JPS5757460A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS5757460A
JPS5757460A JP55130832A JP13083280A JPS5757460A JP S5757460 A JPS5757460 A JP S5757460A JP 55130832 A JP55130832 A JP 55130832A JP 13083280 A JP13083280 A JP 13083280A JP S5757460 A JPS5757460 A JP S5757460A
Authority
JP
Japan
Prior art keywords
lens
objective lens
diaphragm
limited view
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55130832A
Other languages
Japanese (ja)
Other versions
JPS6029187B2 (en
Inventor
Akira Yonezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
Original Assignee
INTERNATL PRECISION Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc filed Critical INTERNATL PRECISION Inc
Priority to JP55130832A priority Critical patent/JPS6029187B2/en
Publication of JPS5757460A publication Critical patent/JPS5757460A/en
Publication of JPS6029187B2 publication Critical patent/JPS6029187B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To make the excitation of an objective lens unvariable not only in high magnification area but in low magnification area by arranging another electronic lens between the objective lens and a limited view diaphragm. CONSTITUTION:An electron microscope is comprised of an objective lens 3 arranged at the rear of a specimen 1, a limited view diaphragm 4 arranged at the rear of said lens 3, intermediate lenses 5, 6 and a projection lens 8. Another lends 12 is arranged between said lens 3 and said diaphragm 4 to pressure bending the focused electron beam of the specimen 1 through the objective lens 3. When using the limited view magnification for the purpose of high magnification observation, the electronic lens 12 is operated off, while in case of the low magnification observation the electronic lens 12 is operated on.
JP55130832A 1980-09-22 1980-09-22 electronic microscope Expired JPS6029187B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55130832A JPS6029187B2 (en) 1980-09-22 1980-09-22 electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55130832A JPS6029187B2 (en) 1980-09-22 1980-09-22 electronic microscope

Publications (2)

Publication Number Publication Date
JPS5757460A true JPS5757460A (en) 1982-04-06
JPS6029187B2 JPS6029187B2 (en) 1985-07-09

Family

ID=15043734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55130832A Expired JPS6029187B2 (en) 1980-09-22 1980-09-22 electronic microscope

Country Status (1)

Country Link
JP (1) JPS6029187B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58119146A (en) * 1982-01-11 1983-07-15 Jeol Ltd Electron microscope
JPS60182043A (en) * 1984-02-29 1985-09-17 Hitachi Ltd Cassette loader
WO2018189850A1 (en) * 2017-04-13 2018-10-18 株式会社 日立ハイテクノロジーズ Electron microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58119146A (en) * 1982-01-11 1983-07-15 Jeol Ltd Electron microscope
JPS60182043A (en) * 1984-02-29 1985-09-17 Hitachi Ltd Cassette loader
JPH0450669B2 (en) * 1984-02-29 1992-08-14 Hitachi Ltd
WO2018189850A1 (en) * 2017-04-13 2018-10-18 株式会社 日立ハイテクノロジーズ Electron microscope

Also Published As

Publication number Publication date
JPS6029187B2 (en) 1985-07-09

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