JPS6415604A - Measuring apparatus for length by electron beam - Google Patents
Measuring apparatus for length by electron beamInfo
- Publication number
- JPS6415604A JPS6415604A JP17217687A JP17217687A JPS6415604A JP S6415604 A JPS6415604 A JP S6415604A JP 17217687 A JP17217687 A JP 17217687A JP 17217687 A JP17217687 A JP 17217687A JP S6415604 A JPS6415604 A JP S6415604A
- Authority
- JP
- Japan
- Prior art keywords
- reduced
- electron
- wafer
- projected
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To lessen the number of times of repeated scanning for measuring dimensions, by providing an apparatus with a function whereby an image formed by uniform irradiation of a rectangular aperture with electron beams is focused and projected on a pattern. CONSTITUTION:A rectangular aperture 102 is irradiated uniformly by electron beams 117 emitted from an electron gun element 101, and an image formed by the rectangular aperture 102 is reduced by a reducing lens 104. After passing through a restricting aperture 105, it is reduced further and projected on a wafer 109 by means of a reducing lens 106 and a projecting lens 107. A rectangular electron beam reduced and projected on the wafer 109 is made to scan the wafer by a scanning deflection electrode provided in the projecting lens 107. Secondary electrons generated thereby from an irradiated part are caught and collected by a scintillator 118, and secondary electron signals thus obtained are processed by a control element 115, so that dimensions can be determined. By this construction, the number of times of repeated scanning for measuring the dimensions is lessened and electron beam damage to a device is reduced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17217687A JPS6415604A (en) | 1987-07-10 | 1987-07-10 | Measuring apparatus for length by electron beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17217687A JPS6415604A (en) | 1987-07-10 | 1987-07-10 | Measuring apparatus for length by electron beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6415604A true JPS6415604A (en) | 1989-01-19 |
Family
ID=15936983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17217687A Pending JPS6415604A (en) | 1987-07-10 | 1987-07-10 | Measuring apparatus for length by electron beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6415604A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0458104A (en) * | 1990-06-27 | 1992-02-25 | Hitachi Ltd | Electron beam size measuring instrument |
US5246992A (en) * | 1989-09-15 | 1993-09-21 | Hoechst Aktiengesellschaft | Polyester fibers modified with carbodiimides and process for their preparation |
US5378537A (en) * | 1990-10-19 | 1995-01-03 | Toray Industries, Inc. | Polyester monofilament |
US6147128A (en) * | 1998-05-14 | 2000-11-14 | Astenjohnson, Inc. | Industrial fabric and yarn made from recycled polyester |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6041456A (en) * | 1983-08-12 | 1985-03-05 | Takai Seisakusho:Kk | Preparation of silk-strained bean curd filled in cup |
JPS6222010A (en) * | 1985-07-23 | 1987-01-30 | Mitsubishi Electric Corp | Detecting method for pattern defect |
-
1987
- 1987-07-10 JP JP17217687A patent/JPS6415604A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6041456A (en) * | 1983-08-12 | 1985-03-05 | Takai Seisakusho:Kk | Preparation of silk-strained bean curd filled in cup |
JPS6222010A (en) * | 1985-07-23 | 1987-01-30 | Mitsubishi Electric Corp | Detecting method for pattern defect |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5246992A (en) * | 1989-09-15 | 1993-09-21 | Hoechst Aktiengesellschaft | Polyester fibers modified with carbodiimides and process for their preparation |
JPH0458104A (en) * | 1990-06-27 | 1992-02-25 | Hitachi Ltd | Electron beam size measuring instrument |
US5378537A (en) * | 1990-10-19 | 1995-01-03 | Toray Industries, Inc. | Polyester monofilament |
US6147128A (en) * | 1998-05-14 | 2000-11-14 | Astenjohnson, Inc. | Industrial fabric and yarn made from recycled polyester |
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