JPS6445047A - Measuring device for cathode luminesence - Google Patents
Measuring device for cathode luminesenceInfo
- Publication number
- JPS6445047A JPS6445047A JP62201879A JP20187987A JPS6445047A JP S6445047 A JPS6445047 A JP S6445047A JP 62201879 A JP62201879 A JP 62201879A JP 20187987 A JP20187987 A JP 20187987A JP S6445047 A JPS6445047 A JP S6445047A
- Authority
- JP
- Japan
- Prior art keywords
- luminescence
- electron beam
- line analysis
- intensity
- spectroscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004020 luminiscence type Methods 0.000 abstract 5
- 238000004458 analytical method Methods 0.000 abstract 3
- 238000010894 electron beam technology Methods 0.000 abstract 3
- 238000001748 luminescence spectrum Methods 0.000 abstract 1
- 238000001228 spectrum Methods 0.000 abstract 1
Abstract
PURPOSE:To enable comparision of line analysis not deteriorated by electron beam irradiation by realizing the line analysis of the spectrum peak intensity of a luminescence spectrum having plural peaks by means of one time stage scan. CONSTITUTION:The initial position of a sample irradiated by an electron beam 13 is defined to x1 and luminescence 14 in a vacuum device system 1 is incident on a spectroscope 2. A signal corresponding to a wavelength lambda1 is output from a wave length setting controller 3 onto the spectroscope 2 to set the wave length to lambda1 so as to measure the luminescence intensity by means of a main controller 6 via a luminescence sensor 4 and an amplifier 5. Similarly, the luminescence intensity corresponding to a wavelength lambda2 is measured. Next, the position of the sample is shifted to x2, and the luminescence intensity is measured in the similar way. According to such constitution, it is made possible to make comparison of line analysis not deteriorated by electron beam irradiation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62201879A JPS6445047A (en) | 1987-08-14 | 1987-08-14 | Measuring device for cathode luminesence |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62201879A JPS6445047A (en) | 1987-08-14 | 1987-08-14 | Measuring device for cathode luminesence |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6445047A true JPS6445047A (en) | 1989-02-17 |
Family
ID=16448373
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62201879A Pending JPS6445047A (en) | 1987-08-14 | 1987-08-14 | Measuring device for cathode luminesence |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6445047A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006126054A (en) * | 2004-10-29 | 2006-05-18 | Jeol Ltd | Cathode luminescence analyzing method and cathode luminescence analyzer |
JP2007073307A (en) * | 2005-09-06 | 2007-03-22 | National Institute Of Advanced Industrial & Technology | Hybrid electron gun |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4880089A (en) * | 1972-01-31 | 1973-10-26 | ||
JPS5543450A (en) * | 1978-09-22 | 1980-03-27 | Shimadzu Corp | Automatic x-ray spectroscopic analysis device |
JPS58190716A (en) * | 1982-04-30 | 1983-11-07 | Shimadzu Corp | Color mapping device for specimen analyzer |
-
1987
- 1987-08-14 JP JP62201879A patent/JPS6445047A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4880089A (en) * | 1972-01-31 | 1973-10-26 | ||
JPS5543450A (en) * | 1978-09-22 | 1980-03-27 | Shimadzu Corp | Automatic x-ray spectroscopic analysis device |
JPS58190716A (en) * | 1982-04-30 | 1983-11-07 | Shimadzu Corp | Color mapping device for specimen analyzer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006126054A (en) * | 2004-10-29 | 2006-05-18 | Jeol Ltd | Cathode luminescence analyzing method and cathode luminescence analyzer |
JP2007073307A (en) * | 2005-09-06 | 2007-03-22 | National Institute Of Advanced Industrial & Technology | Hybrid electron gun |
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