JPS54146570A - Focusing device for electron microscope - Google Patents

Focusing device for electron microscope

Info

Publication number
JPS54146570A
JPS54146570A JP5523378A JP5523378A JPS54146570A JP S54146570 A JPS54146570 A JP S54146570A JP 5523378 A JP5523378 A JP 5523378A JP 5523378 A JP5523378 A JP 5523378A JP S54146570 A JPS54146570 A JP S54146570A
Authority
JP
Japan
Prior art keywords
axis
power source
switch
electron beam
shift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5523378A
Other languages
Japanese (ja)
Other versions
JPS5851663B2 (en
Inventor
Hiroyuki Mizuno
Moriki Kubozoe
Minoru Shinohara
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5523378A priority Critical patent/JPS5851663B2/en
Publication of JPS54146570A publication Critical patent/JPS54146570A/en
Publication of JPS5851663B2 publication Critical patent/JPS5851663B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To ensure an easy and accurate focusing with a bright viewfield for the electron microscope by providing the electromagnetic deflecting means which correct the effect of the unmatched magnetic field of the 2-step electromagnetic deflecting device.
CONSTITUTION: Figures 61, 62, 91 and 92 indicate the power sources for matching electron beam 4 with optical axis 1, for the wobbler, for matching beam 4 with axis 1 via correcting electromagnetic deflecting coil 81 and 82, and for correction of the shift of the electron beam in case the wobbler power source is applied respectively. Then only switch 63 is actuated, and power source 62 is connected to deflecting coils 21, 22, 31 and 32. Thus, electron beam 4 is deflected as shown by dotted line 41 and does not coincide with the optical axis on test sample 5. In case only switch 93 is actuated with power source 92 connected to coil 81 and 82, beam 4 is also deflected from axis 1. This shift is adjusted by the same amount of the preceding shift adjustment, and swich 63 and 93 are switched in synchronism with the period of several Hz through switch driving circuit 100. As a result, beam 4 can be irradiated with angle of θ to axis 1 and with synchronization with circuit 100.
COPYRIGHT: (C)1979,JPO&Japio
JP5523378A 1978-05-09 1978-05-09 electron microscope focusing device Expired JPS5851663B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5523378A JPS5851663B2 (en) 1978-05-09 1978-05-09 electron microscope focusing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5523378A JPS5851663B2 (en) 1978-05-09 1978-05-09 electron microscope focusing device

Publications (2)

Publication Number Publication Date
JPS54146570A true JPS54146570A (en) 1979-11-15
JPS5851663B2 JPS5851663B2 (en) 1983-11-17

Family

ID=12992877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5523378A Expired JPS5851663B2 (en) 1978-05-09 1978-05-09 electron microscope focusing device

Country Status (1)

Country Link
JP (1) JPS5851663B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0395841A (en) * 1989-09-08 1991-04-22 Jeol Ltd Electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0395841A (en) * 1989-09-08 1991-04-22 Jeol Ltd Electron microscope

Also Published As

Publication number Publication date
JPS5851663B2 (en) 1983-11-17

Similar Documents

Publication Publication Date Title
JPS5632655A (en) Electron beam device
JPS5788659A (en) Electron ray device
JPS54146570A (en) Focusing device for electron microscope
JPS53102677A (en) Ion beam radiating unit
JPS5469075A (en) Electron beam drawing device
JPS5613649A (en) Correcting method and device for astigmatism in scanning type electron microscope and the like
JPS56107460A (en) Electron lens
JPS5694740A (en) Electronic beam exposure device
GB1193250A (en) Method and Apparatus for Adjusting Electron Beam in Electron Microscope
JPS5533716A (en) Electron microscope focusing lens system
JPS551186A (en) Electron beam exposure apparatus
JPS5768031A (en) Axis aligning mechanism for electron beam exposure device
JPS5481063A (en) Electron-beam equipment
JPS556784A (en) Method and device for astrigmatism correction in scanning electron microscope
JPS5684858A (en) Electron microscope
JPS57111936A (en) Astigmatism correcting device for electron microscope
JPS551187A (en) Electron beam exposure apparatus
JPS5423465A (en) Electronic microscope
JPS5575222A (en) Electro-optical mirror tube
JPS52128053A (en) Electron microscope
JPS5346266A (en) Electronic microscope
JPS54128288A (en) Electron beam exposure device
JPS56152145A (en) Electron microscope
JPS55110041A (en) Electron beam projector
JPS55144577A (en) Energy analyzer for electron ray