GB1294440A - Detector system for a scanning electron microscope - Google Patents

Detector system for a scanning electron microscope

Info

Publication number
GB1294440A
GB1294440A GB21675/71A GB2167571A GB1294440A GB 1294440 A GB1294440 A GB 1294440A GB 21675/71 A GB21675/71 A GB 21675/71A GB 2167571 A GB2167571 A GB 2167571A GB 1294440 A GB1294440 A GB 1294440A
Authority
GB
United Kingdom
Prior art keywords
electrons
detectors
unscattered
scattered electrons
cone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB21675/71A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
US Atomic Energy Commission (AEC)
Original Assignee
US Atomic Energy Commission (AEC)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by US Atomic Energy Commission (AEC) filed Critical US Atomic Energy Commission (AEC)
Publication of GB1294440A publication Critical patent/GB1294440A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24475—Scattered electron detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1294440 Electron microscopes UNITED STATES ATOMIC ENERGY COMMISSION 19 April 1971 [5 March 1970] 21675/71 Heading H1D In a scanning electron microscope electrons transmitted by an object 45 are detected by three detecting means which respond to unscattered electrons, elastically scattered electrons and inelastically scattered electrons respectively. The unscattered and inelastically scattered electrons are within cone 46 which is of the same angle as the cone of illumination, these electrons passing through an electrostatic analyser 53 which focuses the higher energy unscattered electrons on detector 59, the lower energy inelastically scattered electrons being received by detectors 60, 61. The elastically scattered electrons lie outside cone 46 and impinge upon annular detectors 48 to 51. The signals from the detectors are fed through amplifiers 63 to 69, signal processor 71 which can combine the signals in any desired way, and then to a display 72. The detectors may be scintillation or silicon barrier detectors.
GB21675/71A 1970-03-05 1971-04-19 Detector system for a scanning electron microscope Expired GB1294440A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1680270A 1970-03-05 1970-03-05

Publications (1)

Publication Number Publication Date
GB1294440A true GB1294440A (en) 1972-10-25

Family

ID=21779049

Family Applications (1)

Application Number Title Priority Date Filing Date
GB21675/71A Expired GB1294440A (en) 1970-03-05 1971-04-19 Detector system for a scanning electron microscope

Country Status (7)

Country Link
US (1) US3626184A (en)
JP (1) JPS5411664B1 (en)
BE (1) BE763456A (en)
CH (1) CH520927A (en)
DE (1) DE2110325A1 (en)
FR (1) FR2084007A5 (en)
GB (1) GB1294440A (en)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE29500E (en) * 1970-08-31 1977-12-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Scanning charged beam particle beam microscope
US3857034A (en) * 1970-08-31 1974-12-24 Max Planck Gesellschaft Scanning charged beam particle beam microscope
FR2134296B1 (en) * 1971-04-30 1974-03-22 Thomson Csf
US3917946A (en) * 1972-04-12 1975-11-04 Philips Corp Electron-optical device for the recording of selected diffraction patterns
JPS521869B2 (en) * 1972-07-11 1977-01-18
JPS49118493A (en) * 1973-03-12 1974-11-12
FR2220871B1 (en) * 1973-07-27 1978-01-20 Jeol Ltd
JPS532755B2 (en) * 1973-08-22 1978-01-31
FR2275022A2 (en) * 1974-06-14 1976-01-09 Cgr Mev DEVICE FOR MONITORING THE POSITION, INTENSITY, HOMOGENEITY AND DIRECTIVITY OF AN IONIZING RADIATION BEAM
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
US4058730A (en) * 1974-09-12 1977-11-15 Siemens Aktiengesellschaft Irradiating device with an electronic accelerator
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
DE2542356C2 (en) * 1975-09-19 1977-10-20 Siemens AG, 1000 Berlin und 8000 München Method for focusing the objective lens of a corpuscular transmission scanning microscope and device for automatic implementation of the method, as well as application
JPS5248964A (en) * 1975-10-17 1977-04-19 Hitachi Ltd Transmission-type scanning electronic microscope
NL7804037A (en) * 1978-04-17 1979-10-19 Philips Nv ELECTRONIC MICROSKOP WITH UNDIFFERENTIATED PHASE IMAGE.
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
US4514629A (en) * 1982-07-07 1985-04-30 National Research Development Corporation Scanning transmission electron microscopes
GB8509493D0 (en) * 1985-04-12 1985-05-15 Plessey Co Plc Scanning microscopes
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
JPS6482445A (en) * 1987-09-25 1989-03-28 Hitachi Ltd Charged particle detector
JP2602287B2 (en) * 1988-07-01 1997-04-23 株式会社日立製作所 X-ray mask defect inspection method and apparatus
US5008535A (en) * 1988-09-02 1991-04-16 U.S. Philips Corporation Energy analyzer and spectrometer for low-energy electrons
US4877961A (en) * 1988-10-26 1989-10-31 Varian Associates, Inc. In-line electron beam energy monitor and control
JPH0766766B2 (en) * 1989-03-30 1995-07-19 株式会社日立製作所 electronic microscope
US5475228A (en) * 1994-11-28 1995-12-12 University Of Puerto Rico Unipolar blocking method and apparatus for monitoring electrically charged particles
JP3776887B2 (en) * 2003-01-07 2006-05-17 株式会社日立ハイテクノロジーズ Electron beam equipment
DE10331137B4 (en) * 2003-07-09 2008-04-30 Carl Zeiss Nts Gmbh Detector system for a scanning electron microscope and scanning electron microscope with a corresponding detector system
JP4664041B2 (en) * 2004-10-27 2011-04-06 株式会社日立ハイテクノロジーズ Charged particle beam apparatus and sample preparation method
US7105817B2 (en) * 2005-01-18 2006-09-12 International Business Machines Inc. Method of forming images in a scanning electron microscope
ITBO20070409A1 (en) * 2007-06-11 2008-12-12 C N R Consiglio Naz Delle Ri C DETECTOR DEVICE FOR ELECTRONIC MICROSCOPE.

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope

Also Published As

Publication number Publication date
DE2110325A1 (en) 1971-09-16
US3626184A (en) 1971-12-07
BE763456A (en) 1971-07-16
CH520927A (en) 1972-03-31
FR2084007A5 (en) 1971-12-17
JPS5411664B1 (en) 1979-05-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees
427A Application made for restoration (sect. 27/1949)
427C Application for amendment of specification now open to opposition (sect. 27/1949)
427B Order made restoring the patent (sect. 27/1949)
746 Register noted 'licences of right' (sect. 46/1977)
PCNP Patent ceased through non-payment of renewal fee