JPS55159143A - Metal surface flaw detector - Google Patents

Metal surface flaw detector

Info

Publication number
JPS55159143A
JPS55159143A JP6768179A JP6768179A JPS55159143A JP S55159143 A JPS55159143 A JP S55159143A JP 6768179 A JP6768179 A JP 6768179A JP 6768179 A JP6768179 A JP 6768179A JP S55159143 A JPS55159143 A JP S55159143A
Authority
JP
Japan
Prior art keywords
specimen
radiation
exoelectron
measuring
flaw detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6768179A
Other languages
Japanese (ja)
Inventor
Keiji Nakayama
Takashi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP6768179A priority Critical patent/JPS55159143A/en
Publication of JPS55159143A publication Critical patent/JPS55159143A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To detect the surface flaws of metal products accurately, rapidly and industrially by measuring the radiation quantity of exoelectron. CONSTITUTION:A flaw detector 1 is provided with a vacuum system 2, ultraviolet light radiation system 3, exoelectron measuring system 4, electro-optical system 5, observation system 6 and specimen driving system 7. The specimen 8 is set on a stage 14 in a vacuum vessel 8 which is maintained in a high vacuum state and ultraviolet light is imaged on the specimen by the system 3 to locally excite the specimen surface, by which the spontaneous radiation of exoelectron is accelerated. The intensity of the excoelectron radiated from the flawed portion of the surface is measured in the system 4. The scanning measuring of the specimen surface is accomplished by using the system 7, whereby the measurement of the linear and area distributions of the radiation intensities is done. The results of the measurement are recorded in an XY recorder 42.
JP6768179A 1979-05-31 1979-05-31 Metal surface flaw detector Pending JPS55159143A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6768179A JPS55159143A (en) 1979-05-31 1979-05-31 Metal surface flaw detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6768179A JPS55159143A (en) 1979-05-31 1979-05-31 Metal surface flaw detector

Publications (1)

Publication Number Publication Date
JPS55159143A true JPS55159143A (en) 1980-12-11

Family

ID=13351974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6768179A Pending JPS55159143A (en) 1979-05-31 1979-05-31 Metal surface flaw detector

Country Status (1)

Country Link
JP (1) JPS55159143A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197454A (en) * 1981-05-29 1982-12-03 Rigaku Denki Kogyo Kk X-ray analysing apparatus
JPH03226952A (en) * 1990-01-31 1991-10-07 Shimadzu Corp Exoelectron microscope
JPH03100351U (en) * 1990-01-30 1991-10-21

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197454A (en) * 1981-05-29 1982-12-03 Rigaku Denki Kogyo Kk X-ray analysing apparatus
JPH03100351U (en) * 1990-01-30 1991-10-21
JPH03226952A (en) * 1990-01-31 1991-10-07 Shimadzu Corp Exoelectron microscope

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