JPS5753050A - Focussing device for electron microscope - Google Patents

Focussing device for electron microscope

Info

Publication number
JPS5753050A
JPS5753050A JP12791880A JP12791880A JPS5753050A JP S5753050 A JPS5753050 A JP S5753050A JP 12791880 A JP12791880 A JP 12791880A JP 12791880 A JP12791880 A JP 12791880A JP S5753050 A JPS5753050 A JP S5753050A
Authority
JP
Japan
Prior art keywords
image surface
insufficient
focal point
electron beams
focussing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12791880A
Other languages
Japanese (ja)
Other versions
JPS6153824B2 (en
Inventor
Takashi Yanaka
Akira Yonezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
KOKUSAI SEIKO
KOKUSAI SEIKOU KK
Original Assignee
INTERNATL PRECISION Inc
KOKUSAI SEIKO
KOKUSAI SEIKOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc, KOKUSAI SEIKO, KOKUSAI SEIKOU KK filed Critical INTERNATL PRECISION Inc
Priority to JP12791880A priority Critical patent/JPS5753050A/en
Publication of JPS5753050A publication Critical patent/JPS5753050A/en
Publication of JPS6153824B2 publication Critical patent/JPS6153824B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To easily obtain a desired insufficient or excessive focal point image and prevent dirt of an objective diaphragm by deflecting an electron beam by means of a deflection coil which is provided between an objective lens and an observed image surface and performing focussing using the insufficient or excessive focal point image. CONSTITUTION:When an electron beam emitted from the observation point 4 on a sample surface 1 is focussed on an image surface 15 near an image surface 9 that is separated from an obserbed image surface 3 by length DELTAfi, the passages of electron beams 7' and 8' are obtained from irradiated electron beams 7 and 8 by alternately varying an irradiated electron beam 6 passing on the axis of a lens 2 by an angle alpha. Then electron beams 7'' and 8'' are obtained by exciting a deflection coil 12 which is provided between the lens 2 and the observed image surface 3 and deflecting the electron beams 7' and 8' on an axis by an angl alpha and the angle beta which is assigned depending upon the insufficient focal point. A focussing image surface is moved from 15 to 9 and made coincide at the point 5 on the observed image surface 3. When samples are observed at the insufficient or excessive focal point, focussing is facilitated. The angle alpha can be reduced and dirt of an objective diaphragm be preveted.
JP12791880A 1980-09-17 1980-09-17 Focussing device for electron microscope Granted JPS5753050A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12791880A JPS5753050A (en) 1980-09-17 1980-09-17 Focussing device for electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12791880A JPS5753050A (en) 1980-09-17 1980-09-17 Focussing device for electron microscope

Publications (2)

Publication Number Publication Date
JPS5753050A true JPS5753050A (en) 1982-03-29
JPS6153824B2 JPS6153824B2 (en) 1986-11-19

Family

ID=14971852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12791880A Granted JPS5753050A (en) 1980-09-17 1980-09-17 Focussing device for electron microscope

Country Status (1)

Country Link
JP (1) JPS5753050A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63237767A (en) * 1987-03-25 1988-10-04 Kanebo Ltd Sealed container-packed beverage

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63237767A (en) * 1987-03-25 1988-10-04 Kanebo Ltd Sealed container-packed beverage

Also Published As

Publication number Publication date
JPS6153824B2 (en) 1986-11-19

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