JPS57197454A - X-ray analysing apparatus - Google Patents
X-ray analysing apparatusInfo
- Publication number
- JPS57197454A JPS57197454A JP8317281A JP8317281A JPS57197454A JP S57197454 A JPS57197454 A JP S57197454A JP 8317281 A JP8317281 A JP 8317281A JP 8317281 A JP8317281 A JP 8317281A JP S57197454 A JPS57197454 A JP S57197454A
- Authority
- JP
- Japan
- Prior art keywords
- collimator
- point
- ray
- irradiated
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To show a position of X-rays irradiation accurately and to make an accurate analysis of desired part of an extremely minute area, by irradiating a visible ray of light through X-ray collimator. CONSTITUTION:An irradiation means 10 of a visible ray of light is provided between an X-ray tube 4 and a collimator 5 and X-rays are irradiated to a point P on a sample 2 through the collimator 5 and are detected by a proportional counter tube 7. On one hand, the visible ray of light irradiated from the means 10 to the same collimator 5 irradiates the point P and the position of irradiated point is watched by a magnification projector 3. Accordingly, the position of analysis is specified by bringing specified part of the sample 2 to the point P.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8317281A JPS57197454A (en) | 1981-05-29 | 1981-05-29 | X-ray analysing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8317281A JPS57197454A (en) | 1981-05-29 | 1981-05-29 | X-ray analysing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57197454A true JPS57197454A (en) | 1982-12-03 |
Family
ID=13794854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8317281A Pending JPS57197454A (en) | 1981-05-29 | 1981-05-29 | X-ray analysing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57197454A (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5975109A (en) * | 1982-10-23 | 1984-04-27 | ヘルミユ−ト・フイツシヤ−・ゲ−エムベ−ハ−・ウント・コンパニ−・インステイテユ−ト・フユア・エレクトロニ−ク・ウント・メステヒニ−ク | Measuring device for thickness of thin layer |
JPS6053048U (en) * | 1983-09-20 | 1985-04-13 | セイコーインスツルメンツ株式会社 | Guide mark on X-ray analyzer |
JPS60218845A (en) * | 1984-04-16 | 1985-11-01 | Hitachi Ltd | Apparatus for testing foreign matter |
EP0318012A2 (en) * | 1987-11-27 | 1989-05-31 | Hitachi, Ltd. | X-ray analyzer |
JPH01147513A (en) * | 1987-12-04 | 1989-06-09 | Hitachi Ltd | Foreign matter analyzer |
JP2003028815A (en) * | 2001-07-13 | 2003-01-29 | Horiba Ltd | X-ray analyzer and x-ray conduit used in the same |
JP2013221744A (en) * | 2012-04-12 | 2013-10-28 | Horiba Ltd | X-ray detection device |
JP2021071400A (en) * | 2019-10-31 | 2021-05-06 | パルステック工業株式会社 | X-ray diffraction measurement device |
JP2021071401A (en) * | 2019-10-31 | 2021-05-06 | パルステック工業株式会社 | X-ray diffraction measurement device |
JP2021081277A (en) * | 2019-11-18 | 2021-05-27 | パルステック工業株式会社 | X-ray diffraction measurement device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51121388A (en) * | 1975-04-16 | 1976-10-23 | Nec Corp | Apparatus for adjusting a specimen for x-ray diffration camera |
JPS534433A (en) * | 1976-07-02 | 1978-01-17 | Dainippon Printing Co Ltd | Xy matrix display panel and method of driving same |
JPS55159143A (en) * | 1979-05-31 | 1980-12-11 | Agency Of Ind Science & Technol | Metal surface flaw detector |
-
1981
- 1981-05-29 JP JP8317281A patent/JPS57197454A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51121388A (en) * | 1975-04-16 | 1976-10-23 | Nec Corp | Apparatus for adjusting a specimen for x-ray diffration camera |
JPS534433A (en) * | 1976-07-02 | 1978-01-17 | Dainippon Printing Co Ltd | Xy matrix display panel and method of driving same |
JPS55159143A (en) * | 1979-05-31 | 1980-12-11 | Agency Of Ind Science & Technol | Metal surface flaw detector |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0244363B2 (en) * | 1982-10-23 | 1990-10-03 | Fischer Gmbh & Co Helmut | |
JPS5975109A (en) * | 1982-10-23 | 1984-04-27 | ヘルミユ−ト・フイツシヤ−・ゲ−エムベ−ハ−・ウント・コンパニ−・インステイテユ−ト・フユア・エレクトロニ−ク・ウント・メステヒニ−ク | Measuring device for thickness of thin layer |
JPS6053048U (en) * | 1983-09-20 | 1985-04-13 | セイコーインスツルメンツ株式会社 | Guide mark on X-ray analyzer |
JPS60218845A (en) * | 1984-04-16 | 1985-11-01 | Hitachi Ltd | Apparatus for testing foreign matter |
JPH0458622B2 (en) * | 1984-04-16 | 1992-09-18 | Hitachi Ltd | |
EP0318012A2 (en) * | 1987-11-27 | 1989-05-31 | Hitachi, Ltd. | X-ray analyzer |
JPH01147513A (en) * | 1987-12-04 | 1989-06-09 | Hitachi Ltd | Foreign matter analyzer |
JP2003028815A (en) * | 2001-07-13 | 2003-01-29 | Horiba Ltd | X-ray analyzer and x-ray conduit used in the same |
JP4731749B2 (en) * | 2001-07-13 | 2011-07-27 | 株式会社堀場製作所 | X-ray analyzer |
JP2013221744A (en) * | 2012-04-12 | 2013-10-28 | Horiba Ltd | X-ray detection device |
JP2021071400A (en) * | 2019-10-31 | 2021-05-06 | パルステック工業株式会社 | X-ray diffraction measurement device |
JP2021071401A (en) * | 2019-10-31 | 2021-05-06 | パルステック工業株式会社 | X-ray diffraction measurement device |
JP2021081277A (en) * | 2019-11-18 | 2021-05-27 | パルステック工業株式会社 | X-ray diffraction measurement device |
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