JPS5765658A - Electron beam device - Google Patents

Electron beam device

Info

Publication number
JPS5765658A
JPS5765658A JP14102980A JP14102980A JPS5765658A JP S5765658 A JPS5765658 A JP S5765658A JP 14102980 A JP14102980 A JP 14102980A JP 14102980 A JP14102980 A JP 14102980A JP S5765658 A JPS5765658 A JP S5765658A
Authority
JP
Japan
Prior art keywords
scanning
circuit
signal
view
deflection coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14102980A
Other languages
Japanese (ja)
Inventor
Haruo Otsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP14102980A priority Critical patent/JPS5765658A/en
Publication of JPS5765658A publication Critical patent/JPS5765658A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To confirm easily which portion in the view can be observed by executing the time shared switching of the electron beam scanning speed between high and low speeds and displaying the two kind of detection signals obtained from the specimen through the scanning. CONSTITUTION:The horizontal and vertical scanning signals are provided from a scanning signal generating circuit 7 to the deflection coil 11 in a signal selection circuit 8 and a cathode ray tube 10. The horizontal and vertical signals provided from a scanning signal generating circuit 12 having the period considerably shorter than that produced from said circuit 7 are provided respectively to the deflection coil 15 in the cathode ray tube 14 and the circuit 8. Then the circuit 8 will selectively provided the signal from the circuits 7, 12 to the deflection coil 6 by the switching signal in a switching signal generating circuit 16. When scanning the specimen 5 with low rate, the X-ray image of limited view is displayed by the detection signal from a X-ray detector 26 while when scanning with low rate the secondary electron image in the entire view is displayed by the detection signal from a secondary electron detector 22. Consequently it can be confirmed easily which portion in the view is observable.
JP14102980A 1980-10-08 1980-10-08 Electron beam device Pending JPS5765658A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14102980A JPS5765658A (en) 1980-10-08 1980-10-08 Electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14102980A JPS5765658A (en) 1980-10-08 1980-10-08 Electron beam device

Publications (1)

Publication Number Publication Date
JPS5765658A true JPS5765658A (en) 1982-04-21

Family

ID=15282549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14102980A Pending JPS5765658A (en) 1980-10-08 1980-10-08 Electron beam device

Country Status (1)

Country Link
JP (1) JPS5765658A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427354A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Scan-type electronic microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427354A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Scan-type electronic microscope

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