JPS5448477A - Automatic focussing unit for scanning type electronic microscope and the like - Google Patents

Automatic focussing unit for scanning type electronic microscope and the like

Info

Publication number
JPS5448477A
JPS5448477A JP11534777A JP11534777A JPS5448477A JP S5448477 A JPS5448477 A JP S5448477A JP 11534777 A JP11534777 A JP 11534777A JP 11534777 A JP11534777 A JP 11534777A JP S5448477 A JPS5448477 A JP S5448477A
Authority
JP
Japan
Prior art keywords
circuit
focussing
fed
comparator
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11534777A
Other languages
Japanese (ja)
Inventor
Takao Namae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP11534777A priority Critical patent/JPS5448477A/en
Publication of JPS5448477A publication Critical patent/JPS5448477A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the occurrence of damage due to the electron beam for the important part on the test piece, by avoiding the focussing on the important part, through focussing to the desired part of picture with the disination of timing initiating the focussing operation.
CONSTITUTION: The test piece 3 is scanned with the electron beam 2 by the deflection coils 5X and 5Y operated with the signal from the objective lens 1 and the scanning circuit 4. Simultaneously, the horizontal scanning signal from the circuit 4 is fed to the sutomatic focussing unit 6, and the current to the lens 1 from the unit 6 is changed in cynchronizing with this. Further, the FF circuit 7 is set to "0" condition with the pulse from the circuit 4, and the position designation signal from the potentiometer 9 connected to the circuit 7 is fed to one terminal of the comparator 10. After that, the vertical scanning signal from the circuit 4 is fed to another input terminal of the comparator 10 via the level adjusting circuit 11, and the output signal of the comparator 10 is fed to the focussing unit 6 via the pulse generator 12. Thus, focus is formed on the designated part with the meter 9
COPYRIGHT: (C)1979,JPO&Japio
JP11534777A 1977-09-26 1977-09-26 Automatic focussing unit for scanning type electronic microscope and the like Pending JPS5448477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11534777A JPS5448477A (en) 1977-09-26 1977-09-26 Automatic focussing unit for scanning type electronic microscope and the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11534777A JPS5448477A (en) 1977-09-26 1977-09-26 Automatic focussing unit for scanning type electronic microscope and the like

Publications (1)

Publication Number Publication Date
JPS5448477A true JPS5448477A (en) 1979-04-17

Family

ID=14660269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11534777A Pending JPS5448477A (en) 1977-09-26 1977-09-26 Automatic focussing unit for scanning type electronic microscope and the like

Country Status (1)

Country Link
JP (1) JPS5448477A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5157282A (en) * 1974-11-15 1976-05-19 Hitachi Ltd Sosadenshikenbikyo mataha sonoruijisochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5157282A (en) * 1974-11-15 1976-05-19 Hitachi Ltd Sosadenshikenbikyo mataha sonoruijisochi

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