JPS55126951A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS55126951A
JPS55126951A JP3337879A JP3337879A JPS55126951A JP S55126951 A JPS55126951 A JP S55126951A JP 3337879 A JP3337879 A JP 3337879A JP 3337879 A JP3337879 A JP 3337879A JP S55126951 A JPS55126951 A JP S55126951A
Authority
JP
Japan
Prior art keywords
electron microscope
condenser
image observation
radiation system
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3337879A
Other languages
Japanese (ja)
Inventor
Moriki Kubozoe
Sadaji Katsuta
Isao Matsui
Sadao Terakado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3337879A priority Critical patent/JPS55126951A/en
Publication of JPS55126951A publication Critical patent/JPS55126951A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To sharply change the spot diameter of electron beam by providing 3 condenser lenses independently in a radiation system and properly using these for transparent electron microscope image observation and the scanning image observation.
CONSTITUTION: The first and third condenser lenses 3 and 5 are used as the radiation system for transparent electron microscope image observation, that is, the so-called radiation system of a doble condenser system. In this case, by changing the excitation of the first condenser 3, the spot diameter electron beam can sharply be changed. On the other hand, when the electron microscope is used as a scanning electron microscope, the second condenser 4 is actuated besides the first and third condensers 3 and 5. By jointly using the electron lens of a magnetic field by the strong excitation of the object lens 7, an exceedingly small electron beam spot is formed on the surface of a sample.
COPYRIGHT: (C)1980,JPO&Japio
JP3337879A 1979-03-23 1979-03-23 Electron microscope Pending JPS55126951A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3337879A JPS55126951A (en) 1979-03-23 1979-03-23 Electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3337879A JPS55126951A (en) 1979-03-23 1979-03-23 Electron microscope

Publications (1)

Publication Number Publication Date
JPS55126951A true JPS55126951A (en) 1980-10-01

Family

ID=12384923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3337879A Pending JPS55126951A (en) 1979-03-23 1979-03-23 Electron microscope

Country Status (1)

Country Link
JP (1) JPS55126951A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193248A (en) * 1984-03-15 1985-10-01 Internatl Precision Inc Method for irradiating electron rays in electron ray device
JPS614142A (en) * 1984-06-16 1986-01-10 Jeol Ltd Illumination lens system in electron microscope or the like
JPS6171539A (en) * 1984-09-13 1986-04-12 Internatl Precision Inc Irradiation system for electron beam device
JPS6199257A (en) * 1984-10-22 1986-05-17 Internatl Precision Inc Irradiation system of electron beam equipment
JPS6261252A (en) * 1985-09-12 1987-03-17 Jeol Ltd Irradiation lens device for electron microscope
NL9300952A (en) * 1992-06-05 1994-01-03 Hitachi Ltd FIELD EMISSION TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR ITS COMPANIES.

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193248A (en) * 1984-03-15 1985-10-01 Internatl Precision Inc Method for irradiating electron rays in electron ray device
JPS614142A (en) * 1984-06-16 1986-01-10 Jeol Ltd Illumination lens system in electron microscope or the like
JPH041459B2 (en) * 1984-06-16 1992-01-13 Nippon Electron Optics Lab
JPS6171539A (en) * 1984-09-13 1986-04-12 Internatl Precision Inc Irradiation system for electron beam device
JPS6199257A (en) * 1984-10-22 1986-05-17 Internatl Precision Inc Irradiation system of electron beam equipment
JPS6261252A (en) * 1985-09-12 1987-03-17 Jeol Ltd Irradiation lens device for electron microscope
NL9300952A (en) * 1992-06-05 1994-01-03 Hitachi Ltd FIELD EMISSION TRANSMISSION ELECTRON MICROSCOPE AND METHOD FOR ITS COMPANIES.
US5373158A (en) * 1992-06-05 1994-12-13 Hitachi, Ltd. Field-emission transmission electron microscope and operation method thereof

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