JPS55144577A - Energy analyzer for electron ray - Google Patents
Energy analyzer for electron rayInfo
- Publication number
- JPS55144577A JPS55144577A JP5276979A JP5276979A JPS55144577A JP S55144577 A JPS55144577 A JP S55144577A JP 5276979 A JP5276979 A JP 5276979A JP 5276979 A JP5276979 A JP 5276979A JP S55144577 A JPS55144577 A JP S55144577A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- sample
- energy analyzer
- electron rays
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000012466 permeate Substances 0.000 abstract 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE: To make it possible to carry out easily and in a short period of time the changeover of elementary analysis and the observation of sample by injecting electron rays in an electron microscope or the like selectively to an energy analyzer and an electron ray detector by means of electron ray deflecting means.
CONSTITUTION: Electron rays 1 are focused on the surface of a sample 2, and the major parts of the electron rays permeate through the sample 2. The permeated electron rays 1 are focused as object points of an energy analyzer 5 by means of an electron lens 3. When the sample 2 is subjected to elementary analysis, a current from a deflection coil power source is made zero by a signal from a controlling unit signal, and electron rays 1 are injected to the energy analyzer 5. When the sample 2 is observed, a predetermined current is supplied from the deflection coil power source to the deflection coil, whereby the electron rays are deflected and injected to the electron detector 4 fixed to the outside of the optical axis 10.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5276979A JPS55144577A (en) | 1979-04-28 | 1979-04-28 | Energy analyzer for electron ray |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5276979A JPS55144577A (en) | 1979-04-28 | 1979-04-28 | Energy analyzer for electron ray |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55144577A true JPS55144577A (en) | 1980-11-11 |
Family
ID=12924063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5276979A Pending JPS55144577A (en) | 1979-04-28 | 1979-04-28 | Energy analyzer for electron ray |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55144577A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57107549A (en) * | 1980-12-24 | 1982-07-05 | Jeol Ltd | Electron microscope having energy analyzer |
JPS61116649A (en) * | 1984-11-12 | 1986-06-04 | Science & Tech Agency | Electron beam non-destructive inspection |
-
1979
- 1979-04-28 JP JP5276979A patent/JPS55144577A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57107549A (en) * | 1980-12-24 | 1982-07-05 | Jeol Ltd | Electron microscope having energy analyzer |
JPS6237503B2 (en) * | 1980-12-24 | 1987-08-12 | Nippon Electron Optics Lab | |
JPS61116649A (en) * | 1984-11-12 | 1986-06-04 | Science & Tech Agency | Electron beam non-destructive inspection |
JPH0444382B2 (en) * | 1984-11-12 | 1992-07-21 | Agency Science & Tech |
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