JPS5765658A - Electron beam device - Google Patents
Electron beam deviceInfo
- Publication number
- JPS5765658A JPS5765658A JP14102980A JP14102980A JPS5765658A JP S5765658 A JPS5765658 A JP S5765658A JP 14102980 A JP14102980 A JP 14102980A JP 14102980 A JP14102980 A JP 14102980A JP S5765658 A JPS5765658 A JP S5765658A
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- circuit
- signal
- view
- deflection coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To confirm easily which portion in the view can be observed by executing the time shared switching of the electron beam scanning speed between high and low speeds and displaying the two kind of detection signals obtained from the specimen through the scanning. CONSTITUTION:The horizontal and vertical scanning signals are provided from a scanning signal generating circuit 7 to the deflection coil 11 in a signal selection circuit 8 and a cathode ray tube 10. The horizontal and vertical signals provided from a scanning signal generating circuit 12 having the period considerably shorter than that produced from said circuit 7 are provided respectively to the deflection coil 15 in the cathode ray tube 14 and the circuit 8. Then the circuit 8 will selectively provided the signal from the circuits 7, 12 to the deflection coil 6 by the switching signal in a switching signal generating circuit 16. When scanning the specimen 5 with low rate, the X-ray image of limited view is displayed by the detection signal from a X-ray detector 26 while when scanning with low rate the secondary electron image in the entire view is displayed by the detection signal from a secondary electron detector 22. Consequently it can be confirmed easily which portion in the view is observable.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14102980A JPS5765658A (en) | 1980-10-08 | 1980-10-08 | Electron beam device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14102980A JPS5765658A (en) | 1980-10-08 | 1980-10-08 | Electron beam device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5765658A true JPS5765658A (en) | 1982-04-21 |
Family
ID=15282549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14102980A Pending JPS5765658A (en) | 1980-10-08 | 1980-10-08 | Electron beam device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5765658A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5427354A (en) * | 1977-08-01 | 1979-03-01 | Hitachi Ltd | Scan-type electronic microscope |
-
1980
- 1980-10-08 JP JP14102980A patent/JPS5765658A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5427354A (en) * | 1977-08-01 | 1979-03-01 | Hitachi Ltd | Scan-type electronic microscope |
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