JPS54146570A - Focusing device for electron microscope - Google Patents
Focusing device for electron microscopeInfo
- Publication number
- JPS54146570A JPS54146570A JP5523378A JP5523378A JPS54146570A JP S54146570 A JPS54146570 A JP S54146570A JP 5523378 A JP5523378 A JP 5523378A JP 5523378 A JP5523378 A JP 5523378A JP S54146570 A JPS54146570 A JP S54146570A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- power source
- switch
- electron beam
- shift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To ensure an easy and accurate focusing with a bright viewfield for the electron microscope by providing the electromagnetic deflecting means which correct the effect of the unmatched magnetic field of the 2-step electromagnetic deflecting device.
CONSTITUTION: Figures 61, 62, 91 and 92 indicate the power sources for matching electron beam 4 with optical axis 1, for the wobbler, for matching beam 4 with axis 1 via correcting electromagnetic deflecting coil 81 and 82, and for correction of the shift of the electron beam in case the wobbler power source is applied respectively. Then only switch 63 is actuated, and power source 62 is connected to deflecting coils 21, 22, 31 and 32. Thus, electron beam 4 is deflected as shown by dotted line 41 and does not coincide with the optical axis on test sample 5. In case only switch 93 is actuated with power source 92 connected to coil 81 and 82, beam 4 is also deflected from axis 1. This shift is adjusted by the same amount of the preceding shift adjustment, and swich 63 and 93 are switched in synchronism with the period of several Hz through switch driving circuit 100. As a result, beam 4 can be irradiated with angle of θ to axis 1 and with synchronization with circuit 100.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5523378A JPS5851663B2 (en) | 1978-05-09 | 1978-05-09 | electron microscope focusing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5523378A JPS5851663B2 (en) | 1978-05-09 | 1978-05-09 | electron microscope focusing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54146570A true JPS54146570A (en) | 1979-11-15 |
JPS5851663B2 JPS5851663B2 (en) | 1983-11-17 |
Family
ID=12992877
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5523378A Expired JPS5851663B2 (en) | 1978-05-09 | 1978-05-09 | electron microscope focusing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5851663B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0395841A (en) * | 1989-09-08 | 1991-04-22 | Jeol Ltd | Electron microscope |
-
1978
- 1978-05-09 JP JP5523378A patent/JPS5851663B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0395841A (en) * | 1989-09-08 | 1991-04-22 | Jeol Ltd | Electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS5851663B2 (en) | 1983-11-17 |
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