSIS OF A SAMPLE BY SPECTRAL ANALYSIS OF THE ENERGIES OF SECONDARY ELECTRONS - Google Patents

METHOD AND DEVICE FOR THE ELEMENTARY AND CHEMICAL ANALYSIS OF A SAMPLE BY SPECTRAL ANALYSIS OF THE ENERGIES OF SECONDARY ELECTRONS

Info

Publication number
BE837288A
BE837288A BE163292A BE163292A BE837288A BE 837288 A BE837288 A BE 837288A BE 163292 A BE163292 A BE 163292A BE 163292 A BE163292 A BE 163292A BE 837288 A BE837288 A BE 837288A
Authority
BE
Belgium
Prior art keywords
energies
elementary
sample
analysis
secondary electrons
Prior art date
Application number
BE163292A
Other languages
French (fr)
Inventor
C Le Gressus
D Massignon
R Sopizet
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE837288A publication Critical patent/BE837288A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
BE163292A 1975-01-02 1976-01-02 METHOD AND DEVICE FOR THE ELEMENTARY AND CHEMICAL ANALYSIS OF A SAMPLE BY SPECTRAL ANALYSIS OF THE ENERGIES OF SECONDARY ELECTRONS BE837288A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7500050A FR2296847A1 (en) 1975-01-02 1975-01-02 Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam

Publications (1)

Publication Number Publication Date
BE837288A true BE837288A (en) 1976-05-03

Family

ID=9149370

Family Applications (1)

Application Number Title Priority Date Filing Date
BE163292A BE837288A (en) 1975-01-02 1976-01-02 METHOD AND DEVICE FOR THE ELEMENTARY AND CHEMICAL ANALYSIS OF A SAMPLE BY SPECTRAL ANALYSIS OF THE ENERGIES OF SECONDARY ELECTRONS

Country Status (3)

Country Link
BE (1) BE837288A (en)
FR (1) FR2296847A1 (en)
ZA (1) ZA758018B (en)

Also Published As

Publication number Publication date
ZA758018B (en) 1976-12-29
FR2296847A1 (en) 1976-07-30
FR2296847B1 (en) 1977-11-18

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: COMMISSARIAT A L ENERGIE ATOMIQUE

Effective date: 19850102