JPS5532304A - Electron microscope with optical microscope - Google Patents
Electron microscope with optical microscopeInfo
- Publication number
- JPS5532304A JPS5532304A JP10388978A JP10388978A JPS5532304A JP S5532304 A JPS5532304 A JP S5532304A JP 10388978 A JP10388978 A JP 10388978A JP 10388978 A JP10388978 A JP 10388978A JP S5532304 A JPS5532304 A JP S5532304A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- electron
- microscope
- eyepiece
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
PURPOSE: To enable both of the electron microscopic image and the optical microscopic image to be observed through a same eyepiece, by guiding light rays from an image produced on a fluorescent plate in the electron microscope body into the direction along the optical axis of the optical microscope via an optical system.
CONSTITUTION: An optical microscope B having a light source 12, converging lenses 13, 13', an objective lens 14, a prism 21, an eyepiece 15, and a specimen chamber 16 into which a specimen 10 is movable, is provided adjacent to the electron microscope A in which electron beams from an electron gun 1 are transmitted through the specimen 10 and produce an enlarged image on a fluorescent plate 9 via a converging lens 3, an objective 4, and an intermediate lens 8. An optical system C guides an image produced on the fluorescent plate 9 to an eyepiece 15 via an observing window 18, reflecting mirrors 19, 19', an objective 20, and a prism 21', and a telescope formed of the objective 20 and the eyepiece 15 enables the observation of the image on the fluorescent plate 9.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10388978A JPS5532304A (en) | 1978-08-28 | 1978-08-28 | Electron microscope with optical microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10388978A JPS5532304A (en) | 1978-08-28 | 1978-08-28 | Electron microscope with optical microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5532304A true JPS5532304A (en) | 1980-03-07 |
Family
ID=14365985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10388978A Pending JPS5532304A (en) | 1978-08-28 | 1978-08-28 | Electron microscope with optical microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5532304A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011126041A1 (en) * | 2010-04-06 | 2011-10-13 | 大学共同利用機関法人自然科学研究機構 | Compound microscope device |
| JP2012521541A (en) * | 2009-03-18 | 2012-09-13 | ユニバーシティ オブ ユタ リサーチ ファウンデーション | Non-coherent optical microscope |
| WO2014192361A1 (en) * | 2013-05-30 | 2014-12-04 | 株式会社 日立ハイテクノロジーズ | Charged-particle-beam device and specimen observation method |
| US8994807B2 (en) | 2009-03-18 | 2015-03-31 | University Of Utah Research Foundation | Microscopy system and method for creating three dimensional images using probe molecules |
| WO2018068506A1 (en) | 2016-10-11 | 2018-04-19 | Focus-Ebeam Technology (Beijing) Co., Ltd. | Charged particle beam system, opto-electro simultaneous detection system and method |
-
1978
- 1978-08-28 JP JP10388978A patent/JPS5532304A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012521541A (en) * | 2009-03-18 | 2012-09-13 | ユニバーシティ オブ ユタ リサーチ ファウンデーション | Non-coherent optical microscope |
| US8994807B2 (en) | 2009-03-18 | 2015-03-31 | University Of Utah Research Foundation | Microscopy system and method for creating three dimensional images using probe molecules |
| WO2011126041A1 (en) * | 2010-04-06 | 2011-10-13 | 大学共同利用機関法人自然科学研究機構 | Compound microscope device |
| JP5842308B2 (en) * | 2010-04-06 | 2016-01-13 | 大学共同利用機関法人自然科学研究機構 | Compound microscope equipment |
| US9310596B2 (en) | 2010-04-06 | 2016-04-12 | Inter-University Research Institute Corporation National Institute Of Natural Sciences | Compound microscope device |
| WO2014192361A1 (en) * | 2013-05-30 | 2014-12-04 | 株式会社 日立ハイテクノロジーズ | Charged-particle-beam device and specimen observation method |
| CN105247650A (en) * | 2013-05-30 | 2016-01-13 | 株式会社日立高新技术 | Charged-particle-beam device and specimen observation method |
| US9466460B2 (en) | 2013-05-30 | 2016-10-11 | Hitachi High-Technologies Corporation | Charged particle-beam device and specimen observation method |
| JPWO2014192361A1 (en) * | 2013-05-30 | 2017-02-23 | 株式会社日立ハイテクノロジーズ | Charged particle beam device, sample observation method |
| WO2018068506A1 (en) | 2016-10-11 | 2018-04-19 | Focus-Ebeam Technology (Beijing) Co., Ltd. | Charged particle beam system, opto-electro simultaneous detection system and method |
| EP3332417A4 (en) * | 2016-10-11 | 2018-11-07 | Focus-eBeam Technology (Beijing) Co., Ltd. | Charged particle beam system, opto-electro simultaneous detection system and method |
| US10879036B2 (en) | 2016-10-11 | 2020-12-29 | Focus-Ebeam Technology (Beijing) Co., Ltd. | Charged particle beam system, opto-electro simultaneous detection system and method |
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