JPS5411664B1 - - Google Patents
Info
- Publication number
- JPS5411664B1 JPS5411664B1 JP1134771A JP1134771A JPS5411664B1 JP S5411664 B1 JPS5411664 B1 JP S5411664B1 JP 1134771 A JP1134771 A JP 1134771A JP 1134771 A JP1134771 A JP 1134771A JP S5411664 B1 JPS5411664 B1 JP S5411664B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
- H01J2237/24465—Sectored detectors, e.g. quadrants
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24475—Scattered electron detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24485—Energy spectrometers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24571—Measurements of non-electric or non-magnetic variables
- H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1680270A | 1970-03-05 | 1970-03-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5411664B1 true JPS5411664B1 (en) | 1979-05-16 |
Family
ID=21779049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1134771A Pending JPS5411664B1 (en) | 1970-03-05 | 1971-03-05 |
Country Status (7)
Country | Link |
---|---|
US (1) | US3626184A (en) |
JP (1) | JPS5411664B1 (en) |
BE (1) | BE763456A (en) |
CH (1) | CH520927A (en) |
DE (1) | DE2110325A1 (en) |
FR (1) | FR2084007A5 (en) |
GB (1) | GB1294440A (en) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3857034A (en) * | 1970-08-31 | 1974-12-24 | Max Planck Gesellschaft | Scanning charged beam particle beam microscope |
USRE29500E (en) * | 1970-08-31 | 1977-12-20 | Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. | Scanning charged beam particle beam microscope |
FR2134296B1 (en) * | 1971-04-30 | 1974-03-22 | Thomson Csf | |
US3917946A (en) * | 1972-04-12 | 1975-11-04 | Philips Corp | Electron-optical device for the recording of selected diffraction patterns |
JPS521869B2 (en) * | 1972-07-11 | 1977-01-18 | ||
JPS49118493A (en) * | 1973-03-12 | 1974-11-12 | ||
FR2220871B1 (en) * | 1973-07-27 | 1978-01-20 | Jeol Ltd | |
JPS532755B2 (en) * | 1973-08-22 | 1978-01-31 | ||
FR2275022A2 (en) * | 1974-06-14 | 1976-01-09 | Cgr Mev | DEVICE FOR MONITORING THE POSITION, INTENSITY, HOMOGENEITY AND DIRECTIVITY OF AN IONIZING RADIATION BEAM |
US3908124A (en) * | 1974-07-01 | 1975-09-23 | Us Energy | Phase contrast in high resolution electron microscopy |
US4058730A (en) * | 1974-09-12 | 1977-11-15 | Siemens Aktiengesellschaft | Irradiating device with an electronic accelerator |
US3965351A (en) * | 1974-10-30 | 1976-06-22 | The United States Of America As Represented By The United States Energy Research And Development Administration | Differential auger spectrometry |
DE2542356C2 (en) * | 1975-09-19 | 1977-10-20 | Siemens AG, 1000 Berlin und 8000 München | Method for focusing the objective lens of a corpuscular transmission scanning microscope and device for automatic implementation of the method, as well as application |
JPS5248964A (en) * | 1975-10-17 | 1977-04-19 | Hitachi Ltd | Transmission-type scanning electronic microscope |
NL7804037A (en) * | 1978-04-17 | 1979-10-19 | Philips Nv | ELECTRONIC MICROSKOP WITH UNDIFFERENTIATED PHASE IMAGE. |
AU534811B2 (en) * | 1979-07-03 | 1984-02-16 | Unisearch Limited | Atmospheric scanning electron microscope |
US4514629A (en) * | 1982-07-07 | 1985-04-30 | National Research Development Corporation | Scanning transmission electron microscopes |
GB8509493D0 (en) * | 1985-04-12 | 1985-05-15 | Plessey Co Plc | Scanning microscopes |
US4760567A (en) * | 1986-08-11 | 1988-07-26 | Electron Beam Memories | Electron beam memory system with ultra-compact, high current density electron gun |
JPS6482445A (en) * | 1987-09-25 | 1989-03-28 | Hitachi Ltd | Charged particle detector |
JP2602287B2 (en) * | 1988-07-01 | 1997-04-23 | 株式会社日立製作所 | X-ray mask defect inspection method and apparatus |
US5008535A (en) * | 1988-09-02 | 1991-04-16 | U.S. Philips Corporation | Energy analyzer and spectrometer for low-energy electrons |
US4877961A (en) * | 1988-10-26 | 1989-10-31 | Varian Associates, Inc. | In-line electron beam energy monitor and control |
JPH0766766B2 (en) * | 1989-03-30 | 1995-07-19 | 株式会社日立製作所 | electronic microscope |
US5475228A (en) * | 1994-11-28 | 1995-12-12 | University Of Puerto Rico | Unipolar blocking method and apparatus for monitoring electrically charged particles |
JP3776887B2 (en) * | 2003-01-07 | 2006-05-17 | 株式会社日立ハイテクノロジーズ | Electron beam equipment |
DE10331137B4 (en) * | 2003-07-09 | 2008-04-30 | Carl Zeiss Nts Gmbh | Detector system for a scanning electron microscope and scanning electron microscope with a corresponding detector system |
JP4664041B2 (en) * | 2004-10-27 | 2011-04-06 | 株式会社日立ハイテクノロジーズ | Charged particle beam apparatus and sample preparation method |
US7105817B2 (en) * | 2005-01-18 | 2006-09-12 | International Business Machines Inc. | Method of forming images in a scanning electron microscope |
ITBO20070409A1 (en) * | 2007-06-11 | 2008-12-12 | C N R Consiglio Naz Delle Ri C | DETECTOR DEVICE FOR ELECTRONIC MICROSCOPE. |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3191028A (en) * | 1963-04-22 | 1965-06-22 | Albert V Crewe | Scanning electron microscope |
-
1970
- 1970-03-05 US US168020*A patent/US3626184A/en not_active Expired - Lifetime
-
1971
- 1971-02-25 BE BE763456A patent/BE763456A/en not_active IP Right Cessation
- 1971-02-26 FR FR7106854A patent/FR2084007A5/fr not_active Expired
- 1971-03-02 CH CH304071A patent/CH520927A/en not_active IP Right Cessation
- 1971-03-04 DE DE19712110325 patent/DE2110325A1/en active Pending
- 1971-03-05 JP JP1134771A patent/JPS5411664B1/ja active Pending
- 1971-04-19 GB GB21675/71A patent/GB1294440A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
CH520927A (en) | 1972-03-31 |
US3626184A (en) | 1971-12-07 |
DE2110325A1 (en) | 1971-09-16 |
BE763456A (en) | 1971-07-16 |
GB1294440A (en) | 1972-10-25 |
FR2084007A5 (en) | 1971-12-17 |