GB1076857A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
GB1076857A
GB1076857A GB4007364A GB4007364A GB1076857A GB 1076857 A GB1076857 A GB 1076857A GB 4007364 A GB4007364 A GB 4007364A GB 4007364 A GB4007364 A GB 4007364A GB 1076857 A GB1076857 A GB 1076857A
Authority
GB
United Kingdom
Prior art keywords
electron beam
specimen
detectors
signals
changes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4007364A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1076857A publication Critical patent/GB1076857A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,076,857. Electron beam apparatus. NIHON DENSHI KABUSHIKI KAISHA. Oct. 1, 1964 [Oct. 11, 1963], No. 40073/64. Heading H1D. [Also in Division G1] A specimen surface is examined by scanning it with an electron beam and detecting the backscattered electrons by two or more detectors positioned above the specimen on opposite sides of the point of incidence, the sum of the signals from a pair of the detectors providing a signal indicative of changes of surface composition only, and the difference providing a signal indicative of changes of surface topography only. The electron beam from the gun 1 is scanned across the specimen 3, reflected electrons deing detected by silicon P-N junction detectors 6a and 6b, the signals from which may be added to, or subtracted from, one another to provide a resultant signal on oscilloscope 10. The effect of surface changes on the resultant signal is described with reference to Figs. 2 to 7 (not shown). Small differences in detector sensitivity, or the effect of slight tilting of the specimen surface with respect to the beam, may be compensated by network 9, and the signals from the individual detectors may be separately displayed on oscilloscopes 11a and 11b.
GB4007364A 1963-10-11 1964-10-01 Electron beam apparatus Expired GB1076857A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5422463 1963-10-11

Publications (1)

Publication Number Publication Date
GB1076857A true GB1076857A (en) 1967-07-26

Family

ID=12964551

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4007364A Expired GB1076857A (en) 1963-10-11 1964-10-01 Electron beam apparatus

Country Status (1)

Country Link
GB (1) GB1076857A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2285169A (en) * 1993-12-21 1995-06-28 Secretary Trade Ind Brit Scanning electron microscope grain imaging

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2285169A (en) * 1993-12-21 1995-06-28 Secretary Trade Ind Brit Scanning electron microscope grain imaging

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