JPS5467367A - Application unit for particle ray - Google Patents
Application unit for particle rayInfo
- Publication number
- JPS5467367A JPS5467367A JP13350677A JP13350677A JPS5467367A JP S5467367 A JPS5467367 A JP S5467367A JP 13350677 A JP13350677 A JP 13350677A JP 13350677 A JP13350677 A JP 13350677A JP S5467367 A JPS5467367 A JP S5467367A
- Authority
- JP
- Japan
- Prior art keywords
- test piece
- electron
- rays
- deflection
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the damage or contamination, for the test piece, by blocking the arrival of particle rays on the test piece, when the particle rays radiating the test piece is at a period not used for the image formation and at stop period.
CONSTITUTION: The electrons from the electron gun 1 are accelerated at the anode 2, causing the electron rays 5 and the electron prove is formed on the test piece 8 with the collective lenses 3 and 4 and the objective lens. Next, the electron ray deflection coil 6 is scanned toward x, y test direction on the test piece 8 with the electron ray deflection coil 6. The current to the deflection coil 14 of the Braun tube 15 and that to the coil 6 are produced with the deflection power supply 17. With this constitution, the deflection means 21 is placed between the anode 2 and the collective lens 3 newly and it is connected to the output side of the Braun tube 15 via the pulse power supply 18 newly provided. Thus, if the particle rays are not used to the radiation of the test piece, the electron rays 5 are deflected with the deflection means 21 and unnecessary electron rays to the test piece are controlled.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13350677A JPS5467367A (en) | 1977-11-09 | 1977-11-09 | Application unit for particle ray |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13350677A JPS5467367A (en) | 1977-11-09 | 1977-11-09 | Application unit for particle ray |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5467367A true JPS5467367A (en) | 1979-05-30 |
Family
ID=15106355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13350677A Pending JPS5467367A (en) | 1977-11-09 | 1977-11-09 | Application unit for particle ray |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5467367A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6987265B2 (en) | 1997-08-07 | 2006-01-17 | Hitachi, Ltd. | Method and an apparatus of an inspection system using an electron beam |
JP2008196762A (en) * | 2007-02-13 | 2008-08-28 | Daikin Ind Ltd | Flow divider, heat exchanger unit and refrigerating device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5141315A (en) * | 1974-10-04 | 1976-04-07 | Mitsuaki Mukaiyama | Beeta arukokishikarubonirukagobutsu oyobi arufua beeta fuhowakarubonirukagobutsu no seizoho |
-
1977
- 1977-11-09 JP JP13350677A patent/JPS5467367A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5141315A (en) * | 1974-10-04 | 1976-04-07 | Mitsuaki Mukaiyama | Beeta arukokishikarubonirukagobutsu oyobi arufua beeta fuhowakarubonirukagobutsu no seizoho |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6987265B2 (en) | 1997-08-07 | 2006-01-17 | Hitachi, Ltd. | Method and an apparatus of an inspection system using an electron beam |
US7012252B2 (en) | 1997-08-07 | 2006-03-14 | Hitachi, Ltd. | Method and an apparatus of an inspection system using an electron beam |
US7232996B2 (en) | 1997-08-07 | 2007-06-19 | Hitachi, Ltd. | Method and an apparatus of an inspection system using an electron beam |
US7439506B2 (en) | 1997-08-07 | 2008-10-21 | Hitachi, Ltd. | Method and an apparatus of an inspection system using an electron beam |
US8134125B2 (en) | 1997-08-07 | 2012-03-13 | Hitachi, Ltd. | Method and apparatus of an inspection system using an electron beam |
US8604430B2 (en) | 1997-08-07 | 2013-12-10 | Hitachi, Ltd. | Method and an apparatus of an inspection system using an electron beam |
JP2008196762A (en) * | 2007-02-13 | 2008-08-28 | Daikin Ind Ltd | Flow divider, heat exchanger unit and refrigerating device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5568056A (en) | X-ray tube | |
ES8401676A1 (en) | Cathode-ray tube and semiconductor device for use in such a cathode-ray tube | |
US2612610A (en) | Radiation detector | |
JPS5730253A (en) | Secondary electron detector for scan type electron microscope | |
JPS5467367A (en) | Application unit for particle ray | |
US2569654A (en) | Cathode-ray tube | |
US2414881A (en) | Television transmitting tube with a concave secondary electron emitter | |
JPS57119442A (en) | Scanning electron microscope device | |
US4163174A (en) | Oblique streak tube | |
JPS546762A (en) | Cathode-ray tube | |
JPS6415604A (en) | Measuring apparatus for length by electron beam | |
EP0283941A3 (en) | Cathode ray tube having an electron gun constructed for readay refocusing of the electron beam | |
JPS5447472A (en) | Picture display unit | |
JPS5688240A (en) | Camera tube | |
JPS545374A (en) | Electronic gun | |
US3193721A (en) | Image magnification varying means for photoelectronic image devices | |
JPS5723449A (en) | Electron gun for cathode ray tube | |
JPS54561A (en) | Cathode ray tube of projection type | |
JPS57158936A (en) | X-ray tube | |
JPS5448481A (en) | Electron ray unit | |
US4266248A (en) | Device having a camera tube | |
JPS545373A (en) | Projection-type cathode-ray tube | |
JPS563956A (en) | X-ray generator | |
JPS5318916A (en) | Cathode-ray tube | |
JPS5652846A (en) | Electrostatically focusing and electromagnetically deflecting image pick-up tube |