JPS59196547A - Sample image display device - Google Patents

Abstract

PURPOSE:To adjust automatically a picture of a photographic image to the most suitable state according to photographic scanning speed by providing the picture tone level setting part or the like setting the picture tone level adaptable to photographic scanning speed by an output of the photographic scanning speed setting part. CONSTITUTION:When a photographic starting switch 14 is operated ''ON'', photographic scanning speed is set by operation of a change-over switch 10 after being operated ''ON''. Thereafter, a brightness level and a contrast level according to the photographic scanning speed set by the change-over switch 10 are selected by the change-over switches 15 and 16 by a control signal from a microcomputer 11, while said levels are supplied to an automatic picture tone adjusting device 7. Then, when an operation starting switch 17 is operated ''ON'' by the control signal of the microcomputer 11, the automatic picture tone adjusting device 7 adjusts the picture tone of the picture image signal according to the picture tone levels from the brightness level setting device 12 and the contrast level setting device 13.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a specimen image display device, and in particular, it scans a specimen by applying a focused electron beam to the specimen, and generates secondary electron beams emitted from the specimen. Convert it to an image signal, scan this image signal on the screen at the shooting scanning speed, and display the image of the sample. The present invention relates to a sample image display device suitable for photographing.

[Background of the invention]

In the conventional sample image light 7F, when photographing a sample image, does an automatic image adjustment device for fully adjusting the image tone of the sample image operate before photographing, or does it adjust the image of the sample image before photographing? , the image quality was manually adjusted. A sample image display device equipped with an automatic video adjustment device can photograph all sample images with optimal image tone at a photographic scanning speed predetermined by the automatic video adjustment device. However, in a sample image display device equipped with an automatic image adjustment device, if the imaging scanning speed is faster than the predetermined imaging scanning speed, the overall image will be dark, and if it is slower, the image will be brighter. Therefore, when the photographing scanning speed is fully variable, the conventional apparatus has the disadvantage that the image tone must be fully adjusted manually.

[Purpose of the invention]

The present invention has been made in view of the above-mentioned conventional problems, and its purpose is to provide a sample image display device that can automatically adjust the image of a photographed image to an optimal state according to the photographing scanning speed. It is about providing.

[Summary of the invention]

In order to achieve all of the above objects, the present invention applies a focused electron beam to a sample, scans it, converts it into a secondary single-element image signal emitted from the sample, and displays this image signal on a screen at a photographing scanning speed. In the sample image display device that scans and photographs the image of the sample shown in the image, there is a photographic scanning speed setting section that varies the photographing scanning speed, and an adjustment adjustment that adapts to the photographing scanning speed based on the output of the photographing scanning speed setting section. An image level setting section provided with a V-belke, an image adjustment section that adjusts the image level of the image signal according to the image level of the output of the image level setting section, and a shooting scanning speed of the image signal after the image adjustment. All features include a photographing section that scans the screen at the photographing scanning speed output from the setting section and photographs an image of the displayed sample.

[Embodiments of the invention]

Hereinafter, preferred embodiments of the present invention will be described based on the drawings.

The drawings show an embodiment in which a secondary electron image is taken using a scanning microscope.

In the drawing, when a sample 2 is scanned by a converged primary electron beam 1, secondary electrons 3 are emitted from the sample 2. This secondary 'electron 3 is detected by a detector 4, and the detection output is supplied to a video amplifier 5. The video amplifier 5 converts the detection output of the detector 4 into a total image signal and supplies it to the observation cathode ray tube 6.

An image signal is supplied to the cathode ray tube 6, and when the image signal scans the cathode ray tube, an image of the sample 2 is displayed on the screen of the cathode ray tube 6. The image signal supplied to the cathode ray tube 6 is automatically adjusted by an automatic image adjustment device 7IK-, which constitutes an image adjustment section, so that the image of the sample 2 has an optimal image quality. Further, the automatic video tone adjustment device 7 is capable of automatically adjusting the image signal supplied from the video amplifier 5 to the photographing cathode ray tube 9 through the switch 8 to an image signal having an image tone corresponding to the photographing scanning speed of the cathode ray tube 9. can.

That is, in this embodiment, the image capturing/scanning speed of the cathode ray tube 9 is controlled by a selector switch 10 as a setting section for the variable capturing/scanning speed, a microcomputer 11, and an output of the imaging/scanning speed setting section. A brightness level setting device 12 and a contrast level setting device 13 are provided as setting units for setting all the home V bells. Then, when the photographing start switch 14 is turned on, the photographing scanning speed is set by operating the switching switch 10 after turning on the photographing start switch 14 . Thereafter, according to a control signal from the microcomputer 11, the brightness level and contrast level that match the photographic scanning speed set by the changeover switch 10 are selected by the changeover switch 15.16, and these levels are automatically adjusted. It is supplied to the device 7. After that, when the operation start switch 17 is turned on by the control signal from the microcomputer 11, the automatic image tone adjustment device 7 adjusts the image signal according to the image tone level from the brightness level setting device 12 and the contrast nopel setting device 13. Adjust the image tone. After that, when the switch 8 is turned on by a control signal from the microcomputer 11, the automatic teeth i,
iA! The image IT signal whose image tone has been adjusted by the adjustment device 7 is supplied to the cathode ray tube 9, and the image of the sample 2 is displayed on the cathode ray tube 9 at the scanning speed selected by the changeover switch 10. Being photographed. Note that when the switch 8 is turned on, the operation start switch 17 is turned off.

In this manner, in this embodiment, when the photographing scanning speed is varied, an image tone level that matches the photographing scanning speed is set, and the image tone of the image signal is automatically adjusted according to this image tone level and supplied to the cathode ray tube 9. Therefore, even if the photographing scanning speed is varied, the image signal is automatically adjusted to an image tone corresponding to the photographing scanning speed, and a photographed image with a uniform image tone can be obtained.

〔Effect of the invention〕

As explained above, according to the present invention, even if the shooting scanning speed is fully variable, the image tone of the image signal is adjusted at the image level that matches the shooting scanning speed. This method also has the excellent effect of being able to obtain well-adjusted images of the sample.

[Brief explanation of the drawing]

Is the drawing an example of the present invention? ] It is a block diagram of l-Boss. 2...Sample, 3...Secondary 'Sakiko', 4...Detector,
5...Hiteo scale width device, 7...Automatic adjustment device, 9
... Bufun y for the terrible shadow, to... changeover switch, 1
1...My 9ry computer, 12...Brightness level setting device, u/1

Claims (1)

[Claims] 1. Apply a focused electron beam to the sample and scan it, convert the secondary beam emitted from the sample into an image signal, scan this image signal on the screen at the full shooting scanning speed, and display the displayed image of the sample. In a sample image display device for photographing, a photographing scanning speed setting section that changes the photographing scanning speed, an image tone V bell setting section that sets an image tone V bell suitable for the photographing scanning speed by an output of the photographing scanning speed setting section; An image tone adjustment section that fully adjusts the image tone of the image signal according to the image tone level output from the image tone level setting section, and scans the adjusted image signal onto the screen at the shooting scanning speed output from the shooting scanning speed setting section. A sample image display device comprising: a photographing section for photographing an image of a displayed sample;