JPS57141851A - Transmission-type electron microscope - Google Patents

Transmission-type electron microscope

Info

Publication number
JPS57141851A
JPS57141851A JP2545981A JP2545981A JPS57141851A JP S57141851 A JPS57141851 A JP S57141851A JP 2545981 A JP2545981 A JP 2545981A JP 2545981 A JP2545981 A JP 2545981A JP S57141851 A JPS57141851 A JP S57141851A
Authority
JP
Japan
Prior art keywords
lens
iris
transmission
sample
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2545981A
Other languages
Japanese (ja)
Other versions
JPH0234142B2 (en
Inventor
Akira Yonezawa
Takashi Yanaka
Kouhei Shirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
KOKUSAI SEIKO
KOKUSAI SEIKOU KK
Original Assignee
INTERNATL PRECISION Inc
KOKUSAI SEIKO
KOKUSAI SEIKOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc, KOKUSAI SEIKO, KOKUSAI SEIKOU KK filed Critical INTERNATL PRECISION Inc
Priority to JP2545981A priority Critical patent/JPS57141851A/en
Publication of JPS57141851A publication Critical patent/JPS57141851A/en
Publication of JPH0234142B2 publication Critical patent/JPH0234142B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To reduce amounts of blurs which are caused due to spherical aberrations and chromatic aberrations by installing a set lens between an objective and a limiting visual field iris, and focusing an electron beam transmitted by a sample on the said limiting field iris. CONSTITUTION:A transmission-type electron microscope has an objective 3, an intermediate lens 5 and an imaging lens 7 which are located in back of the lens 3 in that order, and a limiting visual field iris 4 installed between the lenses 3 and 5. In addition, a set lens 10 is provided between the lens 3 and the iris 4. A focusing lens 1 is installed in front of the lens 3, and an electron beam is irradiated on a sample after being focused with the lens 1. After that, the electron beam transmitted by the sample 2 is focused on the iris 4 by means of the lenses 3 and 10.
JP2545981A 1981-02-25 1981-02-25 Transmission-type electron microscope Granted JPS57141851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2545981A JPS57141851A (en) 1981-02-25 1981-02-25 Transmission-type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2545981A JPS57141851A (en) 1981-02-25 1981-02-25 Transmission-type electron microscope

Publications (2)

Publication Number Publication Date
JPS57141851A true JPS57141851A (en) 1982-09-02
JPH0234142B2 JPH0234142B2 (en) 1990-08-01

Family

ID=12166606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2545981A Granted JPS57141851A (en) 1981-02-25 1981-02-25 Transmission-type electron microscope

Country Status (1)

Country Link
JP (1) JPS57141851A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57212755A (en) * 1981-06-25 1982-12-27 Internatl Precision Inc Transmission-type electron microscope
JPS6113540A (en) * 1984-06-28 1986-01-21 Internatl Precision Inc Electron microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029187A (en) * 1983-07-26 1985-02-14 アカベ・オブ・スウエ−デン・アクチボラグ Method for guiding clothing to sewing machine and automatic sewing machine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029187A (en) * 1983-07-26 1985-02-14 アカベ・オブ・スウエ−デン・アクチボラグ Method for guiding clothing to sewing machine and automatic sewing machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57212755A (en) * 1981-06-25 1982-12-27 Internatl Precision Inc Transmission-type electron microscope
JPS6113540A (en) * 1984-06-28 1986-01-21 Internatl Precision Inc Electron microscope

Also Published As

Publication number Publication date
JPH0234142B2 (en) 1990-08-01

Similar Documents

Publication Publication Date Title
CA2084408A1 (en) Illumination system and method for a high definition light microscope
GB1426359A (en) Microbeam probe apparatus
JPS5526538A (en) Optical system having movable lens group for focusing
JPS57105715A (en) Uniform scanning lens having high resolving power
JPS57178212A (en) Microscope optical system
JPS57141851A (en) Transmission-type electron microscope
JPS57192920A (en) Scanning optical system for compensating plane falling
JPS53112759A (en) Microscope objective lens
JPS5727551A (en) Electron microscope
JPS57212755A (en) Transmission-type electron microscope
JPS5533716A (en) Electron microscope focusing lens system
JPS55128243A (en) Electron microscope
JPS53112760A (en) Wide field microscopic objective lens
JPS5519722A (en) Corpuscular ray microanalyzer
JPS5667822A (en) Focal diaphragm
JPS5760648A (en) Electron microscope
JPS5757460A (en) Electron microscope
JPS57130354A (en) Electronic optical bodytube
JPS5532304A (en) Electron microscope with optical microscope
JPS5773713A (en) Rear conversion lens for astronomical telescope
ES293486U (en) Microscope.
JPS5715421A (en) Electron beam exposing device
JPS5711464A (en) Electron microscope
JPS54134605A (en) Method and appartus of controlling focus
JPS55113242A (en) Electron gun for picture tube