ZA758018B - Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons - Google Patents

Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons

Info

Publication number
ZA758018B
ZA758018B ZA00758018A ZA758018A ZA758018B ZA 758018 B ZA758018 B ZA 758018B ZA 00758018 A ZA00758018 A ZA 00758018A ZA 758018 A ZA758018 A ZA 758018A ZA 758018 B ZA758018 B ZA 758018B
Authority
ZA
South Africa
Prior art keywords
elementary
sample
energy
analysis
secondary electrons
Prior art date
Application number
ZA00758018A
Inventor
R Sopizet
C Gressus
D Massignon
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Publication of ZA758018B publication Critical patent/ZA758018B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
ZA00758018A 1975-01-02 1975-12-29 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons ZA758018B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7500050A FR2296847A1 (en) 1975-01-02 1975-01-02 Sample analysis using secondary electron emission - formed after scanning with monokinetic primary electrons by monokintic primary electron beam

Publications (1)

Publication Number Publication Date
ZA758018B true ZA758018B (en) 1976-12-29

Family

ID=9149370

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA00758018A ZA758018B (en) 1975-01-02 1975-12-29 Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons

Country Status (3)

Country Link
BE (1) BE837288A (en)
FR (1) FR2296847A1 (en)
ZA (1) ZA758018B (en)

Also Published As

Publication number Publication date
FR2296847B1 (en) 1977-11-18
BE837288A (en) 1976-05-03
FR2296847A1 (en) 1976-07-30

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