JPS57212755A - Transmission-type electron microscope - Google Patents

Transmission-type electron microscope

Info

Publication number
JPS57212755A
JPS57212755A JP9747581A JP9747581A JPS57212755A JP S57212755 A JPS57212755 A JP S57212755A JP 9747581 A JP9747581 A JP 9747581A JP 9747581 A JP9747581 A JP 9747581A JP S57212755 A JPS57212755 A JP S57212755A
Authority
JP
Japan
Prior art keywords
lens
stop
visual
transmission
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9747581A
Other languages
Japanese (ja)
Inventor
Akira Yonezawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
KOKUSAI SEIKO
KOKUSAI SEIKOU KK
Original Assignee
INTERNATL PRECISION Inc
KOKUSAI SEIKO
KOKUSAI SEIKOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc, KOKUSAI SEIKO, KOKUSAI SEIKOU KK filed Critical INTERNATL PRECISION Inc
Priority to JP9747581A priority Critical patent/JPS57212755A/en
Publication of JPS57212755A publication Critical patent/JPS57212755A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Abstract

PURPOSE:To obtain a high-quality image with a low multiplying factor and a high visual field by making the non-axial aberration and the axial aberration of a transmission-type electron microscope small by installing a setting lens between an objective lens and a visual-field limiting stop, and focusing an electron beam on the visual-field limiting stop by means of the objective lens and the setting lens. CONSTITUTION:A transmission-type electron microscope has an objective lens 3, an intermediate lens 5 installed in back of the lens 3, an imaging lens 7, and a visual-field limiting stop 4 located between the lenses 3 and 5. A setting lens 10 is provided between the lens 3 and the stop 4. In addition, a focusing lens 1 is provided in front of the lens 3, and an electron beam is irradiated on a sample 2 after being focused by the lens 1. The above lens 3 is relatively weakly excited, and the lens 10 is excited to a given degree so as to make an electron beam 8 transmitted by the sample 2 to be focused on the stop 4. Consequently, the contrast of an observed image is increased by regulating the opening angles of electron rays scattered from the sample 2 by controlling the stop 4.
JP9747581A 1981-06-25 1981-06-25 Transmission-type electron microscope Pending JPS57212755A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9747581A JPS57212755A (en) 1981-06-25 1981-06-25 Transmission-type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9747581A JPS57212755A (en) 1981-06-25 1981-06-25 Transmission-type electron microscope

Publications (1)

Publication Number Publication Date
JPS57212755A true JPS57212755A (en) 1982-12-27

Family

ID=14193314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9747581A Pending JPS57212755A (en) 1981-06-25 1981-06-25 Transmission-type electron microscope

Country Status (1)

Country Link
JP (1) JPS57212755A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59170753A (en) * 1983-03-17 1984-09-27 Jeol Ltd Electron ray diffracting device
JPS60189857A (en) * 1984-03-10 1985-09-27 Jeol Ltd Energy analyzer in electron microscope or the like
JPS6113540A (en) * 1984-06-28 1986-01-21 Internatl Precision Inc Electron microscope
JPS62110246A (en) * 1985-11-08 1987-05-21 Jeol Ltd Electron microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57141851A (en) * 1981-02-25 1982-09-02 Internatl Precision Inc Transmission-type electron microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57141851A (en) * 1981-02-25 1982-09-02 Internatl Precision Inc Transmission-type electron microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59170753A (en) * 1983-03-17 1984-09-27 Jeol Ltd Electron ray diffracting device
JPH04336B2 (en) * 1983-03-17 1992-01-07 Nippon Electron Optics Lab
JPS60189857A (en) * 1984-03-10 1985-09-27 Jeol Ltd Energy analyzer in electron microscope or the like
JPS6113540A (en) * 1984-06-28 1986-01-21 Internatl Precision Inc Electron microscope
JPS62110246A (en) * 1985-11-08 1987-05-21 Jeol Ltd Electron microscope

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