JPS57196465A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS57196465A
JPS57196465A JP8143781A JP8143781A JPS57196465A JP S57196465 A JPS57196465 A JP S57196465A JP 8143781 A JP8143781 A JP 8143781A JP 8143781 A JP8143781 A JP 8143781A JP S57196465 A JPS57196465 A JP S57196465A
Authority
JP
Japan
Prior art keywords
sample
scanning
output
generating circuit
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8143781A
Other languages
Japanese (ja)
Other versions
JPS631700B2 (en
Inventor
Hironobu Moriwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TECHNICS KK
Priority to JP8143781A priority Critical patent/JPS57196465A/en
Publication of JPS57196465A publication Critical patent/JPS57196465A/en
Publication of JPS631700B2 publication Critical patent/JPS631700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To enable the physical change with a long cycle of a sample to be observed by providing a means of switching the sample into a different physical state synchronously with the horizontal scanning of electron rays irradiating the sample, and providing a means of displaying plural sample-images each corresponding to a different physical state of the sample. CONSTITUTION:A scanning-signal generating circuit 9 produces a scanning signal with a frequency twice the frequency of the output of a scanning-signal generating circuit 4 according to the output of the circuit 4. Since the frequency of a coil 11 is several hundred times that of the horizontal scanning signal, the two- dimensional scannings of both a sample surface and a Braun-tube picture surface are carried out. When a coil 16 is supplied with the output current of a rectangular-wave generating circuit 17, which produces a current with rectangular waves indicated in the figure 5 according to the output of a generator 3, a breakable sample such as silicon steel undergoes an a.c. breakdown. Scanning images displayed on the right and the left sides of the Braun-tube picture surface, respectively, correspond to the states of the breakable sample broken in (+) direction and (-) direction. As a result, two different images of the sample placed under different conditions can be observed at the same time.
JP8143781A 1981-05-28 1981-05-28 Scanning electron microscope Granted JPS57196465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8143781A JPS57196465A (en) 1981-05-28 1981-05-28 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8143781A JPS57196465A (en) 1981-05-28 1981-05-28 Scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS57196465A true JPS57196465A (en) 1982-12-02
JPS631700B2 JPS631700B2 (en) 1988-01-13

Family

ID=13746366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8143781A Granted JPS57196465A (en) 1981-05-28 1981-05-28 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS57196465A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0121309A2 (en) * 1983-03-31 1984-10-10 Research Development Corporation of Japan Scan line type dynamic observation apparatus
JPS59182371A (en) * 1983-03-31 1984-10-17 Res Dev Corp Of Japan Polyphase simultaneous observation device
JPS60195860A (en) * 1984-03-16 1985-10-04 Res Dev Corp Of Japan Dynamic observation display system
JPS61109252A (en) * 1984-10-31 1986-05-27 Shimadzu Corp Sample holding plate
JPH053141U (en) * 1991-06-27 1993-01-19 益弘 光山 Bag support
JPH0676201U (en) * 1993-03-31 1994-10-28 久雄 下山 Disposable assembled garbage bag

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02122893A (en) * 1988-10-31 1990-05-10 Meidensha Corp Anaerobic treatment equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623477U (en) * 1979-08-01 1981-03-03

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52126686A (en) * 1976-04-17 1977-10-24 Ibiden Eng Method of manufacturing purifying liquids for acetylene gas

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623477U (en) * 1979-08-01 1981-03-03

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0121309A2 (en) * 1983-03-31 1984-10-10 Research Development Corporation of Japan Scan line type dynamic observation apparatus
JPS59182371A (en) * 1983-03-31 1984-10-17 Res Dev Corp Of Japan Polyphase simultaneous observation device
JPH0423376B2 (en) * 1983-03-31 1992-04-22 Shingijutsu Kaihatsu Jigyodan
JPS60195860A (en) * 1984-03-16 1985-10-04 Res Dev Corp Of Japan Dynamic observation display system
JPH0574183B2 (en) * 1984-03-16 1993-10-15 Shingijutsu Kaihatsu Jigyodan
JPS61109252A (en) * 1984-10-31 1986-05-27 Shimadzu Corp Sample holding plate
JPH053141U (en) * 1991-06-27 1993-01-19 益弘 光山 Bag support
JPH0676201U (en) * 1993-03-31 1994-10-28 久雄 下山 Disposable assembled garbage bag

Also Published As

Publication number Publication date
JPS631700B2 (en) 1988-01-13

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