JPS5543774A - Sample positioning device for electronic line scanning electron beam device - Google Patents
Sample positioning device for electronic line scanning electron beam deviceInfo
- Publication number
- JPS5543774A JPS5543774A JP11707878A JP11707878A JPS5543774A JP S5543774 A JPS5543774 A JP S5543774A JP 11707878 A JP11707878 A JP 11707878A JP 11707878 A JP11707878 A JP 11707878A JP S5543774 A JPS5543774 A JP S5543774A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- memory
- stored
- electronic line
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To make the objective place transferrable to a center of actual scanning electronic line image, by performing a pattern cognizant operation of one kind with respect to the image.
CONSTITUTION: After a setting of a sample 1 on a sample stand 7, a drive device 8 is manually operated while viewing an optical microscope 5, with a required place for analysis on the sample 1 successively brought to center of the view, and a cordinate of the then each place is stored in memory within an integrated controller 9. Thereafter, with the device made into automatic mode, the sample face is made scanning by an electron beam 2, and a detected output of secondary electrons of the sample face and a coordinate on the scanning electronic image are stored in a memory 14. Subsequently, the stored memory is analyzed by a discriminator circuit 15, with a center coordinate of the objective pattern obtained, after a correction of the sample position by controlling a pulse generating circuit 10, the original scanning electronic line image is displayed in a Braun tube 13.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53117078A JPS5840299B2 (en) | 1978-09-22 | 1978-09-22 | Sample positioning device for electron beam scanning electron beam equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53117078A JPS5840299B2 (en) | 1978-09-22 | 1978-09-22 | Sample positioning device for electron beam scanning electron beam equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5543774A true JPS5543774A (en) | 1980-03-27 |
| JPS5840299B2 JPS5840299B2 (en) | 1983-09-05 |
Family
ID=14702847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53117078A Expired JPS5840299B2 (en) | 1978-09-22 | 1978-09-22 | Sample positioning device for electron beam scanning electron beam equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5840299B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS581426U (en) * | 1981-06-26 | 1983-01-07 | 株式会社今仙電機製作所 | Electric wheelchair power steering control device |
| JPS61284040A (en) * | 1985-06-07 | 1986-12-15 | Shimadzu Corp | Electron-ray microanalyzer |
-
1978
- 1978-09-22 JP JP53117078A patent/JPS5840299B2/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS581426U (en) * | 1981-06-26 | 1983-01-07 | 株式会社今仙電機製作所 | Electric wheelchair power steering control device |
| JPH0226497Y2 (en) * | 1981-06-26 | 1990-07-19 | ||
| JPS61284040A (en) * | 1985-06-07 | 1986-12-15 | Shimadzu Corp | Electron-ray microanalyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5840299B2 (en) | 1983-09-05 |
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