JPS5226154A - Scanning particles microscopes - Google Patents
Scanning particles microscopesInfo
- Publication number
- JPS5226154A JPS5226154A JP10216975A JP10216975A JPS5226154A JP S5226154 A JPS5226154 A JP S5226154A JP 10216975 A JP10216975 A JP 10216975A JP 10216975 A JP10216975 A JP 10216975A JP S5226154 A JPS5226154 A JP S5226154A
- Authority
- JP
- Japan
- Prior art keywords
- microscopes
- field
- visula
- scanning
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: By providing an electrical visula field transfer function which is capable of selecting a very wide range of visula field and which has a high operation in any magnification, the transfer rate of visual field shall be kept constant.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10216975A JPS5226154A (en) | 1975-08-25 | 1975-08-25 | Scanning particles microscopes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10216975A JPS5226154A (en) | 1975-08-25 | 1975-08-25 | Scanning particles microscopes |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5226154A true JPS5226154A (en) | 1977-02-26 |
JPS5548428B2 JPS5548428B2 (en) | 1980-12-05 |
Family
ID=14320193
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10216975A Granted JPS5226154A (en) | 1975-08-25 | 1975-08-25 | Scanning particles microscopes |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226154A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54111274A (en) * | 1978-02-20 | 1979-08-31 | Jeol Ltd | Scanning electron microscope |
JPH09312142A (en) * | 1996-05-23 | 1997-12-02 | Jeol Ltd | Scanning electron microscope |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4718448U (en) * | 1971-04-05 | 1972-11-01 | ||
JPS5212451U (en) * | 1975-07-14 | 1977-01-28 |
-
1975
- 1975-08-25 JP JP10216975A patent/JPS5226154A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4718448U (en) * | 1971-04-05 | 1972-11-01 | ||
JPS5212451U (en) * | 1975-07-14 | 1977-01-28 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54111274A (en) * | 1978-02-20 | 1979-08-31 | Jeol Ltd | Scanning electron microscope |
JPS5824901B2 (en) * | 1978-02-20 | 1983-05-24 | 日本電子株式会社 | scanning electron microscope |
JPH09312142A (en) * | 1996-05-23 | 1997-12-02 | Jeol Ltd | Scanning electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS5548428B2 (en) | 1980-12-05 |
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