JPS5467367A - Application unit for particle ray - Google Patents

Application unit for particle ray

Info

Publication number
JPS5467367A
JPS5467367A JP13350677A JP13350677A JPS5467367A JP S5467367 A JPS5467367 A JP S5467367A JP 13350677 A JP13350677 A JP 13350677A JP 13350677 A JP13350677 A JP 13350677A JP S5467367 A JPS5467367 A JP S5467367A
Authority
JP
Japan
Prior art keywords
test piece
electron
rays
deflection
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13350677A
Other languages
Japanese (ja)
Inventor
Tadao Watabe
Koichi Hara
Hideo Naito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13350677A priority Critical patent/JPS5467367A/en
Publication of JPS5467367A publication Critical patent/JPS5467367A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the damage or contamination, for the test piece, by blocking the arrival of particle rays on the test piece, when the particle rays radiating the test piece is at a period not used for the image formation and at stop period.
CONSTITUTION: The electrons from the electron gun 1 are accelerated at the anode 2, causing the electron rays 5 and the electron prove is formed on the test piece 8 with the collective lenses 3 and 4 and the objective lens. Next, the electron ray deflection coil 6 is scanned toward x, y test direction on the test piece 8 with the electron ray deflection coil 6. The current to the deflection coil 14 of the Braun tube 15 and that to the coil 6 are produced with the deflection power supply 17. With this constitution, the deflection means 21 is placed between the anode 2 and the collective lens 3 newly and it is connected to the output side of the Braun tube 15 via the pulse power supply 18 newly provided. Thus, if the particle rays are not used to the radiation of the test piece, the electron rays 5 are deflected with the deflection means 21 and unnecessary electron rays to the test piece are controlled.
COPYRIGHT: (C)1979,JPO&Japio
JP13350677A 1977-11-09 1977-11-09 Application unit for particle ray Pending JPS5467367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13350677A JPS5467367A (en) 1977-11-09 1977-11-09 Application unit for particle ray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13350677A JPS5467367A (en) 1977-11-09 1977-11-09 Application unit for particle ray

Publications (1)

Publication Number Publication Date
JPS5467367A true JPS5467367A (en) 1979-05-30

Family

ID=15106355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13350677A Pending JPS5467367A (en) 1977-11-09 1977-11-09 Application unit for particle ray

Country Status (1)

Country Link
JP (1) JPS5467367A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6987265B2 (en) 1997-08-07 2006-01-17 Hitachi, Ltd. Method and an apparatus of an inspection system using an electron beam
JP2008196762A (en) * 2007-02-13 2008-08-28 Daikin Ind Ltd Flow divider, heat exchanger unit and refrigerating device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141315A (en) * 1974-10-04 1976-04-07 Mitsuaki Mukaiyama Beeta arukokishikarubonirukagobutsu oyobi arufua beeta fuhowakarubonirukagobutsu no seizoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141315A (en) * 1974-10-04 1976-04-07 Mitsuaki Mukaiyama Beeta arukokishikarubonirukagobutsu oyobi arufua beeta fuhowakarubonirukagobutsu no seizoho

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6987265B2 (en) 1997-08-07 2006-01-17 Hitachi, Ltd. Method and an apparatus of an inspection system using an electron beam
US7012252B2 (en) 1997-08-07 2006-03-14 Hitachi, Ltd. Method and an apparatus of an inspection system using an electron beam
US7232996B2 (en) 1997-08-07 2007-06-19 Hitachi, Ltd. Method and an apparatus of an inspection system using an electron beam
US7439506B2 (en) 1997-08-07 2008-10-21 Hitachi, Ltd. Method and an apparatus of an inspection system using an electron beam
US8134125B2 (en) 1997-08-07 2012-03-13 Hitachi, Ltd. Method and apparatus of an inspection system using an electron beam
US8604430B2 (en) 1997-08-07 2013-12-10 Hitachi, Ltd. Method and an apparatus of an inspection system using an electron beam
JP2008196762A (en) * 2007-02-13 2008-08-28 Daikin Ind Ltd Flow divider, heat exchanger unit and refrigerating device

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