JPS5769655A - Electron beam device - Google Patents
Electron beam deviceInfo
- Publication number
- JPS5769655A JPS5769655A JP14500580A JP14500580A JPS5769655A JP S5769655 A JPS5769655 A JP S5769655A JP 14500580 A JP14500580 A JP 14500580A JP 14500580 A JP14500580 A JP 14500580A JP S5769655 A JPS5769655 A JP S5769655A
- Authority
- JP
- Japan
- Prior art keywords
- secondary electron
- count
- signal
- photographying
- control circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To perform the clear photographying of X-ray image and secondary electron image displayed simultaneously on the screen, by providing the secondary electron signal to a cathode ray tube only during the predetermined period of the electron beam scanning thereby improving the excessive exposure of the secondary electron image. CONSTITUTION:The vertical scanning signal from a scan signal generating circuit 4 is provided through an amplifier 18 to a counter 21 while the vertical scanning time is counted and provided to a control circuit 22. The control circuit 22 will control the switching circuits 11, 23, 24 in accordance to the count. In other word when photographying the screen by a camera 25 fixed to a cathode ray tube 16, the control circuit 22 will turn off the switch 11 if the count of the counter 21 is 1 thus to stop the provision of the secondary electron detector 9 signal to the cathode ray tube 16. While when the count will reach to the determined value, the switches 23, 24 are turned off thus to stop the provision of the scanning signal to the deflection coils 19, 17. Consenquently the exposure is performed only one time during the period of predetermined count. Consequently the excessive exposure of the secondary electron image is improved and the clear photographying can be performed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14500580A JPS5769655A (en) | 1980-10-16 | 1980-10-16 | Electron beam device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14500580A JPS5769655A (en) | 1980-10-16 | 1980-10-16 | Electron beam device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5769655A true JPS5769655A (en) | 1982-04-28 |
Family
ID=15375242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14500580A Pending JPS5769655A (en) | 1980-10-16 | 1980-10-16 | Electron beam device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5769655A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60154444A (en) * | 1984-01-23 | 1985-08-14 | Hitachi Naka Seiki Kk | Image pick-up device of scanning type electron microscope etc. |
WO2010115873A1 (en) * | 2009-04-06 | 2010-10-14 | Bruker Nano Gmbh | Detector, device, and method for the simultaneous, energy-dispersive recording of backscattered electrons and x-ray quanta |
US8368019B2 (en) | 2009-02-09 | 2013-02-05 | Carl Zeiss Microscopy Gmbh | Particle beam system |
US8450215B2 (en) | 2009-08-07 | 2013-05-28 | Carl Zeiss Microscopy Gmbh | Particle beam systems and methods |
-
1980
- 1980-10-16 JP JP14500580A patent/JPS5769655A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60154444A (en) * | 1984-01-23 | 1985-08-14 | Hitachi Naka Seiki Kk | Image pick-up device of scanning type electron microscope etc. |
US8368019B2 (en) | 2009-02-09 | 2013-02-05 | Carl Zeiss Microscopy Gmbh | Particle beam system |
US8368020B2 (en) | 2009-02-09 | 2013-02-05 | Carl Zeiss Microscopy Gmbh | Particle beam system |
WO2010115873A1 (en) * | 2009-04-06 | 2010-10-14 | Bruker Nano Gmbh | Detector, device, and method for the simultaneous, energy-dispersive recording of backscattered electrons and x-ray quanta |
US8450215B2 (en) | 2009-08-07 | 2013-05-28 | Carl Zeiss Microscopy Gmbh | Particle beam systems and methods |
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