JPS5232676A - Pattern check system - Google Patents

Pattern check system

Info

Publication number
JPS5232676A
JPS5232676A JP50109138A JP10913875A JPS5232676A JP S5232676 A JPS5232676 A JP S5232676A JP 50109138 A JP50109138 A JP 50109138A JP 10913875 A JP10913875 A JP 10913875A JP S5232676 A JPS5232676 A JP S5232676A
Authority
JP
Japan
Prior art keywords
check system
pattern check
mask
rays
check
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50109138A
Other languages
Japanese (ja)
Inventor
Yoshiaki Goto
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50109138A priority Critical patent/JPS5232676A/en
Publication of JPS5232676A publication Critical patent/JPS5232676A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

PURPOSE: The corresponding positions between reference mask and to-be-checked mask are simultaneously scanned in parallel by two rays of electronic beam to check the difference signal. In this way, the defect diagram of the mask can be displayed.
COPYRIGHT: (C)1977,JPO&Japio
JP50109138A 1975-09-08 1975-09-08 Pattern check system Pending JPS5232676A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50109138A JPS5232676A (en) 1975-09-08 1975-09-08 Pattern check system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50109138A JPS5232676A (en) 1975-09-08 1975-09-08 Pattern check system

Publications (1)

Publication Number Publication Date
JPS5232676A true JPS5232676A (en) 1977-03-12

Family

ID=14502547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50109138A Pending JPS5232676A (en) 1975-09-08 1975-09-08 Pattern check system

Country Status (1)

Country Link
JP (1) JPS5232676A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53121456A (en) * 1977-03-31 1978-10-23 Hitachi Ltd Scanning type electromicroscope having a plural number of mirror cylinders
JPS597954A (en) * 1982-07-06 1984-01-17 Nec Corp Reduced projection type exposing device
JPS5963725A (en) * 1982-10-05 1984-04-11 Toshiba Corp Pattern inspector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53121456A (en) * 1977-03-31 1978-10-23 Hitachi Ltd Scanning type electromicroscope having a plural number of mirror cylinders
JPS597954A (en) * 1982-07-06 1984-01-17 Nec Corp Reduced projection type exposing device
JPS5963725A (en) * 1982-10-05 1984-04-11 Toshiba Corp Pattern inspector
JPS633450B2 (en) * 1982-10-05 1988-01-23 Tokyo Shibaura Electric Co

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