JPS5519722A - Corpuscular ray microanalyzer - Google Patents
Corpuscular ray microanalyzerInfo
- Publication number
- JPS5519722A JPS5519722A JP9187278A JP9187278A JPS5519722A JP S5519722 A JPS5519722 A JP S5519722A JP 9187278 A JP9187278 A JP 9187278A JP 9187278 A JP9187278 A JP 9187278A JP S5519722 A JPS5519722 A JP S5519722A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light source
- imaging
- objective lens
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Microscoopes, Condenser (AREA)
Abstract
PURPOSE: To enhance a precision of utilization of the optical system, with an overlapping of flare eliminated to the sample image and the contrast improved, by means of arranging an installation of opaque substance, for limiting an incident light to the hole of objective lens, to an appropriate place on optical axis of the optical microscope.
CONSTITUTION: With metals of Al, Cr, etc. evaporated on a transparent glass plate so as to shut out a light beam passing through electron beam hole of an objective lens 13, is constructed the evaporation portion 17 of a shielding plate 16, which is provided in the position of a first light source image A. Accordingly, an imaging, made by a condenser lens 6, of the light, as shown by dotted line in the drawing, from the center portion of a light source 5, is cut by the evaporation portion 17 of the shielding plate 16, and the first light source image A, made by a light of full line as shown in the drawing, from the portion other than the center part of the light source 5, generates a second light source image B through a projection lesn 7, with its light passing through the portion other than the objective lens 13 hole to be irradiated to a sample 4. Further with its reflecting light passing through an eye lens 12 in the reverse route, the imaging is made in the eyeball retina. In this way, an overlapping of unnecessary light, causing a flare to the imaging in the retina, can be prevented.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9187278A JPS5856954B2 (en) | 1978-07-27 | 1978-07-27 | Particle beam microanalyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9187278A JPS5856954B2 (en) | 1978-07-27 | 1978-07-27 | Particle beam microanalyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5519722A true JPS5519722A (en) | 1980-02-12 |
| JPS5856954B2 JPS5856954B2 (en) | 1983-12-17 |
Family
ID=14038642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9187278A Expired JPS5856954B2 (en) | 1978-07-27 | 1978-07-27 | Particle beam microanalyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5856954B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS628437A (en) * | 1985-07-04 | 1987-01-16 | Jeol Ltd | Particle beam micro-analyzer |
| JPS6241660U (en) * | 1985-07-25 | 1987-03-12 | ||
| JPS62167210U (en) * | 1986-04-11 | 1987-10-23 | ||
| JPH01304648A (en) * | 1988-06-01 | 1989-12-08 | Hitachi Ltd | Convergence ion beam processor |
| TWI565861B (en) * | 2016-01-14 | 2017-01-11 | 臺灣塑膠工業股份有限公司 | Multilayer well casing |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60253856A (en) * | 1984-05-30 | 1985-12-14 | Fujitsu Ltd | Method for monitoring contamination of furnance core tube |
-
1978
- 1978-07-27 JP JP9187278A patent/JPS5856954B2/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS628437A (en) * | 1985-07-04 | 1987-01-16 | Jeol Ltd | Particle beam micro-analyzer |
| JPS6241660U (en) * | 1985-07-25 | 1987-03-12 | ||
| JPS62167210U (en) * | 1986-04-11 | 1987-10-23 | ||
| JPH01304648A (en) * | 1988-06-01 | 1989-12-08 | Hitachi Ltd | Convergence ion beam processor |
| TWI565861B (en) * | 2016-01-14 | 2017-01-11 | 臺灣塑膠工業股份有限公司 | Multilayer well casing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5856954B2 (en) | 1983-12-17 |
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