JPS6445047A - Measuring device for cathode luminesence - Google Patents

Measuring device for cathode luminesence

Info

Publication number
JPS6445047A
JPS6445047A JP62201879A JP20187987A JPS6445047A JP S6445047 A JPS6445047 A JP S6445047A JP 62201879 A JP62201879 A JP 62201879A JP 20187987 A JP20187987 A JP 20187987A JP S6445047 A JPS6445047 A JP S6445047A
Authority
JP
Japan
Prior art keywords
luminescence
electron beam
line analysis
intensity
spectroscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62201879A
Other languages
Japanese (ja)
Inventor
Kosuke Ikeda
Yoshiichi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP62201879A priority Critical patent/JPS6445047A/en
Publication of JPS6445047A publication Critical patent/JPS6445047A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enable comparision of line analysis not deteriorated by electron beam irradiation by realizing the line analysis of the spectrum peak intensity of a luminescence spectrum having plural peaks by means of one time stage scan. CONSTITUTION:The initial position of a sample irradiated by an electron beam 13 is defined to x1 and luminescence 14 in a vacuum device system 1 is incident on a spectroscope 2. A signal corresponding to a wavelength lambda1 is output from a wave length setting controller 3 onto the spectroscope 2 to set the wave length to lambda1 so as to measure the luminescence intensity by means of a main controller 6 via a luminescence sensor 4 and an amplifier 5. Similarly, the luminescence intensity corresponding to a wavelength lambda2 is measured. Next, the position of the sample is shifted to x2, and the luminescence intensity is measured in the similar way. According to such constitution, it is made possible to make comparison of line analysis not deteriorated by electron beam irradiation.
JP62201879A 1987-08-14 1987-08-14 Measuring device for cathode luminesence Pending JPS6445047A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62201879A JPS6445047A (en) 1987-08-14 1987-08-14 Measuring device for cathode luminesence

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62201879A JPS6445047A (en) 1987-08-14 1987-08-14 Measuring device for cathode luminesence

Publications (1)

Publication Number Publication Date
JPS6445047A true JPS6445047A (en) 1989-02-17

Family

ID=16448373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62201879A Pending JPS6445047A (en) 1987-08-14 1987-08-14 Measuring device for cathode luminesence

Country Status (1)

Country Link
JP (1) JPS6445047A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006126054A (en) * 2004-10-29 2006-05-18 Jeol Ltd Cathode luminescence analyzing method and cathode luminescence analyzer
JP2007073307A (en) * 2005-09-06 2007-03-22 National Institute Of Advanced Industrial & Technology Hybrid electron gun

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4880089A (en) * 1972-01-31 1973-10-26
JPS5543450A (en) * 1978-09-22 1980-03-27 Shimadzu Corp Automatic x-ray spectroscopic analysis device
JPS58190716A (en) * 1982-04-30 1983-11-07 Shimadzu Corp Color mapping device for specimen analyzer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4880089A (en) * 1972-01-31 1973-10-26
JPS5543450A (en) * 1978-09-22 1980-03-27 Shimadzu Corp Automatic x-ray spectroscopic analysis device
JPS58190716A (en) * 1982-04-30 1983-11-07 Shimadzu Corp Color mapping device for specimen analyzer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006126054A (en) * 2004-10-29 2006-05-18 Jeol Ltd Cathode luminescence analyzing method and cathode luminescence analyzer
JP2007073307A (en) * 2005-09-06 2007-03-22 National Institute Of Advanced Industrial & Technology Hybrid electron gun

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