JPS57107546A - Scan type electron microscope - Google Patents

Scan type electron microscope

Info

Publication number
JPS57107546A
JPS57107546A JP18357680A JP18357680A JPS57107546A JP S57107546 A JPS57107546 A JP S57107546A JP 18357680 A JP18357680 A JP 18357680A JP 18357680 A JP18357680 A JP 18357680A JP S57107546 A JPS57107546 A JP S57107546A
Authority
JP
Japan
Prior art keywords
signal
polarity
inverted
detector
fed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18357680A
Other languages
Japanese (ja)
Inventor
Yoshihiro Hirata
Katsuji Sawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP18357680A priority Critical patent/JPS57107546A/en
Publication of JPS57107546A publication Critical patent/JPS57107546A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To indicate the polarity inversion easily and accurately by detecting the specimen information signal through a detector while providing means for exchanging the polarity of said signal by an external command and adding a predetermined D.C. signal. CONSTITUTION:The signal from a scan signal generator 7 is fed synchronously with a deflecting means 8 of a microscope body 1 and a deflecting means 10 of a cathode ray tube 9 and the electron beam 3 is deflected on a specimen 5 then said information is detected by a detector 11 and fed to a switching circuit 12. By the command from a control circuit 14 the switches s1, s2 are switched at the terminals b1, b2 during the inversion while the positive voltage signal where the polarity of the negative D.C. voltage E is inverted is added on a signal from a detector 11 where the polarity is inverted and fed to the grid of a cathode ray tube 9. Consequently the proper polarity inverted image can be indicated automatically without shifting the inverted signal level manually resulting in the considerable improvement of the operationability.
JP18357680A 1980-12-24 1980-12-24 Scan type electron microscope Pending JPS57107546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18357680A JPS57107546A (en) 1980-12-24 1980-12-24 Scan type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18357680A JPS57107546A (en) 1980-12-24 1980-12-24 Scan type electron microscope

Publications (1)

Publication Number Publication Date
JPS57107546A true JPS57107546A (en) 1982-07-05

Family

ID=16138223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18357680A Pending JPS57107546A (en) 1980-12-24 1980-12-24 Scan type electron microscope

Country Status (1)

Country Link
JP (1) JPS57107546A (en)

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