JPS5250688A - Checking device for defect of oriented pattern - Google Patents

Checking device for defect of oriented pattern

Info

Publication number
JPS5250688A
JPS5250688A JP12702675A JP12702675A JPS5250688A JP S5250688 A JPS5250688 A JP S5250688A JP 12702675 A JP12702675 A JP 12702675A JP 12702675 A JP12702675 A JP 12702675A JP S5250688 A JPS5250688 A JP S5250688A
Authority
JP
Japan
Prior art keywords
defect
checking device
oriented pattern
oriented
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12702675A
Other languages
Japanese (ja)
Other versions
JPS5419748B2 (en
Inventor
Masakata Minami
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12702675A priority Critical patent/JPS5250688A/en
Publication of JPS5250688A publication Critical patent/JPS5250688A/en
Publication of JPS5419748B2 publication Critical patent/JPS5419748B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE: To display normal and defective oriented pattern such as IC mask by different colour on the monitor scope.
COPYRIGHT: (C)1977,JPO&Japio
JP12702675A 1975-10-22 1975-10-22 Checking device for defect of oriented pattern Granted JPS5250688A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12702675A JPS5250688A (en) 1975-10-22 1975-10-22 Checking device for defect of oriented pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12702675A JPS5250688A (en) 1975-10-22 1975-10-22 Checking device for defect of oriented pattern

Publications (2)

Publication Number Publication Date
JPS5250688A true JPS5250688A (en) 1977-04-22
JPS5419748B2 JPS5419748B2 (en) 1979-07-17

Family

ID=14949831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12702675A Granted JPS5250688A (en) 1975-10-22 1975-10-22 Checking device for defect of oriented pattern

Country Status (1)

Country Link
JP (1) JPS5250688A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114154A (en) * 1988-10-24 1990-04-26 Hitachi Ltd Reticle inspection and apparatus therefor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60184009U (en) * 1984-05-16 1985-12-06 東京特殊電線株式会社 optical fiber connector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114154A (en) * 1988-10-24 1990-04-26 Hitachi Ltd Reticle inspection and apparatus therefor

Also Published As

Publication number Publication date
JPS5419748B2 (en) 1979-07-17

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