JPS55144577A - Energy analyzer for electron ray - Google Patents

Energy analyzer for electron ray

Info

Publication number
JPS55144577A
JPS55144577A JP5276979A JP5276979A JPS55144577A JP S55144577 A JPS55144577 A JP S55144577A JP 5276979 A JP5276979 A JP 5276979A JP 5276979 A JP5276979 A JP 5276979A JP S55144577 A JPS55144577 A JP S55144577A
Authority
JP
Japan
Prior art keywords
electron
sample
energy analyzer
electron rays
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5276979A
Other languages
Japanese (ja)
Inventor
Shigeto Sunakozawa
Sadao Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5276979A priority Critical patent/JPS55144577A/en
Publication of JPS55144577A publication Critical patent/JPS55144577A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to carry out easily and in a short period of time the changeover of elementary analysis and the observation of sample by injecting electron rays in an electron microscope or the like selectively to an energy analyzer and an electron ray detector by means of electron ray deflecting means.
CONSTITUTION: Electron rays 1 are focused on the surface of a sample 2, and the major parts of the electron rays permeate through the sample 2. The permeated electron rays 1 are focused as object points of an energy analyzer 5 by means of an electron lens 3. When the sample 2 is subjected to elementary analysis, a current from a deflection coil power source is made zero by a signal from a controlling unit signal, and electron rays 1 are injected to the energy analyzer 5. When the sample 2 is observed, a predetermined current is supplied from the deflection coil power source to the deflection coil, whereby the electron rays are deflected and injected to the electron detector 4 fixed to the outside of the optical axis 10.
COPYRIGHT: (C)1980,JPO&Japio
JP5276979A 1979-04-28 1979-04-28 Energy analyzer for electron ray Pending JPS55144577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5276979A JPS55144577A (en) 1979-04-28 1979-04-28 Energy analyzer for electron ray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5276979A JPS55144577A (en) 1979-04-28 1979-04-28 Energy analyzer for electron ray

Publications (1)

Publication Number Publication Date
JPS55144577A true JPS55144577A (en) 1980-11-11

Family

ID=12924063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5276979A Pending JPS55144577A (en) 1979-04-28 1979-04-28 Energy analyzer for electron ray

Country Status (1)

Country Link
JP (1) JPS55144577A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57107549A (en) * 1980-12-24 1982-07-05 Jeol Ltd Electron microscope having energy analyzer
JPS61116649A (en) * 1984-11-12 1986-06-04 Science & Tech Agency Electron beam non-destructive inspection

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57107549A (en) * 1980-12-24 1982-07-05 Jeol Ltd Electron microscope having energy analyzer
JPS6237503B2 (en) * 1980-12-24 1987-08-12 Nippon Electron Optics Lab
JPS61116649A (en) * 1984-11-12 1986-06-04 Science & Tech Agency Electron beam non-destructive inspection
JPH0444382B2 (en) * 1984-11-12 1992-07-21 Agency Science & Tech

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